| Patent | Date |
|---|
Method And Apparatus Of Low Temperature Plasma Enhanced Chemical Vapor Deposition Of Graphene
App 20220254641 - Chua; Thai Cheng ; et al. | 2022-08-11 |
Capacitive Sensor For Monitoring Gas Concentration
App 20220244205 - Li; Xiaopu ; et al. | 2022-08-04 |
Modular microwave plasma source
Grant 11,404,248 - Kraus , et al. August 2, 2 | 2022-08-02 |
Pore Formation In A Substrate
App 20220227622 - KRAUS; Philip Allan ; et al. | 2022-07-21 |
Remote modular high-frequency source
Grant 11,393,661 - Nguyen , et al. July 19, 2 | 2022-07-19 |
Seamless electrical conduit
Grant 11,368,003 - Kraus , et al. June 21, 2 | 2022-06-21 |
Pore formation in a substrate
Grant 11,325,827 - Kraus , et al. May 10, 2 | 2022-05-10 |
Selective etch rate monitor
Grant 11,257,698 - Kraus , et al. February 22, 2 | 2022-02-22 |
Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates
Grant 11,217,443 - Vats , et al. January 4, 2 | 2022-01-04 |
Modular Microwave Source With Multiple Metal Housings
App 20210391149 - Kraus; Philip Allan ; et al. | 2021-12-16 |
Clean Unit For Chamber Exhaust Cleaning
App 20210391156 - Chan; Kelvin ; et al. | 2021-12-16 |
Modular High-frequency Source
App 20210327685 - Chua; Thai Cheng ; et al. | 2021-10-21 |
Substrate Support With Multiple Embedded Electrodes
App 20210313213 - KRAUS; Philip Allan ; et al. | 2021-10-07 |
Modular Microwave Source With Embedded Ground Surface
App 20210313153 - AuBuchon; Joseph F. ; et al. | 2021-10-07 |
Modular Microwave Source With Local Lorentz Force
App 20210287882 - Kraus; Philip Allan ; et al. | 2021-09-16 |
Capacitive Sensors And Capacitive Sensing Locations For Plasma Chamber Condition Monitoring
App 20210280399 - Pan; Yaoling ; et al. | 2021-09-09 |
Capacitive Sensor For Chamber Condition Monitoring
App 20210280443 - Pan; Yaoling ; et al. | 2021-09-09 |
Phased array modular high-frequency source
Grant 11,114,282 - Kraus , et al. September 7, 2 | 2021-09-07 |
Modular high-frequency source
Grant 11,081,317 - Chua , et al. August 3, 2 | 2021-08-03 |
Modular microwave source with embedded ground surface
Grant 11,049,694 - AuBuchon , et al. June 29, 2 | 2021-06-29 |
Modular High-frequency Source With Integrated Gas Distribution
App 20210183621 - Nguyen; Hanh ; et al. | 2021-06-17 |
Substrate Support With Multiple Embedded Electrodes
App 20210183681 - KRAUS; Philip Allan ; et al. | 2021-06-17 |
Modular microwave source with local Lorentz force
Grant 11,037,764 - Kraus , et al. June 15, 2 | 2021-06-15 |
System For Tunable Workpiece Biasing In A Plasma Reactor
App 20210134561 - KOH; Travis ; et al. | 2021-05-06 |
Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources
Grant 10,985,009 - Kalutarage , et al. April 20, 2 | 2021-04-20 |
Monolithic Modular Microwave Source With Integrated Process Gas Distribution
App 20210098231 - Carducci; James ; et al. | 2021-04-01 |
Modular Microwave Source With Embedded Ground Surface
App 20210098236 - AuBuchon; Joseph F. ; et al. | 2021-04-01 |
Monolithic Modular Microwave Source With Integrated Temperature Control
App 20210100076 - Carducci; James ; et al. | 2021-04-01 |
Monolithic Modular High-frequency Plasma Source
App 20210098230 - Chua; Thai Cheng ; et al. | 2021-04-01 |
Processing tool having a monitoring device
Grant 10,957,565 - Mao , et al. March 23, 2 | 2021-03-23 |
Modular high-frequency source with integrated gas distribution
Grant 10,943,768 - Nguyen , et al. March 9, 2 | 2021-03-09 |
Substrate support with multiple embedded electrodes
Grant 10,937,678 - Kraus , et al. March 2, 2 | 2021-03-02 |
System for tunable workpiece biasing in a plasma reactor
Grant 10,923,320 - Koh , et al. February 16, 2 | 2021-02-16 |
Plasma Enhanced Cvd With Periodic High Voltage Bias
App 20210028012 - Chan; Kelvin ; et al. | 2021-01-28 |
Substrate support with electrically floating power supply
Grant 10,904,996 - Koh , et al. January 26, 2 | 2021-01-26 |
Symmetric And Irregular Shaped Plasmas Using Modular Microwave Sources
App 20200402769 - Chua; Thai Cheng ; et al. | 2020-12-24 |
Seamless Electrical Conduit
App 20200388998 - KRAUS; Philip Allan ; et al. | 2020-12-10 |
Modular Microwave Plasma Source
App 20200381217 - Kraus; Philip Allan ; et al. | 2020-12-03 |
Selective Etch Rate Monitor
App 20200381280 - Kraus; Philip Allan ; et al. | 2020-12-03 |
Pore Formation In A Substrate
App 20200361766 - KRAUS; Philip Allan ; et al. | 2020-11-19 |
Plasma enhanced CVD with periodic high voltage bias
Grant 10,840,086 - Chan , et al. November 17, 2 | 2020-11-17 |
Processing Tool Having A Monitoring Device
App 20200357669 - Mao; Shimin ; et al. | 2020-11-12 |
Method to create a free-standing membrane for biological applications
Grant 10,830,756 - Vora , et al. November 10, 2 | 2020-11-10 |
Thermal Break For High-frequency Antennae
App 20200343065 - Chua; Thai Cheng ; et al. | 2020-10-29 |
Plasma Emission Monitoring System With Cross-dispersion Grating
App 20200340858 - Kraus; Philip Allan ; et al. | 2020-10-29 |
Sensors And System For In-situ Edge Ring Erosion Monitor
App 20200335368 - PAN; Yaoling ; et al. | 2020-10-22 |
Substrate support with dual embedded electrodes
Grant 10,811,296 - Cho , et al. October 20, 2 | 2020-10-20 |
Selective etch rate monitor
Grant 10,790,175 - Kraus , et al. September 29, 2 | 2020-09-29 |
Phased Array Modular High-frequency Source
App 20200303167 - Kraus; Philip Allan ; et al. | 2020-09-24 |
Processing tool having a monitoring device
Grant 10,763,143 - Mao , et al. Sep | 2020-09-01 |
System for coupling a voltage to spatially segmented portions of the wafer with variable voltage
Grant 10,763,150 - Lindley , et al. Sep | 2020-09-01 |
Pore formation in a substrate
Grant 10,752,496 - Kraus , et al. A | 2020-08-25 |
Modular microwave plasma source
Grant 10,748,745 - Kraus , et al. A | 2020-08-18 |
Phased array modular high-frequency source
Grant 10,720,311 - Kraus , et al. | 2020-07-21 |
Thermal Repeatability And In-situ Showerhead Temperature Monitoring
App 20200227242 - FRANKLIN; Timothy Joseph ; et al. | 2020-07-16 |
System for coupling a voltage to portions of a substrate
Grant 10,714,372 - Chua , et al. | 2020-07-14 |
Symmetric and irregular shaped plasmas using modular microwave sources
Grant 10,707,058 - Chua , et al. | 2020-07-07 |
Sequential Deposition And High Frequency Plasma Treatment Of Deposited Film On Patterned And Un-patterned Substrates
App 20200176241 - Vats; Vinayak Veer ; et al. | 2020-06-04 |
Substrate Support With Multiple Embedded Electrodes
App 20200118861 - KRAUS; Philip Allan ; et al. | 2020-04-16 |
Thermal repeatability and in-situ showerhead temperature monitoring
Grant 10,607,817 - Franklin , et al. | 2020-03-31 |
Single oxide metal deposition chamber
Grant 10,597,785 - Subramani , et al. | 2020-03-24 |
Phased Array Modular High-frequency Source
App 20200066490 - Kraus; Philip Allan ; et al. | 2020-02-27 |
Substrate support with multiple embedded electrodes
Grant 10,510,575 - Kraus , et al. Dec | 2019-12-17 |
Phased array modular high-frequency source
Grant 10,504,699 - Kraus , et al. Dec | 2019-12-10 |
Single Process Volume To Perform High-pressure And Low-pressure Processes With Features To Reduce Cross-contamination
App 20190352774 - Chan; Kelvin ; et al. | 2019-11-21 |
System For Tunable Workpiece Biasing In A Plasma Reactor
App 20190348258 - KOH; TRAVIS ; et al. | 2019-11-14 |
Methods To Deposit Flowable (gap-fill) Carbon Containing Films Using Various Plasma Sources
App 20190333760 - Kalutarage; Lakmal Charidu ; et al. | 2019-10-31 |
Plasma Enhanced Cvd With Periodic High Voltage Bias
App 20190333764 - CHAN; Kelvin ; et al. | 2019-10-31 |
Modular High-frequency Source
App 20190326095 - CHUA; Thai Cheng ; et al. | 2019-10-24 |
Remote Modular High-frequency Source
App 20190326098 - NGUYEN; Hanh ; et al. | 2019-10-24 |
Phased Array Modular High-frequency Source
App 20190326096 - KRAUS; PHILIP ALLAN ; et al. | 2019-10-24 |
Modular High-frequency Source With Integrated Gas Distribution
App 20190326090 - NGUYEN; Hahn ; et al. | 2019-10-24 |
Resonant Process Monitor
App 20190287758 - PAN; Yaoling ; et al. | 2019-09-19 |
Method Of Forming Silicon Nitride Films Using Microwave Plasma
App 20190259598 - CHEN; Hanhong ; et al. | 2019-08-22 |
System for tunable workpiece biasing in a plasma reactor
Grant 10,373,804 - Koh , et al. | 2019-08-06 |
Method To Create A Free-standing Membrane For Biological Applications
App 20190094203 - VORA; Ankit ; et al. | 2019-03-28 |
Pore Formation In A Substrate
App 20190092626 - KRAUS; Philip Allan ; et al. | 2019-03-28 |
Substrate Support With Electrically Floating Power Supply
App 20190090338 - KOH; Travis Lee ; et al. | 2019-03-21 |
Substrate Support With Cooled And Conducting Pins
App 20190088518 - KOH; Travis Lee ; et al. | 2019-03-21 |
Substrate Support With Dual Embedded Electrodes
App 20190088519 - CHO; Jaeyong ; et al. | 2019-03-21 |
Substrate Support With Multiple Embedded Electrodes
App 20190088520 - KRAUS; Philip Allan ; et al. | 2019-03-21 |
System For Coupling A Voltage To Portions Of A Substrate
App 20190088521 - CHUA; Thai Cheng ; et al. | 2019-03-21 |
System For Coupling A Voltage To Spatially Segmented Portions Of The Wafer With Variable Voltage
App 20190088522 - LINDLEY; Roger Alan ; et al. | 2019-03-21 |
Processing Tool Having A Monitoring Device
App 20190057889 - Mao; Shimin ; et al. | 2019-02-21 |
Modular Microwave Source With Local Lorentz Force
App 20180323043 - Kraus; Philip Allan ; et al. | 2018-11-08 |
Symmetric And Irregular Shaped Plasmas Using Modular Microwave Sources
App 20180294143 - Chua; Thai Cheng ; et al. | 2018-10-11 |
Selective Etch Rate Monitor
App 20180240692 - KRAUS; PHILIP ALLAN ; et al. | 2018-08-23 |
System For Tunable Workpiece Biasing In A Plasma Reactor
App 20180226225 - KOH; TRAVIS ; et al. | 2018-08-09 |
Thermal Repeatability And In-situ Showerhead Temperature Monitoring
App 20180144907 - FRANKLIN; Timothy Joseph ; et al. | 2018-05-24 |
Wafer processing equipment having exposable sensing layers
Grant 9,975,758 - Tedeschi , et al. May 22, 2 | 2018-05-22 |
Selective etch rate monitor
Grant 9,978,621 - Kraus , et al. May 22, 2 | 2018-05-22 |
Selective Etch Rate Monitor
App 20180138061 - Kraus; Philip Allan ; et al. | 2018-05-17 |
Single Oxide Metal Deposition Chamber
App 20180073150 - SUBRAMANI; Anantha K. ; et al. | 2018-03-15 |
Wafer Processing Equipment Having Exposable Sensing Layers
App 20180057356 - Tedeschi; Leonard ; et al. | 2018-03-01 |
Modular Microwave Plasma Source
App 20180053634 - KRAUS; Philip Allan ; et al. | 2018-02-22 |
Wafer processing equipment having exposable sensing layers
Grant 9,725,302 - Tedeschi , et al. August 8, 2 | 2017-08-08 |
Fluorine plasma treatment of high-k gate stack for defect passivation
Grant 7,902,018 - Kraus , et al. March 8, 2 | 2011-03-08 |
Method for fabricating a gate dielectric of a field effect transistor
Grant 7,888,217 - Chua , et al. February 15, 2 | 2011-02-15 |
Integrated circuit fabrication process using a compression cap layer in forming a silicide with minimal post-laser annealing dopant deactivation
Grant 7,863,193 - Ma , et al. January 4, 2 | 2011-01-04 |
Integrated circuit fabrication process with minimal post-laser annealing dopant deactivation
Grant 7,737,036 - Ma , et al. June 15, 2 | 2010-06-15 |
Method for fabricating a gate dielectric of a field effect transistor
Grant 7,727,828 - Chua , et al. June 1, 2 | 2010-06-01 |
Method of forming PN junctions including a post-ion implant dynamic surface anneal process with minimum interface trap density at the gate insulator-silicon interface
Grant 7,659,187 - Kraus , et al. February 9, 2 | 2010-02-09 |
Integrated Circuit Fabrication Process For A High Melting Temperature Silicide With Minimal Post-laser Annealing Dopant Deactivation
App 20090042353 - Ma; Yi ; et al. | 2009-02-12 |
Integrated Circuit Fabrication Process With Minimal Post-laser Annealing Dopant Deactivation
App 20090042376 - MA; YI ; et al. | 2009-02-12 |
Integrated Circuit Fabrication Process Using A Compression Cap Layer In Forming A Silicide With Minimal Post-laser Annealing Dopant Deactivation
App 20090042354 - Ma; YI ; et al. | 2009-02-12 |
Method Of Forming Pn Junctions Including A Post-ion Implant Dynamic Surface Anneal Process With Minimum Interface Trap Density At The Gate Insulator-silicon Interface
App 20080108209 - KRAUS; PHILIP ALLAN ; et al. | 2008-05-08 |
Fluorine Plasma Treatment Of High-k Gate Stack For Defect Passivation
App 20080076268 - Kraus; Philip Allan ; et al. | 2008-03-27 |
Method for fabricating a gate dielectric layer utilized in a gate structure
App 20080014759 - Chua; Thai Cheng ; et al. | 2008-01-17 |
Method for fabricating a gate dielectric of a field effect transistor
App 20070093012 - Chua; Thai Cheng ; et al. | 2007-04-26 |
Method For Fabricating A Gate Dielectric Of A Field Effect Transistor
App 20070093013 - Chua; Thai Cheng ; et al. | 2007-04-26 |
Plasma method and apparatus for processing a substrate
Grant 6,831,021 - Chua , et al. December 14, 2 | 2004-12-14 |
Plasma method and apparatus for processing a substrate
App 20040038486 - Chua, Thai Cheng ; et al. | 2004-02-26 |
Plasma Method And Apparatus For Processing A Substrate
App 20030232513 - Kraus, Philip Allan ; et al. | 2003-12-18 |
Plasma method and apparatus for processing a substrate
Grant 6,660,659 - Kraus , et al. December 9, 2 | 2003-12-09 |
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