| Patent | Date |
|---|
Substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device
Grant 11,454,878 - Kozakai , et al. September 27, 2 | 2022-09-27 |
Substrate With A Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, And Semiconductor Device Manufacturing Method
App 20220137501 - NAKAGAWA; Masanori ; et al. | 2022-05-05 |
Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method
Grant 11,256,167 - Nakagawa , et al. February 22, 2 | 2022-02-22 |
Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20210255536 - IKEBE; Yohei ; et al. | 2021-08-19 |
Substrate With Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, And Method For Producing Semiconductor Device
App 20210247688 - KOZAKAI; Hirofumi ; et al. | 2021-08-12 |
Reflective mask blank, reflective mask and method of manufacturing semiconductor device
Grant 11,003,068 - Ikebe , et al. May 11, 2 | 2021-05-11 |
Substrate With A Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, And Semiconductor Device Manufacturing Method
App 20200310244 - NAKAGAWA; Masanori ; et al. | 2020-10-01 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
Grant 10,620,527 - Hamamoto , et al. | 2020-04-14 |
Reflective Mask Blank, Reflective Mask And Method Of Manufacturing Semiconductor Device
App 20190384158 - IKEBE; Yohei ; et al. | 2019-12-19 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask Blank, Transmissive Ma
App 20190361337 - HAMAMOTO; Kazuhiro ; et al. | 2019-11-28 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
Grant 10,429,728 - Hamamoto , et al. O | 2019-10-01 |
Reflective mask blank, method for manufacturing same, reflective mask, method for manufacturing same, and method for manufacturing semiconductor device
Grant 10,347,485 - Shoki , et al. July 9, 2 | 2019-07-09 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method
Grant 10,295,900 - Orihara , et al. | 2019-05-21 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask, And Semiconductor Device Fabrication Method
App 20180275507 - ORIHARA; Toshihiko ; et al. | 2018-09-27 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method
Grant 10,001,699 - Orihara , et al. June 19, 2 | 2018-06-19 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask Blank, Transmissive Mask, Reflective Mask, And Semiconductor Device Fabrication Method
App 20180081264 - HAMAMOTO; Kazuhiro ; et al. | 2018-03-22 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
Grant 9,897,909 - Hamamoto , et al. February 20, 2 | 2018-02-20 |
Reflective Mask Blank, Method For Manufacturing Same, Reflective Mask, Method For Manufacturing Same, And Method For Manufacturing Semiconductor Device
App 20170263444 - SHOKI; Tsutomu ; et al. | 2017-09-14 |
Substrate with multilayer reflective film, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method of manufacturing the same, and method of manufacturing a semiconductor device
Grant 9,740,091 - Onoue , et al. August 22, 2 | 2017-08-22 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask Blank, Transmissive Mask, Reflective Mask, And Semiconductor Device Fabrication Method
App 20170023853 - HAMAMOTO; Kazuhiro ; et al. | 2017-01-26 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask, And Semiconductor Device Fabrication Method
App 20170010527 - ORIHARA; Toshihiko ; et al. | 2017-01-12 |
Method of manufacturing substrate with a multilayer reflective film, method of manufacturing a reflective mask blank, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing a semiconductor device
Grant 9,507,254 - Orihara , et al. November 29, 2 | 2016-11-29 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method
Grant 9,494,851 - Orihara , et al. November 15, 2 | 2016-11-15 |
Substrate With Multilayer Reflective Film, Reflective Mask Blank For Euv Lithography, Reflective Mask For Euv Lithography, And Method Of Manufacturing The Same, And Method Of Manufacturing A Semiconductor Device
App 20160147139 - ONOUE; Takahiro ; et al. | 2016-05-26 |
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
Grant 9,348,217 - Hamamoto , et al. May 24, 2 | 2016-05-24 |
Method Of Manufacturing Substrate With A Multilayer Reflective Film, Method Of Manufacturing A Reflective Mask Blank, Substrate With A Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask And Method Of Manufacturing A Semiconductor Device
App 20150205196 - Orihara; Toshihiko ; et al. | 2015-07-23 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask, And Semiconductor Device Fabrication Method
App 20150017574 - Orihara; Toshihiko ; et al. | 2015-01-15 |
Mask Blank Substrate, Substrate With Multilayer Reflection Film, Transmissive Mask Blank, Reflective Mask Blank, Transmissive Mask, Reflective Mask, And Semiconductor Device Fabrication Method
App 20140329174 - Hamamoto; Kazuhiro ; et al. | 2014-11-06 |
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