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Patent applications and USPTO patent grants for Koyama; Harumichi.The latest application filed is for "method and apparatus for dressing polishing pad".
Patent | Date |
---|---|
Method and apparatus for dressing polishing pad Grant 8,808,061 - Koyama August 19, 2 | 2014-08-19 |
Method And Apparatus For Dressing Polishing Pad App 20110312254 - KOYAMA; Harumichi | 2011-12-22 |
Double face polishing apparatus Grant 7,485,029 - Kanda , et al. February 3, 2 | 2009-02-03 |
Double face polishing apparatus App 20080057831 - Kanda; Satoki ;   et al. | 2008-03-06 |
Method of adhering polishing pads and jig for adhering the same Grant 7,306,510 - Nakamura , et al. December 11, 2 | 2007-12-11 |
Method of adhering polishing pads and jig for adhering the same Grant 7,278,907 - Nakamura , et al. October 9, 2 | 2007-10-09 |
Polishing apparatus Grant 7,255,635 - Miyashita , et al. August 14, 2 | 2007-08-14 |
Method of adhering polishing pads and jig for adhering the same App 20070087671 - Nakamura; Yoshio ;   et al. | 2007-04-19 |
Method of adhering polishing pads and jig for adhering the same App 20070054606 - Nakamura; Yoshio ;   et al. | 2007-03-08 |
Polishing apparatus App 20060178094 - Miyashita; Tadakazu ;   et al. | 2006-08-10 |
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