Patent | Date |
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Dual arm robot Grant 11,253,994 - Kremerman February 22, 2 | 2022-02-22 |
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods Grant 10,758,045 - Weiss , et al. Sep | 2020-09-01 |
Load Lock Door Assemblies, Load Lock Apparatus, Electronic Device Processing Systems, And Methods App 20190208907 - Weiss; Eran ;   et al. | 2019-07-11 |
Load lock door assembly, load lock apparatus, electronic device processing systems, and methods Grant 10,278,501 - Weiss , et al. | 2019-05-07 |
Dual Arm Robot App 20190054612 - Kremerman; Izya | 2019-02-21 |
Dual arm robot Grant 10,029,363 - Kremerman July 24, 2 | 2018-07-24 |
Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods Grant 9,742,250 - Kremerman August 22, 2 | 2017-08-22 |
Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing Grant 9,724,834 - Kremerman August 8, 2 | 2017-08-08 |
Process chamber apparatus, systems, and methods for controlling a gas flow pattern Grant 9,530,623 - Merry , et al. December 27, 2 | 2016-12-27 |
Substrate processing systems and robot apparatus for transporting substrates in electronic device manufacturing Grant 9,457,464 - Kremerman , et al. October 4, 2 | 2016-10-04 |
Apparatus and method for optical calibration of wafer placement by a robot Grant 9,405,287 - Ravid , et al. August 2, 2 | 2016-08-02 |
Systems, apparatus and methods for transporting substrates in electronic device manufacturing Grant 9,334,127 - Kremerman , et al. May 10, 2 | 2016-05-10 |
Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing Grant 9,325,228 - Hudgens , et al. April 26, 2 | 2016-04-26 |
Load Lock Door Assembly, Load Lock Apparatus, Electronic Device Processing Systems, And Methods App 20150311102 - Weiss; Eran ;   et al. | 2015-10-29 |
Robot systems, apparatus, and methods having independently rotatable waists Grant 9,117,865 - Hudgens , et al. August 25, 2 | 2015-08-25 |
Dual Arm Robot App 20150217446 - Kremerman; Izya | 2015-08-06 |
Robot Apparatus, Drive Assemblies, And Methods For Transportingsubstrates In Electronic Device Manufacturing App 20150190933 - Kremerman; Izya | 2015-07-09 |
Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm Grant 9,076,830 - Kremerman , et al. July 7, 2 | 2015-07-07 |
Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing Grant 9,076,829 - Brodine , et al. July 7, 2 | 2015-07-07 |
Process Chamber Apparatus, Systems, And Methods For Controlling A Gas Flow Pattern App 20150145413 - Merry; Nir ;   et al. | 2015-05-28 |
Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub Grant 9,033,644 - Hudgens , et al. May 19, 2 | 2015-05-19 |
Dual arm robot Grant 8,951,002 - Kremerman February 10, 2 | 2015-02-10 |
Substrate Processing Systems And Robot Apparatus For Transporting Substrates In Electronic Device Manufacturing App 20140286741 - Kremerman; Izya ;   et al. | 2014-09-25 |
Systems, Apparatus And Methods For Transporting Substrates In Electronic Device Manufacturing App 20140286736 - Kremerman; Izya ;   et al. | 2014-09-25 |
Robot systems, apparatus and methods for transporting substrates Grant 8,784,033 - Kremerman , et al. July 22, 2 | 2014-07-22 |
Systems, apparatus and methods for transporting substrates Grant 8,777,547 - Kremerman , et al. July 15, 2 | 2014-07-15 |
Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots Grant 8,768,513 - Cox , et al. July 1, 2 | 2014-07-01 |
Multi-axis Robot Apparatus With Unequal Length Forearms, Electronic Device Manufacturing Systems, And Methods For Transporting Substrates In Electronic Device Manufacturing App 20140154038 - Hudgens; Jeffrey C. ;   et al. | 2014-06-05 |
Motor Modules, Multi-axis Motor Drive Assemblies, Multi-axis Robot Apparatus, And Electronic Device Manufacturing Systems And Methods App 20140150592 - Kremerman; Izya | 2014-06-05 |
Systems, apparatus and methods for making an electrical connection to a robot Grant 8,692,500 - Laceky , et al. April 8, 2 | 2014-04-08 |
Boom Drive Apparatus, Multi-arm Robot Apparatus, Electronic Device Processing Systems, And Methods For Transporting Substrates In Electronic Device Manufacturing Systems App 20140010625 - Hudgens; Jeffrey C. ;   et al. | 2014-01-09 |
Robot Systems, Apparatus, And Methods Having Independently Rotatable Waists App 20130272823 - Hudgens; Jeffrey C. ;   et al. | 2013-10-17 |
Fully-independent Robot Systems, Apparatus, And Methods Adapted To Transport Multiple Substrates In Electronic Device Manufacturing App 20130149076 - Cox; Damon Keith ;   et al. | 2013-06-13 |
Robot Systems, Apparatus, And Methods Adapted To Transport Dual Substrates In Electronic Device Manufacturing App 20130115028 - Kremerman; Izya ;   et al. | 2013-05-09 |
Linearly distributed semiconductor workpiece processing tool Grant 8,398,355 - Holtkamp , et al. March 19, 2 | 2013-03-19 |
Robot Systems, Apparatus, And Methods Adapted To Transport Substrates In Electronic Device Manufacturing App 20130039726 - Brodine; Jeffrey A. ;   et al. | 2013-02-14 |
Systems Having Multi-linkage Robots And Methods To Correct Positional And Rotational Alignment In Multi-linkage Robots App 20130041505 - Cox; Damon Keith ;   et al. | 2013-02-14 |
Systems, Apparatus And Methods For Making An Electrical Connection To A Robot App 20120321434 - Laceky; William P. ;   et al. | 2012-12-20 |
Systems, apparatus and methods for making an electrical connection Grant 8,264,187 - Laceky , et al. September 11, 2 | 2012-09-11 |
Low Profile Dual Arm Vacuum Robot App 20120063874 - KREMERMAN; IZYA | 2012-03-15 |
Dual Arm Robot App 20120045308 - Kremerman; Izya | 2012-02-23 |
Dual arm robot Grant 7,891,935 - Kremerman February 22, 2 | 2011-02-22 |
Systems, Apparatus And Methods For Transporting Substrates App 20100178146 - Kremerman; Izya ;   et al. | 2010-07-15 |
Systems, Apparatus And Methods For Making An Electrical Connection App 20100178135 - Laceky; William P. ;   et al. | 2010-07-15 |
Robot Systems, Apparatus And Methods For Transporting Substrates App 20100178147 - Kremerman; Izya ;   et al. | 2010-07-15 |
Inkjet Print Head Pressure Regulator App 20080204501 - Kurita; Shinichi ;   et al. | 2008-08-28 |
Linearly distributed semiconductor workpiece processing tool App 20070274810 - Holtkamp; William H. ;   et al. | 2007-11-29 |
Dual arm robot App 20040001750 - Kremerman, Izya | 2004-01-01 |
Precision arm mechanism Grant 5,064,340 - Genov , et al. November 12, 1 | 1991-11-12 |