loadpatents
Patent applications and USPTO patent grants for KOYAMA; Yoshihiro.The latest application filed is for "liquid metal ion source and focused ion beam apparatus".
Patent | Date |
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Liquid Metal Ion Source And Focused Ion Beam Apparatus App 20210090842 - KOYAMA; Yoshihiro ;   et al. | 2021-03-25 |
Inkjet apparatus Grant 10,016,982 - Kuronuma , et al. July 10, 2 | 2018-07-10 |
Inkjet Apparatus App 20170087862 - Kuronuma; Daigo ;   et al. | 2017-03-30 |
Charged particle beam apparatus, thin film forming method, defect correction method and device forming method Grant 9,257,273 - Koyama , et al. February 9, 2 | 2016-02-09 |
Focused ion beam apparatus Grant 8,822,945 - Nishinaka , et al. September 2, 2 | 2014-09-02 |
Charged Particle Beam Apparatus, Thin Film Forming Method, Defect Correction Method And Device Forming Method App 20130224889 - Koyama; Yoshihiro ;   et al. | 2013-08-29 |
Focused ion beam apparatus Grant 8,513,602 - Ogawa , et al. August 20, 2 | 2013-08-20 |
Ink-jet Recording Apparatus App 20130083144 - Hokazono; Yutaka ;   et al. | 2013-04-04 |
Focused ion beam apparatus Grant 8,389,953 - Ogawa , et al. March 5, 2 | 2013-03-05 |
Ink-jet recording apparatus Grant 8,336,985 - Hokazono , et al. December 25, 2 | 2012-12-25 |
Printer Grant 8,287,119 - Yamaguchi , et al. October 16, 2 | 2012-10-16 |
Focused ion beam apparatus App 20110233401 - Nishinaka; Kenichi ;   et al. | 2011-09-29 |
Focused ion beam apparatus App 20110204252 - Ogawa; Takashi ;   et al. | 2011-08-25 |
Focused Ion Beam Apparatus App 20100219339 - Ogawa; Takashi ;   et al. | 2010-09-02 |
Ink-jet Recording Apparatus App 20100214346 - Hokazono; Yutaka ;   et al. | 2010-08-26 |
Printer App 20100214343 - Yamaguchi; Toshiaki ;   et al. | 2010-08-26 |
Substrate processing apparatus and substrate processing method Grant 7,396,199 - Koyama , et al. July 8, 2 | 2008-07-08 |
Plating Apparatus, Cartridge And Copper Dissolution Tank For Use In The Plating Apparatus, And Plating Method App 20070235341 - Mizohata; Yasuhiro ;   et al. | 2007-10-11 |
Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method Grant 7,279,079 - Mizohata , et al. October 9, 2 | 2007-10-09 |
Liquid discharge method and apparatus and display device panel manufacturing method and apparatus Grant 7,111,755 - Koyama , et al. September 26, 2 | 2006-09-26 |
Thermal processing apparatus and thermal processing method App 20050149222 - Kobayashi, Toshiyuki ;   et al. | 2005-07-07 |
Method for repairing a phase shift mask and a focused ion beam apparatus for carrying out method Grant 6,891,171 - Hagiwara , et al. May 10, 2 | 2005-05-10 |
Thermal processing apparatus Grant 6,868,302 - Kobayashi , et al. March 15, 2 | 2005-03-15 |
Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method App 20040069647 - Mizohata, Yasuhiro ;   et al. | 2004-04-15 |
Liquid discharge method and apparatus and display device panel manufacturing method and apparatus App 20040023567 - Koyama, Yoshihiro ;   et al. | 2004-02-05 |
Thermal processing apparatus and thermal processing method App 20030186563 - Kobayashi, Toshiyuki ;   et al. | 2003-10-02 |
Substrate processing apparatus and substrate processing method App 20030123971 - Koyama, Yoshihiro ;   et al. | 2003-07-03 |
Focused ion beam apparatus having a gas injector in which one of a plurality of nozzles can be selectively driven for elevation Grant 6,576,913 - Koyama June 10, 2 | 2003-06-10 |
Gas injector in which one of a plurality of nozzles can be selectively driven for elevation App 20020171050 - Koyama, Yoshihiro | 2002-11-21 |
Focused ion beam processing apparatus Grant 6,365,905 - Koyama , et al. April 2, 2 | 2002-04-02 |
Focused ion beam apparatus Grant 6,348,689 - Koyama February 19, 2 | 2002-02-19 |
Ion beam working apparatus Grant 6,118,122 - Koyama , et al. September 12, 2 | 2000-09-12 |
Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer Grant 4,746,857 - Sakai , et al. May 24, 1 | 1988-05-24 |
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