Patent | Date |
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Method of producing bonded wafer and bonded wafer Grant 11,211,285 - Satou , et al. December 28, 2 | 2021-12-28 |
Polishing Head, Wafer Polishing Apparatus Using The Same, And Wafer Polishing Method Using The Same App 20210331285 - NAKANO; Yuki ;   et al. | 2021-10-28 |
Method Of Producing Bonded Wafer And Bonded Wafer App 20200343130 - SATOU; Youzou ;   et al. | 2020-10-29 |
Silicon Wafer Single-side Polishing Method App 20190030676 - NAKAJIMA; Toshiharu ;   et al. | 2019-01-31 |
Method for manufacturing semiconductor wafer Grant 9,991,110 - Kozasa , et al. June 5, 2 | 2018-06-05 |
Method for polishing silicon wafer Grant 9,956,663 - Kozasa , et al. May 1, 2 | 2018-05-01 |
Method For Polishing Silicon Wafer App 20170252891 - KOZASA; Kazuaki ;   et al. | 2017-09-07 |
Method For Manufacturing Semiconductor Wafer App 20170011903 - KOZASA; Kazuaki ;   et al. | 2017-01-12 |
Etching method and etching apparatus of semiconductor wafer Grant 9,305,850 - Kozasa , et al. April 5, 2 | 2016-04-05 |
Method of cleaning semiconductor wafer and semiconductor wafer Grant 8,992,791 - Kozasa , et al. March 31, 2 | 2015-03-31 |
Manufacturing method of epitaxial silicon wafer and substrate cleaning apparatus Grant 8,696,809 - Kozasa , et al. April 15, 2 | 2014-04-15 |
Etching Method And Etching Apparatus Of Semiconductor Wafer App 20120305187 - Kozasa; Kazuaki ;   et al. | 2012-12-06 |
Slurry supplying apparatus and method of polishing semiconductor wafer utilizing same Grant 8,303,373 - Kozasa November 6, 2 | 2012-11-06 |
Etching method and etching apparatus of semiconductor wafer Grant 8,273,260 - Kozasa , et al. September 25, 2 | 2012-09-25 |
Method Of Cleaning Semiconductor Wafer And Semiconductor Wafer App 20100093177 - KOZASA; Kazuaki ;   et al. | 2010-04-15 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer Grant 7,666,063 - Kozasa , et al. February 23, 2 | 2010-02-23 |
Slurry Supplying Apparatus And Method Of Polishing Semiconductor Wafer Utilizing Same App 20090298393 - Kozasa; Kazuaki | 2009-12-03 |
Etching Method And Etching Apparatus Of Semiconductor Wafer App 20090286333 - Kozasa; Kazuaki ;   et al. | 2009-11-19 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer Grant 7,540,800 - Kozasa , et al. June 2, 2 | 2009-06-02 |
Method Of Recycling Abrasive Slurry App 20090053981 - Kozasa; Kazuaki ;   et al. | 2009-02-26 |
Rough Polishing Method Of Semiconductor Wafer And Polishing Apparatus Of Semiconductor Wafer App 20090042482 - KOZASA; Kazuaki ;   et al. | 2009-02-12 |
Manufacturing Method Of Epitaxial Silicon Wafer And Substrate Cleaning Apparatus App 20080308129 - KOZASA; Kazuaki ;   et al. | 2008-12-18 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer App 20080081541 - Kozasa; Kazuaki ;   et al. | 2008-04-03 |
Polishing method for semiconductor wafer Grant 7,303,691 - Kozasa , et al. December 4, 2 | 2007-12-04 |
Polishing method for semiconductor wafer App 20070059935 - Kozasa; Kazuaki ;   et al. | 2007-03-15 |