Koyama; Yasufumi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Koyama; Yasufumi.The latest application filed is for "substrate processing apparatus and substrate processing method".

Company Profile

0.10.9

Koyama; Yasufumi - Kyoto JP
Koyama; Yasufumi - Shimogyo-ku JP
Koyama; Yasufumi - Kamikyo-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate treating apparatus Grant 7,563,323 - Hashinoki , et al. July 21, 2	2009-07-21
Substrate processing apparatus for performing photolithography Grant 7,525,650 - Shiga , et al. April 28, 2	2009-04-28
Substrate processing apparatus Grant 7,497,912 - Koyama , et al. March 3, 2	2009-03-03
Substrate Processing Apparatus And Substrate Processing Method App 20090014126 - Ohtani; Masami ; et al.	2009-01-15
Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus Grant 7,317,961 - Hashinoki , et al. January 8, 2	2008-01-08
Substrate processing apparatus and substrate processing method Grant 7,229,240 - Hashinoki , et al. June 12, 2	2007-06-12
Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus App 20060195216 - Hashinoki; Kenji ; et al.	2006-08-31
Method of transporting and processing substrates in substrate processing apparatus Grant 7,069,099 - Hashinoki , et al. June 27, 2	2006-06-27
Substrate processing apparatus, operation method thereof and program Grant 6,937,917 - Akiyama , et al. August 30, 2	2005-08-30
Substrate processing apparatus for performing photolithography App 20050061242 - Shiga, Masayoshi ; et al.	2005-03-24
Substrate treating apparatus App 20050061441 - Hashinoki, Kenji ; et al.	2005-03-24
Substrate processing apparatus App 20050061248 - Koyama, Yasufumi ; et al.	2005-03-24
Substrate processing apparatus and substrate processing method App 20050061240 - Hashinoki, Kenji ; et al.	2005-03-24
Substrate treating apparatus Grant 6,837,632 - Koyama , et al. January 4, 2	2005-01-04
Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus App 20040182318 - Hashinoki, Kenji ; et al.	2004-09-23
Substrate processing apparatus, operation method thereof and program App 20040122545 - Akiyama, Kazuya ; et al.	2004-06-24
Substrate treating apparatus App 20040037677 - Koyama, Yasufumi ; et al.	2004-02-26
Substrate transport method and apparatus Grant 6,253,118 - Koyama June 26, 2	2001-06-26
Apparatus and method for detecting and conveying substrates in cassette Grant 5,906,469 - Oka , et al. May 25, 1	1999-05-25

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