| Patent | Date |
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Epitaxy metrology in fin field effect transistors
Grant 11,455,715 - Chaudhary , et al. September 27, 2 | 2022-09-27 |
Generating a metrology recipe usable for examination of a semiconductor specimen
Grant 11,443,420 - Kris , et al. September 13, 2 | 2022-09-13 |
Epitaxy Metrology In Fin Field Effect Transistors
App 20220261979 - CHAUDHARY; Jitendra Pradipkumar ; et al. | 2022-08-18 |
Generating A Metrology Recipe Usable For Examination Of A Semiconductor Specimen
App 20220207681 - KRIS; Roman ; et al. | 2022-06-30 |
Determining A Critical Dimension Variation Of A Pattern
App 20220198639 - Vereschagin; Vadim ; et al. | 2022-06-23 |
Measuring height difference in patterns on semiconductor wafers
Grant 11,301,983 - Schwarzband , et al. April 12, 2 | 2022-04-12 |
Determining a critical dimension variation of a pattern
Grant 11,276,160 - Vereschagin , et al. March 15, 2 | 2022-03-15 |
Method, System And Computer Program Product For 3d-nand Cdsem Metrology
App 20210383529 - KRIS; Roman ; et al. | 2021-12-09 |
Evaluating a hole formed in an intermediate product
Grant 11,056,404 - Kris , et al. July 6, 2 | 2021-07-06 |
Evaluating A Hole Formed In An Intermediate Product
App 20210193536 - Kris; Roman ; et al. | 2021-06-24 |
Evaluating An Intermediate Product Related To A Three-dimensional Nand Memory Unit
App 20210066026 - Kris; Roman ; et al. | 2021-03-04 |
Measuring Height Difference In Patterns On Semiconductor Wafers
App 20200380668 - Schwarzband; Ishai ; et al. | 2020-12-03 |
Determining A Critical Dimension Variation Of A Pattern
App 20200327652 - VERESCHAGIN; Vadim ; et al. | 2020-10-15 |
Measuring height difference in patterns on semiconductor wafers
Grant 10,748,272 - Schwarzband , et al. A | 2020-08-18 |
Method for monitoring nanometric structures
Grant 10,731,979 - Levi , et al. | 2020-08-04 |
Method For Monitoring Nanometric Structures
App 20190219390 - LEVI; Shimon ; et al. | 2019-07-18 |
Technique for measuring overlay between layers of a multilayer structure
Grant 10,354,376 - Weinberg , et al. July 16, 2 | 2019-07-16 |
Measuring Height Difference In Patterns On Semiconductor Wafers
App 20180336675 - SCHWARZBAND; Ishai ; et al. | 2018-11-22 |
Technique For Measuring Overlay Between Layers Of A Multilayer Structure
App 20180268539 - WEINBERG; Yakov ; et al. | 2018-09-20 |
Technique for measuring overlay between layers of a multilayer structure
Grant 9,916,652 - Weinberg , et al. March 13, 2 | 2018-03-13 |
CD-SEM technique for wafers fabrication control
Grant 9,824,852 - Kris , et al. November 21, 2 | 2017-11-21 |
Technique For Measuring Overlay Between Layers Of A Multilayer Structure
App 20170243343 - WEINBERG; Yakov ; et al. | 2017-08-24 |
Cd-sem Technique For Wafers Fabrication Control
App 20170194125 - KRIS; Roman ; et al. | 2017-07-06 |
Technique For Measuring Overlay Between Layers Of A Multilayer Structure
App 20170018066 - WEINBERG; Yakov ; et al. | 2017-01-19 |
Technique for measuring overlay between layers of a multilayer structure
Grant 9,530,199 - Weinberg , et al. December 27, 2 | 2016-12-27 |
System, method and computer readable medium for detecting edges of a pattern
Grant 9,165,376 - Schwartzband , et al. October 20, 2 | 2015-10-20 |
System, Method And Computer Readable Medium For Detecting Edges Of A Pattern
App 20140270470 - Schwartzband; Ishai ; et al. | 2014-09-18 |
High resolution wafer inspection system
Grant 7,973,919 - Grossman , et al. July 5, 2 | 2011-07-05 |
High Resolution Wafer Inspection System
App 20100188658 - Grossman; Dan ; et al. | 2010-07-29 |
High resolution wafer inspection system
Grant 7,714,999 - Grossman , et al. May 11, 2 | 2010-05-11 |
High Resolution Wafer Inspection System
App 20080231845 - Grossman; Dan ; et al. | 2008-09-25 |
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