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name:-0.0065820217132568
name:-0.0035181045532227
name:-0.0040590763092041
Krishna; Gopu Patent Filings

Krishna; Gopu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Krishna; Gopu.The latest application filed is for "capacitive method of detecting wafer chucking and de-chucking".

Company Profile
3.2.5
  • Krishna; Gopu - Bangalore IN
  • Krishna; Gopu - Karnataka IN
  • KRISHNA; Gopu - Whitefield Bangalore
  • Krishna; Gopu - Bengaluru IN
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Capacitive Method Of Detecting Wafer Chucking And De-chucking
App 20220301915 - Konnoth Joseph; Job George ;   et al.
2022-09-22
Pedestal Support Design for Precise Chamber Matching and Process Control
App 20220068608 - Krishna; Gopu ;   et al.
2022-03-03
Multi-station chamber lid with precise temperature and flow control
Grant 11,098,404 - Kashyap , et al. August 24, 2
2021-08-24
Universal Adjustable Blocker Plate For Flow Distribution Tuning
App 20210159094 - ZHANG; Yuxing ;   et al.
2021-05-27
Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity
Grant 10,679,827 - Krishna , et al.
2020-06-09
Multi-Station Chamber Lid With Precise Temperature And Flow Control
App 20200102651 - Kashyap; Dhritiman Subha ;   et al.
2020-04-02
Method And Apparatus For Semiconductor Processing Chamber Isolation For Reduced Particles And Improved Uniformity
App 20180211820 - KRISHNA; Gopu ;   et al.
2018-07-26

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