| Patent | Date |
|---|
Hot Showerhead
App 20220307131 - Subramani; Anantha K. ; et al. | 2022-09-29 |
Plasma source for rotating susceptor
Grant 11,315,769 - Bera , et al. April 26, 2 | 2022-04-26 |
Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability
Grant 11,289,312 - Allen , et al. March 29, 2 | 2022-03-29 |
Rechargeable power source for mobile devices which includes an ultracapacitor
Grant 11,244,791 - Nguyen , et al. February 8, 2 | 2022-02-08 |
Distribution Components For Semiconductor Processing Systems
App 20220028710 - Subramani; Anantha K. ; et al. | 2022-01-27 |
Diagnostic Disc With A High Vacuum And Temperature Tolerant Power Source
App 20210378119 - Criminale; Phillip A. ; et al. | 2021-12-02 |
Directional Selective Junction Clean With Field Polymer Protections
App 20210366722 - Lei; Yu ; et al. | 2021-11-25 |
Creating Ion Energy Distribution Functions (iedf)
App 20210343496 - DORF; LEONID ; et al. | 2021-11-04 |
Selective Oxidation And Simplified Pre-clean
App 20210287898 - Mebarki; Bencherki ; et al. | 2021-09-16 |
Creating ion energy distribution functions (IEDF)
Grant 11,069,504 - Dorf , et al. July 20, 2 | 2021-07-20 |
Symmetric Plasma Source to Generate Pie-Shaped Treatment
App 20210210312 - Subramani; Anantha K. ; et al. | 2021-07-08 |
Plasma Source For Rotating Susceptor
App 20210166923 - Bera; Kallol ; et al. | 2021-06-03 |
PEALD Nitride Films
App 20210090877 - Chen; Hanhong ; et al. | 2021-03-25 |
Peald Titanium Nitride With Direct Microwave Plasma
App 20210050186 - Chen; Hanhong ; et al. | 2021-02-18 |
Plasma source for rotating susceptor
Grant 10,903,056 - Bera , et al. January 26, 2 | 2021-01-26 |
Symmetric plasma source to generate pie shaped treatment
Grant 10,879,042 - Subramani , et al. December 29, 2 | 2020-12-29 |
Physical Vapor Deposition (pvd) Chamber With In Situ Chamber Cleaning Capability
App 20200395198 - ALLEN; ADOLPH M. ; et al. | 2020-12-17 |
Creating Ion Energy Distribution Functions (iedf)
App 20200266022 - DORF; LEONID ; et al. | 2020-08-20 |
Creating ion energy distribution functions (IEDF)
Grant 10,685,807 - Dorf , et al. | 2020-06-16 |
Structure for electric energy storage using carbon nanotubes
Grant 10,546,698 - Nguyen , et al. Ja | 2020-01-28 |
Creating Ion Energy Distribution Functions (iedf)
App 20190259562 - DORF; LEONID ; et al. | 2019-08-22 |
Creating ion energy distribution functions (IEDF)
Grant 10,312,048 - Dorf , et al. | 2019-06-04 |
Rechargeable Power Source For Mobile Devices Which Includes An Ultracapacitor
App 20180342357 - NGUYEN; CATTIEN V. ; et al. | 2018-11-29 |
Plasma Source For Rotating Susceptor
App 20180330927 - Bera; Kallol ; et al. | 2018-11-15 |
Lateral plasma/radical source
Grant 10,121,655 - Subramani , et al. November 6, 2 | 2018-11-06 |
Creating Ion Energy Distribution Functions (iedf)
App 20180166249 - DORF; Leonid ; et al. | 2018-06-14 |
Symmetric Plasma Source To Generate Pie Shaped Treatment
App 20170213701 - Subramani; Anantha K. ; et al. | 2017-07-27 |
Lateral Plasma/Radical Source
App 20170148626 - Subramani; Anantha K. ; et al. | 2017-05-25 |
Uniform Low Electron Temperature Plasma Source With Reduced Wafer Charging And Independent Control Over Radical Composition
App 20170140900 - Dorf; Leonid ; et al. | 2017-05-18 |
CIGS absorber formed by co-sputtered indium
Grant 9,112,095 - Sapirman , et al. August 18, 2 | 2015-08-18 |
Method and apparatus for atomic hydrogen surface treatment during GaN epitaxy
Grant 8,975,166 - Chua , et al. March 10, 2 | 2015-03-10 |
Structure For Electric Energy Storage Using Carbon Nanotubes
App 20140349216 - NGUYEN; Cattien V. ; et al. | 2014-11-27 |
Rechargeable Power Source For Mobile Devices Which Includes An Ultracapacitor
App 20140321027 - NGUYEN; Cattien V. ; et al. | 2014-10-30 |
Low temperature migration enhanced Si-Ge epitaxy with plasma assisted surface activation
Grant 8,778,811 - Kraus , et al. July 15, 2 | 2014-07-15 |
CIGS Absorber Formed By Co-Sputtered Indium
App 20140170803 - Sapirman; Teresa B. ; et al. | 2014-06-19 |
Chemical vapor deposition system with in situ, spatially separated plasma
App 20140014965 - Kraus; Philip A. ; et al. | 2014-01-16 |
GaN Epitaxy With Migration Enhancement and Surface Energy Modification
App 20130313566 - Kraus; Philip A. ; et al. | 2013-11-28 |
GaN epitaxy with migration enhancement and surface energy modification
Grant 8,524,581 - Kraus , et al. September 3, 2 | 2013-09-03 |
GaN Epitaxy With Migration Enhancement and Surface Energy Modification
App 20130171805 - Kraus; Philip A. ; et al. | 2013-07-04 |
High Throughput Processing Using Metal Organic Chemical Vapor Deposition
App 20130171350 - Kraus; Philip A. ; et al. | 2013-07-04 |
Methods and Systems for Forming Thin Films
App 20130118404 - Kraus; Philip A. ; et al. | 2013-05-16 |
LOW TEMPERATURE MIGRATION ENHANCED Si-Ge EPITAXY WITH PLASMA ASSISTED SURFACE ACTIVATION
App 20130045587 - Kraus; Philip A. ; et al. | 2013-02-21 |
Methods and systems for forming thin films
Grant 8,377,803 - Kraus , et al. February 19, 2 | 2013-02-19 |
Stabilization of high-k dielectric materials
Grant 8,323,754 - Olsen , et al. December 4, 2 | 2012-12-04 |
Methods and systems for forming thin films
Grant 8,318,590 - Kraus , et al. November 27, 2 | 2012-11-27 |
Methods And Systems For Forming Thin Films
App 20120208352 - Kraus; Philip A. ; et al. | 2012-08-16 |
Methods And Systems For Forming Thin Films
App 20120208357 - Kraus; Philip A. ; et al. | 2012-08-16 |
Methods and systems for forming thin films
Grant 8,143,147 - Kraus , et al. March 27, 2 | 2012-03-27 |
Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy
Grant 7,514,373 - Kraus , et al. April 7, 2 | 2009-04-07 |
Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy
Grant 7,179,754 - Kraus , et al. February 20, 2 | 2007-02-20 |
Nitric oxide reoxidation for improved gate leakage reduction of sion gate dielectrics
App 20070010103 - Chua; Thai Cheng ; et al. | 2007-01-11 |
Method And Apparatus For Plasma Nitridation Of Gate Dielectrics Using Amplitude Modulated Radio-frequency Energy
App 20060216944 - Kraus; Philip A. ; et al. | 2006-09-28 |
Stabilization of high-k dielectric materials
App 20050260357 - Olsen, Christopher ; et al. | 2005-11-24 |
Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy
App 20040242021 - Kraus, Philip A. ; et al. | 2004-12-02 |
| 