Patent | Date |
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Hydrophobic shafts for use in process chambers Grant 10,974,276 - Allen, Jr. , et al. April 13, 2 | 2021-04-13 |
Hydrophobic Shafts For Use In Process Chambers App 20200139401 - Allen, JR.; Ernest E. ;   et al. | 2020-05-07 |
Hydrophobic shafts for use in process chambers Grant 10,569,299 - Allen, Jr. , et al. Feb | 2020-02-25 |
Hydrophobic Shafts For Use In Process Chambers App 20190299249 - Allen, JR.; Ernest E. ;   et al. | 2019-10-03 |
Gas injection system for ion beam device Grant 9,865,433 - Wallace , et al. January 9, 2 | 2018-01-09 |
Method and apparatus for clamping and cooling a substrate for ion implantation Grant 9,520,264 - Krampert , et al. December 13, 2 | 2016-12-13 |
Gas coupled probe for substrate temperature measurement Grant 9,417,138 - Krampert , et al. August 16, 2 | 2016-08-16 |
Method and apparatus for holding a plurality of substrates for processing Grant 9,218,990 - Fairhurst , et al. December 22, 2 | 2015-12-22 |
Technique for temperature measurement and calibration of semiconductor workpieces using infrared Grant 9,212,949 - Krampert , et al. December 15, 2 | 2015-12-15 |
Contained ceramic fastener Grant 9,175,710 - Schrameyer , et al. November 3, 2 | 2015-11-03 |
Technique For Temperature Measurement And Calibration Of Semiconductor Workpieces Using Infrared App 20150276487 - Krampert; Jeffrey E. ;   et al. | 2015-10-01 |
Method and apparatus for removing a vertically-oriented substrate from a cassette Grant 9,070,730 - Fairhurst , et al. June 30, 2 | 2015-06-30 |
Contained Ceramic Fastener App 20150176625 - Schrameyer; Michael A. ;   et al. | 2015-06-25 |
Gas Coupled Probe For Substrate Temperature Measurement App 20150071327 - Krampert; Jeffrey E. ;   et al. | 2015-03-12 |
Method and apparatus for lifting a horizontally-oriented substrate from a cassette Grant 8,585,115 - Fairhurst , et al. November 19, 2 | 2013-11-19 |
Method and apparatus for manipulating a substrate Grant 8,550,520 - Fairhurst , et al. October 8, 2 | 2013-10-08 |
Method and Apparatus for Clamping and Cooling a Substrate for ION Implantation App 20130240759 - Krampert; Jeffrey E. ;   et al. | 2013-09-19 |
Method And Apparatus For Holding A Plurality Of Substrates For Processing App 20130089403 - Fairhurst; John Robert ;   et al. | 2013-04-11 |
Method And Apparatus For Removing A Vertically-oriented Substrate From A Cassette App 20130089395 - Fairhurst; John Robert ;   et al. | 2013-04-11 |
Method And Apparatus For Lifting A Horizontally-oriented Substrate From A Cassette App 20130088028 - Fairhurst; John Robert ;   et al. | 2013-04-11 |
Method And Apparatus For Manipulating A Substrate App 20130088030 - Fairhurst; John Robert ;   et al. | 2013-04-11 |
In vacuum optical wafer heater for cryogenic processing Grant 8,328,494 - Fish , et al. December 11, 2 | 2012-12-11 |
Heat Lip Seal For Cryogenic Processing App 20120241648 - Krampert; Jeffrey E. | 2012-09-27 |
Mechanism And Method For Ensuring Alignment Of A Workpiece To A Mask App 20120060353 - Krampert; Jeffrey E. | 2012-03-15 |
Optical heater for cryogenic ion implanter surface regeneration Grant 7,977,652 - Fish , et al. July 12, 2 | 2011-07-12 |
In Vacuum Optical Wafer Heater For Cryogenic Processing App 20110143461 - Fish; Roger B. ;   et al. | 2011-06-16 |
Optical Heater For Cryogenic Ion Implanter Surface Regeneration App 20110073780 - Fish; Roger B. ;   et al. | 2011-03-31 |