Patent | Date |
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Illumination energy management in surface inspection Grant 9,194,812 - Wolters , et al. November 24, 2 | 2015-11-24 |
Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections Grant 9,052,190 - Salehpour , et al. June 9, 2 | 2015-06-09 |
Illumination Energy Management in Surface Inspection App 20140328043 - Wolters; Christian ;   et al. | 2014-11-06 |
Enhanced Inspection and Metrology Techniques And Systems Using Bright-Field Differential Interference Contrast App 20140268172 - Salehpour; Ali ;   et al. | 2014-09-18 |
Illumination energy management in surface inspection Grant 8,786,850 - Wolters , et al. July 22, 2 | 2014-07-22 |
Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer Grant 8,494,802 - Chen , et al. July 23, 2 | 2013-07-23 |
Extending the lifetime of a deep UV laser in a wafer inspection tool Grant 8,432,944 - Romanovsky , et al. April 30, 2 | 2013-04-30 |
Extending the lifetime of a Deep UV laser in a Wafer Inspection tool App 20110315897 - Romanovsky; Anatoly ;   et al. | 2011-12-29 |
Method and apparatus for measuring shape or thickness information of a substrate Grant 8,068,234 - Tang , et al. November 29, 2 | 2011-11-29 |
Computer-implemented Methods, Computer-readable Media, And Systems For Determining One Or More Characteristics Of A Wafer App 20110196639 - Chen; Haiguang ;   et al. | 2011-08-11 |
Method And Apparatus For Measuring Shape Or Thickness Information Of A Substrate App 20100208272 - Tang; Shouhong ;   et al. | 2010-08-19 |
Copper CMP flatness monitor using grazing incidence interferometry Grant 7,505,144 - Mueller , et al. March 17, 2 | 2009-03-17 |
Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection tool App 20090040514 - Sullivan; Paul J. ;   et al. | 2009-02-12 |
Process and assembly for non-destructive surface inspections Grant 7,477,371 - Marxer , et al. January 13, 2 | 2009-01-13 |
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Grant 7,436,506 - Sullivan , et al. October 14, 2 | 2008-10-14 |
Wafer inspection systems and methods for analyzing inspection data Grant 7,417,724 - Sullivan , et al. August 26, 2 | 2008-08-26 |
Wafer inspection systems and methods for analyzing inspection data Grant 7,227,628 - Sullivan , et al. June 5, 2 | 2007-06-05 |
Process and Assembly for Non-Destructive Surface Inspections App 20070103676 - Marxer; Norbert ;   et al. | 2007-05-10 |
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool App 20060232770 - Sullivan; Paul J. ;   et al. | 2006-10-19 |
Process and assembly for non-destructive surface inspections Grant 7,102,744 - Marxer , et al. September 5, 2 | 2006-09-05 |
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Grant 7,009,696 - Sullivan , et al. March 7, 2 | 2006-03-07 |
Copper CMP flatness monitor using grazing incidence interferometry App 20050078320 - Mueller, Dieter ;   et al. | 2005-04-14 |
Copper CMP flatness monitor using grazing incidence interferometry Grant 6,806,966 - Mueller , et al. October 19, 2 | 2004-10-19 |
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool App 20040145733 - Sullivan, Paul J. ;   et al. | 2004-07-29 |
Process and assembly for non-destructive surface inspections App 20040080741 - Marxer, Norbert ;   et al. | 2004-04-29 |
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Grant 6,686,996 - Sullivan , et al. February 3, 2 | 2004-02-03 |
Process and assembly for non-destructive surface inspections Grant 6,606,153 - Marxer , et al. August 12, 2 | 2003-08-12 |
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool App 20020154296 - Sullivan, Paul J. ;   et al. | 2002-10-24 |
Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool Grant 6,414,752 - Sullivan , et al. July 2, 2 | 2002-07-02 |
Process and assembly for non-destructive surface inspections App 20020051130 - Marxer, Norbert ;   et al. | 2002-05-02 |
Process and assembly for non-destructive surface inspections Grant 6,271,916 - Marxer , et al. August 7, 2 | 2001-08-07 |
Position location in surface scanning using interval timing between scan marks on test wafers Grant 5,083,035 - Pecen , et al. January 21, 1 | 1992-01-21 |