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Patent applications and USPTO patent grants for Krishna; Gopu.The latest application filed is for "capacitive method of detecting wafer chucking and de-chucking".
Patent | Date |
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Capacitive Method Of Detecting Wafer Chucking And De-chucking App 20220301915 - Konnoth Joseph; Job George ;   et al. | 2022-09-22 |
Pedestal Support Design for Precise Chamber Matching and Process Control App 20220068608 - Krishna; Gopu ;   et al. | 2022-03-03 |
Multi-station chamber lid with precise temperature and flow control Grant 11,098,404 - Kashyap , et al. August 24, 2 | 2021-08-24 |
Universal Adjustable Blocker Plate For Flow Distribution Tuning App 20210159094 - ZHANG; Yuxing ;   et al. | 2021-05-27 |
Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity Grant 10,679,827 - Krishna , et al. | 2020-06-09 |
Multi-Station Chamber Lid With Precise Temperature And Flow Control App 20200102651 - Kashyap; Dhritiman Subha ;   et al. | 2020-04-02 |
Method And Apparatus For Semiconductor Processing Chamber Isolation For Reduced Particles And Improved Uniformity App 20180211820 - KRISHNA; Gopu ;   et al. | 2018-07-26 |
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