Patent | Date |
---|
Negative capacitance matching in gate electrode structures Grant 10,332,969 - Galatage , et al. | 2019-06-25 |
Negative Capacitance Matching In Gate Electrode Structures App 20190115437 - Galatage; Rohit ;   et al. | 2019-04-18 |
Negative capacitance matching in gate electrode structures Grant 10,141,414 - Galatage , et al. Nov | 2018-11-27 |
Fin-FET resonant body transistor Grant 10,002,859 - Bahr , et al. June 19, 2 | 2018-06-19 |
Methods to utilize piezoelectric materials as gate dielectric in high frequency RBTs in an IC device Grant 9,997,695 - Krivokapic , et al. June 12, 2 | 2018-06-12 |
Fin-FET resonant body transistor Grant 9,899,363 - Bahr , et al. February 20, 2 | 2018-02-20 |
METHODS TO UTILIZE PIEZOELECTRIC MATERIALS AS GATE DIELECTRIC IN HIGH FREQUENCY RBTs IN AN IC DEVICE App 20170222126 - KRIVOKAPIC; Zoran ;   et al. | 2017-08-03 |
III-V NFETs including channel barrier layers to reduce band-to-band leakage current Grant 9,685,529 - Nayak , et al. June 20, 2 | 2017-06-20 |
Methods to utilize piezoelectric materials as gate dielectric in high frequency RBTs in an IC device Grant 9,673,376 - Krivokapic , et al. June 6, 2 | 2017-06-06 |
MEMs-based resonant FinFET Grant 9,663,346 - Bahr , et al. May 30, 2 | 2017-05-30 |
Asymmetric Channel Growth Of A Cladding Layer Over Fins Of A Field Effect Transistor (finfet) Device App 20150162435 - Sahu; Bhagawan ;   et al. | 2015-06-11 |
Finfet Device With A Graphene Gate Electrode And Methods Of Forming Same App 20140312434 - Krivokapic; Zoran ;   et al. | 2014-10-23 |
FinFET device with a graphene gate electrode and methods of forming same Grant 8,815,739 - Krivokapic , et al. August 26, 2 | 2014-08-26 |
Methods Of Forming Graphene Liners And/or Cap Layers On Copper-based Conductive Structures App 20140145332 - Ryan; Errol T. ;   et al. | 2014-05-29 |
Methods and systems for memory devices with asymmetric switching characteristics Grant 8,681,570 - Chen , et al. March 25, 2 | 2014-03-25 |
Finfet Device With A Graphene Gate Electrode And Methods Of Forming Same App 20140015015 - Krivokapic; Zoran ;   et al. | 2014-01-16 |
Crossbar array memory elements and related read methods Grant 8,605,481 - Chen , et al. December 10, 2 | 2013-12-10 |
Double and triple gate MOSFET devices and methods for making same Grant 8,580,660 - Lin , et al. November 12, 2 | 2013-11-12 |
Methods And Systems For Memory Devices With Asymmetric Switching Characteristics App 20130223162 - Chen; An ;   et al. | 2013-08-29 |
Strained fully depleted silicon on insulator semiconductor device Grant 8,502,283 - Xiang , et al. August 6, 2 | 2013-08-06 |
Method of forming finned semiconductor devices with trench isolation Grant 8,431,466 - Lin , et al. April 30, 2 | 2013-04-30 |
Buried silicide local interconnect with sidewall spacers and method for making the same Grant 8,368,219 - Halliyal , et al. February 5, 2 | 2013-02-05 |
Germanium MOSFET devices and methods for making same Grant 8,334,181 - An , et al. December 18, 2 | 2012-12-18 |
Signal control elements in ferromagnetic logic Grant 8,331,135 - Chen , et al. December 11, 2 | 2012-12-11 |
Sidewall graphene devices for 3-D electronics Grant 8,304,760 - Chen , et al. November 6, 2 | 2012-11-06 |
Double And Triple Gate Mosfet Devices And Methods For Making Same App 20120252193 - LIN; Ming-Ren ;   et al. | 2012-10-04 |
Double and triple gate MOSFET devices and methods for making same Grant 8,222,680 - Lin , et al. July 17, 2 | 2012-07-17 |
Nonvolatile CMOS-compatible logic circuits and related operating methods Grant 8,207,757 - Chen , et al. June 26, 2 | 2012-06-26 |
Crossbar Array Memory Elements And Related Read Methods App 20120081944 - CHEN; An ;   et al. | 2012-04-05 |
Buried Silicide Local Interconnect With Sidewall Spacers And Method For Making The Same App 20120038051 - Halliyal; Arvind ;   et al. | 2012-02-16 |
P-channel germanium on insulator (GOI) one transistor memory cell Grant 8,102,000 - Krivokapic January 24, 2 | 2012-01-24 |
Buried silicide local interconnect with sidewall spacers and method for making the same Grant 8,049,334 - Halliyal , et al. November 1, 2 | 2011-11-01 |
Method Of Forming Finned Semiconductor Devices With Trench Isolation App 20110263094 - LIN; Ming-ren ;   et al. | 2011-10-27 |
Sidewall Graphene Devices For 3-d Electronics App 20110253983 - Chen; An ;   et al. | 2011-10-20 |
Sidewall graphene devices for 3-D electronics Grant 7,993,986 - Chen , et al. August 9, 2 | 2011-08-09 |
Method of forming finned semiconductor devices with trench isolation Grant 7,994,020 - Lin , et al. August 9, 2 | 2011-08-09 |
Method for forming a one-transistor memory cell and related structure Grant 7,973,364 - Krivokapic July 5, 2 | 2011-07-05 |
Signal Control Elements In Ferromagnetic Logic App 20110147709 - Chen; An ;   et al. | 2011-06-23 |
Process of patterning small scale devices Grant 7,939,247 - Chen , et al. May 10, 2 | 2011-05-10 |
Method of forming fin structures using a sacrificial etch stop layer on bulk semiconductor material Grant 7,871,873 - Maszara , et al. January 18, 2 | 2011-01-18 |
Device and process of forming device with pre-patterned trench and graphene-based device structure formed therein Grant 7,858,990 - Chen , et al. December 28, 2 | 2010-12-28 |
Device and process of forming device with device structure formed in trench and graphene layer formed thereover Grant 7,858,989 - Chen , et al. December 28, 2 | 2010-12-28 |
Negative differential resistance diode and SRAM utilizing such device Grant 7,816,767 - Pei , et al. October 19, 2 | 2010-10-19 |
Method Of Forming Fin Structures Using A Sacrificial Etch Stop Layer On Bulk Semiconductor Material App 20100248454 - MASZARA; Witold ;   et al. | 2010-09-30 |
Buried silicide local interconnect with sidewall spacers and method for making the same Grant 7,786,003 - Halliyal , et al. August 31, 2 | 2010-08-31 |
Germanium MOSFET devices and methods for making same Grant 7,781,810 - An , et al. August 24, 2 | 2010-08-24 |
Device And Process Of Forming Device With Pre-patterned Trench And Graphene-based Device Structure Formed Therein App 20100051960 - Chen; An ;   et al. | 2010-03-04 |
Device And Process Of Forming Device With Device Structure Formed In Trench And Graphene Layer Formed Thereover App 20100051897 - Chen; An ;   et al. | 2010-03-04 |
Sidewall Graphene Devices For 3-d Electronics App 20100055388 - Chen; An ;   et al. | 2010-03-04 |
Process Of Patterning Small Scale Devices App 20100055577 - Chen; An ;   et al. | 2010-03-04 |
Methods for fabricating multiple finger transistors Grant 7,670,914 - Krivokapic March 2, 2 | 2010-03-02 |
Method Of Forming Finned Semiconductor Devices With Trench Isolation App 20100015778 - LIN; Ming-ren ;   et al. | 2010-01-21 |
Gate straining in a semiconductor device Grant 7,611,935 - Krivokapic November 3, 2 | 2009-11-03 |
P-Channel germanium on insulator (GOI) one transistor memory cell App 20090256206 - Krivokapic; Zoran | 2009-10-15 |
Method for forming a one-transistor memory cell and related structure App 20090212363 - Krivokapic; Zoran | 2009-08-27 |
Negative Differential Resistance Diode And Sram Utilizing Such Device App 20090146212 - Pei; Gen ;   et al. | 2009-06-11 |
Negative differential resistance diode and SRAM utilizing such device Grant 7,508,050 - Pei , et al. March 24, 2 | 2009-03-24 |
Gate Straining In A Semiconductor Device App 20080293195 - KRIVOKAPIC; Zoran | 2008-11-27 |
Single electron devices formed by laser thermal annealing Grant 7,402,505 - Krivokapic July 22, 2 | 2008-07-22 |
Method for manufacturing a memory device having a nanocrystal charge storage region Grant 7,378,310 - Wang , et al. May 27, 2 | 2008-05-27 |
Methods For Fabricating Multiple Finger Transistors App 20080090360 - Krivokapic; Zoran | 2008-04-17 |
Dual charge storage node with undercut gate oxide for deep sub-micron memory cell App 20080061359 - Lee; Chungho ;   et al. | 2008-03-13 |
Strained Fully Depleted Silicon On Insulator Semiconductor Device App 20080054316 - Xiang; Qi ;   et al. | 2008-03-06 |
Method for manufacturing a memory device having a nanocrystal charge storage region Grant 7,335,594 - Wang , et al. February 26, 2 | 2008-02-26 |
Memory device having a nanocrystal charge storage region and method Grant 7,309,650 - Wang , et al. December 18, 2 | 2007-12-18 |
Strained fully depleted silicon on insulator semiconductor device and manufacturing method therefor Grant 7,306,997 - Xiang , et al. December 11, 2 | 2007-12-11 |
Method for doping structures in FinFET devices Grant 7,235,436 - Lin , et al. June 26, 2 | 2007-06-26 |
Fully depleted SOI MOSFET arrangement with sunken source/drain regions Grant 7,202,118 - Krivokapic April 10, 2 | 2007-04-10 |
Flash memory device Grant 7,196,372 - Yu , et al. March 27, 2 | 2007-03-27 |
Method and system for providing halo implant to a semiconductor device with minimal impact to the junction capacitance Grant 7,192,836 - Ghaemmaghami , et al. March 20, 2 | 2007-03-20 |
Method of manufacturing a semiconductor device having a fin structure Grant 7,179,692 - Yu , et al. February 20, 2 | 2007-02-20 |
Germanium MOSFET devices and methods for making same Grant 7,148,526 - An , et al. December 12, 2 | 2006-12-12 |
Single electron devices formed by laser thermal annealing Grant 7,105,425 - Krivokapic September 12, 2 | 2006-09-12 |
Strained fully depleted silicon on insulator semiconductor device and manufacturing method therefor App 20060099752 - Xiang; Qi ;   et al. | 2006-05-11 |
Self aligned damascene gate Grant 7,029,958 - Tabery , et al. April 18, 2 | 2006-04-18 |
Non-volatile memory device Grant 7,012,298 - Krivokapic March 14, 2 | 2006-03-14 |
Fully isolated dielectric memory cell structure for a dual bit nitride storage device and process for making same Grant 7,001,807 - Zheng , et al. February 21, 2 | 2006-02-21 |
Shallow trench isolation (STI) region with high-K liner and method of formation Grant 6,984,569 - Karlsson , et al. January 10, 2 | 2006-01-10 |
Method for making an ultra thin FDSOI device with improved short-channel performance Grant 6,975,014 - Krivokapic , et al. December 13, 2 | 2005-12-13 |
Narrow fin FinFET Grant 6,921,963 - Krivokapic , et al. July 26, 2 | 2005-07-26 |
Multiple-gate MOS device and method for making the same Grant 6,919,250 - Krivokapic July 19, 2 | 2005-07-19 |
Semiconductor device having conductive structures formed near a gate electrode Grant 6,917,068 - Krivokapic July 12, 2 | 2005-07-12 |
Method of manufacturing a semiconductor device having a MESA structure Grant 6,913,959 - Krivokapic July 5, 2 | 2005-07-05 |
Strained channel FinFET Grant 6,897,527 - Dakshina-Murthy , et al. May 24, 2 | 2005-05-24 |
Self aligned damascene gate App 20050104091 - Tabery, Cyrus E. ;   et al. | 2005-05-19 |
Straddled gate FDSOI device Grant 6,888,198 - Krivokapic May 3, 2 | 2005-05-03 |
Shallow trench isolation (STI) region with high-K liner and method of formation App 20050073022 - Karlsson, Olov B. ;   et al. | 2005-04-07 |
Metal gate electrode using silicidation and method of formation thereof Grant 6,873,030 - Maszara , et al. March 29, 2 | 2005-03-29 |
Finfet gate formation using reverse trim of dummy gate Grant 6,864,164 - Dakshina-Murthy , et al. March 8, 2 | 2005-03-08 |
Fully isolated dielectric memory cell structure for a dual bit nitride storage device and process for making same Grant 6,861,307 - Zheng , et al. March 1, 2 | 2005-03-01 |
Method for forming tri-gate FinFET with mesa isolation Grant 6,855,583 - Krivokapic , et al. February 15, 2 | 2005-02-15 |
Method of manufacturing a semiconductor device having a U-shaped gate structure App 20050006666 - Yu, Bin ;   et al. | 2005-01-13 |
Two transistor NOR device Grant 6,842,048 - Krivokapic , et al. January 11, 2 | 2005-01-11 |
Semiconductor device and method of manufacture App 20050003593 - Krivokapic, Zoran | 2005-01-06 |
Semiconductor device having a U-shaped gate structure Grant 6,833,588 - Yu , et al. December 21, 2 | 2004-12-21 |
Interferometric lithography using reflected light from applied layers Grant 6,830,850 - Krivokapic , et al. December 14, 2 | 2004-12-14 |
Monos device having buried metal silicide bit line Grant 6,828,199 - Ogura , et al. December 7, 2 | 2004-12-07 |
Multiple-gate MOS device and method for making the same App 20040235283 - Krivokapic, Zoran | 2004-11-25 |
Ultra-thin fully depleted SOI device and method of fabrication Grant 6,815,297 - Krivokapic , et al. November 9, 2 | 2004-11-09 |
Strained channel finfet Grant 6,803,631 - Dakshina-Murthy , et al. October 12, 2 | 2004-10-12 |
Strained channel FinFET App 20040195627 - Dakshina-Murthy, Srikanteswara ;   et al. | 2004-10-07 |
Narrow fin finfet App 20040197975 - Krivokapic, Zoran ;   et al. | 2004-10-07 |
Strained Channel Finfet App 20040145019 - Dakshina-Murthy, Srikanteswara ;   et al. | 2004-07-29 |
FinFET-based SRAM cell Grant 6,765,303 - Krivokapic , et al. July 20, 2 | 2004-07-20 |
Narrow fin FinFET Grant 6,762,483 - Krivokapic , et al. July 13, 2 | 2004-07-13 |
Two transistor nor device App 20040100306 - Krivokapic, Zoran ;   et al. | 2004-05-27 |
Method of making a hybrid SOI device that suppresses floating body effects Grant 6,727,149 - Krishnan , et al. April 27, 2 | 2004-04-27 |
Self-aligned triple gate silicon-on-insulator (SOI) device Grant 6,727,546 - Krivokapic , et al. April 27, 2 | 2004-04-27 |
Semiconductor device having a U-shaped gate structure App 20040075121 - Yu, Bin ;   et al. | 2004-04-22 |
Double and triple gate MOSFET devices and methods for making same App 20040075122 - Lin, Ming-Ren ;   et al. | 2004-04-22 |
Leaky, thermally conductive insulator material (LTCIM) in semiconductor-on-insulator (SOI) structure Grant 6,717,212 - Ju , et al. April 6, 2 | 2004-04-06 |
Method of making a self-aligned triple gate silicon-on-insulator device Grant 6,716,684 - Krivokapic , et al. April 6, 2 | 2004-04-06 |
Method and system for forming a long channel device Grant 6,716,706 - Krivokapic April 6, 2 | 2004-04-06 |
Dual damascene process using self-assembled monolayer and spacers Grant 6,703,304 - Krivokapic March 9, 2 | 2004-03-09 |
Fully isolated dielectric memory cell structure for a dual bit nitride storage device and process for making same App 20040021172 - Zheng, Wei ;   et al. | 2004-02-05 |
High-K dielectric having barrier layer for P-doped devices and method of fabrication Grant 6,660,578 - Karlsson , et al. December 9, 2 | 2003-12-09 |
Shallow trench isolation (STI) region with high-K liner and method of formation Grant 6,657,276 - Karlsson , et al. December 2, 2 | 2003-12-02 |
Metal gate electrode using silicidation and method of formation thereof App 20030203609 - Maszara, Witold ;   et al. | 2003-10-30 |
Fully isolated dielectric memory cell structure for a dual bit nitride storage device and process for making same Grant 6,639,271 - Zheng , et al. October 28, 2 | 2003-10-28 |
Copper interconnect stamping Grant 6,623,803 - Krivokapic September 23, 2 | 2003-09-23 |
Fully depleted SOI device with tungsten damascene contacts and method of forming same Grant 6,605,843 - Krivokapic , et al. August 12, 2 | 2003-08-12 |
Metal gate electrode using silicidation and method of formation thereof Grant 6,599,831 - Maszara , et al. July 29, 2 | 2003-07-29 |
System for and method of forming local interconnect using microcontact printing Grant 6,599,824 - Krivokapic July 29, 2 | 2003-07-29 |
Self-aligned triple gate silicon-on-insulator (SOI) device App 20030136963 - Krivokapic, Zoran ;   et al. | 2003-07-24 |
T-shaped gate device and method for making Grant 6,596,598 - Krivokapic , et al. July 22, 2 | 2003-07-22 |
Silicon-on-insulator (SOI)electrostatic discharge (ESD) protection device with backside contact plug Grant 6,589,823 - Beebe , et al. July 8, 2 | 2003-07-08 |
Monos device having buried metal silicide bit line App 20030119314 - Ogura, Jusuke ;   et al. | 2003-06-26 |
Manufacturing method for fully depleted silicon on insulator semiconductor device Grant 6,579,750 - Krivokapic June 17, 2 | 2003-06-17 |
Feed-forward control of TCI doping for improving mass-production-wise, statistical distribution of critical performance parameters in semiconductor devices Grant 6,567,717 - Krivokapic , et al. May 20, 2 | 2003-05-20 |
SOI device with metal source/drain and method of fabrication Grant 6,555,879 - Krivokapic , et al. April 29, 2 | 2003-04-29 |
Formation of vertical transistors using block copolymer lithography Grant 6,537,920 - Krivokapic March 25, 2 | 2003-03-25 |
MOSFETs with differing gate dielectrics and method of formation Grant 6,528,858 - Yu , et al. March 4, 2 | 2003-03-04 |
Method of fabricating an ultra-thin fully depleted SOI device with T-shaped gate Grant 6,509,234 - Krivokapic January 21, 2 | 2003-01-21 |
Feed-forward Control Of Tci Doping For Improving Mass-production-wise, Statistical Distribution Of Critical Performance Parameters In Semiconductor Devices App 20030014144 - Krivokapic, Zoran ;   et al. | 2003-01-16 |
Germanium-on-insulator (GOI) device Grant 6,501,135 - Krivokapic December 31, 2 | 2002-12-31 |
Ultra thin SOI devices with improved short-channel control Grant 6,501,134 - Krivokapic December 31, 2 | 2002-12-31 |
Leaky, thermally conductive insulator material (LTCIM) in semiconductor-on-insulator (SOI) structure App 20020185685 - Ju, Dong-Hyuk ;   et al. | 2002-12-12 |
Silicon-on-insulator (SOI) electrostatic discharge (ESD) protection device with backside contact opening Grant 6,462,381 - Beebe , et al. October 8, 2 | 2002-10-08 |
Ultra-thin fully depleted SOI device with T-shaped gate and method of fabrication Grant 6,452,229 - Krivokapic September 17, 2 | 2002-09-17 |
Silicon based vertical tunneling memory cell Grant 6,448,161 - Krivokapic September 10, 2 | 2002-09-10 |
Method for fabricating T-shaped transistor gate Grant 6,448,163 - Holbrook , et al. September 10, 2 | 2002-09-10 |
Self-aligned double gate silicon-on-insulator (SOI) device Grant 6,396,108 - Krivokapic , et al. May 28, 2 | 2002-05-28 |
Semiconductor-on-insulator (SOI) tunneling junction transistor SRAM cell Grant 6,380,589 - Krivokapic April 30, 2 | 2002-04-30 |
Self-aligned SOI device with body contact and NiSi2 gate Grant 6,372,563 - Krivokapic , et al. April 16, 2 | 2002-04-16 |
Dual gate process using self-assembled molecular layer Grant 6,365,466 - Krivokapic April 2, 2 | 2002-04-02 |
Method And Apparatus For A Semiconductor Device With Adjustable Threshold Voltage App 20020014652 - KRIVOKAPIC, ZORAN | 2002-02-07 |
Fully depleted silicon on insulator semiconductor device and manufacturing method therefor Grant 6,339,244 - Krivokapic January 15, 2 | 2002-01-15 |
Optimization of logic gates with criss-cross implants to form asymmetric channel regions Grant 6,320,236 - Krivokapic , et al. November 20, 2 | 2001-11-20 |
Silicon based lateral tunneling memory cell Grant 6,294,412 - Krivokapic September 25, 2 | 2001-09-25 |
Multiple threshold voltage semiconductor device fabrication technology Grant 6,238,982 - Krivokapic , et al. May 29, 2 | 2001-05-29 |
Metal oxide semiconductor device with localized laterally doped channel Grant 6,180,464 - Krivokapic , et al. January 30, 2 | 2001-01-30 |
Convex device with selectively doped channel Grant 6,153,454 - Krivokapic November 28, 2 | 2000-11-28 |
Quasi soi device Grant 6,100,159 - Krivokapic August 8, 2 | 2000-08-08 |
Semiconductor device having enhanced gate capacitance by using both high and low dielectric materials Grant 6,100,558 - Krivokapic , et al. August 8, 2 | 2000-08-08 |
Method for increasing gate capacitance by using both high and low dielectric gate material Grant 6,087,208 - Krivokapic , et al. July 11, 2 | 2000-07-11 |
Short channel transistor having resistive gate extensions Grant 6,025,235 - Krivokapic February 15, 2 | 2000-02-15 |
Short channel transistor having resistive gate extensions Grant 6,025,635 - Krivokapic February 15, 2 | 2000-02-15 |
Optimization of logic gates with criss-cross implants to form asymmetric channel regions Grant 6,008,094 - Krivokapic , et al. December 28, 1 | 1999-12-28 |
Apparatus, article of manufacture, method and system for simulating a mass-produced semiconductor device behavior Grant 5,966,527 - Krivokapic , et al. October 12, 1 | 1999-10-12 |
Method of making a semiconductor device with adjustable threshold voltage Grant 5,963,824 - Krivokapic October 5, 1 | 1999-10-05 |
Asymmetric channel transistor and method for making same Grant 5,960,291 - Krivokapic September 28, 1 | 1999-09-28 |
Attenuated phase shift mask Grant 5,928,813 - Krivokapic , et al. July 27, 1 | 1999-07-27 |
Method of manufacturing short channel MOS devices Grant 5,888,873 - Krivokapic March 30, 1 | 1999-03-30 |
Adaptively controlled, self-aligned, short channel device and method for manufacturing same Grant 5,879,998 - Krivokapic March 9, 1 | 1999-03-09 |
Method for making convex device with elevated gate structure Grant 5,824,587 - Krivokapic October 20, 1 | 1998-10-20 |
Method for setting and adjusting process parameters to maintain acceptable critical dimensions across each die of mass-produced semiconductor wafers Grant 5,655,110 - Krivokapic , et al. August 5, 1 | 1997-08-05 |
Method for setting and adjusting process parameters to maintain acceptable critical dimensions across each die of mass-produced semiconductor wafers Grant 5,646,870 - Krivokapic , et al. July 8, 1 | 1997-07-08 |
Multiple tier collimator system for enhanced step coverage and uniformity Grant 5,643,428 - Krivokapic , et al. July 1, 1 | 1997-07-01 |
Attenuated phase shift mask comprising phase shifting layer with parabolically shaped sidewalls Grant 5,601,954 - Krivokapic , et al. February 11, 1 | 1997-02-11 |
PVD sputter system having nonplanar target configuration and methods for constructing same Grant 5,580,428 - Krivokapic , et al. December 3, 1 | 1996-12-03 |
Method of making poly LDD self-aligned channel transistors Grant 5,571,738 - Krivokapic November 5, 1 | 1996-11-05 |
Poly LDD self-aligned channel transistors Grant 5,559,357 - Krivokapic September 24, 1 | 1996-09-24 |
PVD sputter system having nonplanar target configuration and methods for operating same Grant 5,556,525 - Krivokapic , et al. September 17, 1 | 1996-09-17 |
Optimizing doping control in short channel MOS Grant 5,212,106 - Erb , et al. May 18, 1 | 1993-05-18 |