Kowaka; Masahiko
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kowaka; Masahiko.The latest application filed is for "methods and apparatus for using a reinforced diffuser in substrate processing".
- Kowaka; Masahiko - Kobe JP
- Kowaka; Masahiko - Kanagawa JP
- Kowaka, Masahiko - Kobe City JP
- Kowaka; Masahiko - Cupertino CA
- Kowaka; Masahiko - Hiratsuka JP
| Patent | Date |
|---|---|
| Methods And Apparatus For Using A Reinforced Diffuser In Substrate Processing App 20070256637 - Bagley; William A. ; et al. | 2007-11-08 |
| Narrow band excimer laser and wavelength detecting apparatus Grant RE38,372 - Wakabayashi , et al. December 30, 2 | 2003-12-30 |
| Substrate support and method of fabricating the same App 20030079853 - Matsumura, Naomi ; et al. | 2003-05-01 |
| Substrate Support And Method Of Fabricating The Same App 20030024680 - Matsumura, Naomi ; et al. | 2003-02-06 |
| Shielded heat sensor for measuring temperature Grant 5,716,133 - Hosokawa , et al. February 10, 1 | 1998-02-10 |
| Narrow band excimer laser Grant 5,596,596 - Wakabayashi , et al. January 21, 1 | 1997-01-21 |
| Narrow band excimer laser and wavelength detecting apparatus Grant 5,404,366 - Wakabayashi , et al. April 4, 1 | 1995-04-04 |
| Laser wavelength controlling apparatus Grant 5,373,515 - Wakabayashi , et al. December 13, 1 | 1994-12-13 |
| Wavelength detecting apparatus Grant 5,218,421 - Wakabayashi , et al. June 8, 1 | 1993-06-08 |
| Apparatus for detecting the wavelength of laser light Grant 5,198,872 - Wakabayashi , et al. March 30, 1 | 1993-03-30 |
| Method and system for controlling narrow-band oscillation excimer laser Grant 5,142,543 - Wakabayashi , et al. August 25, 1 | 1992-08-25 |
| Apparatus for controlling output from an excimer laser device Grant 5,081,635 - Wakabayashi , et al. January 14, 1 | 1992-01-14 |
| Laser wavelength control apparatus Grant 4,975,919 - Amada , et al. December 4, 1 | 1990-12-04 |
| Method and apparatus for sensing the wavelength of a laser beam Grant 4,926,428 - Kajiyama , et al. May 15, 1 | 1990-05-15 |
| Light source for reduced projection Grant 4,856,018 - Nozue , et al. August 8, 1 | 1989-08-08 |
| Multi-mode narrow-band oscillation excimer laser Grant 4,829,536 - Kajiyama , et al. May 9, 1 | 1989-05-09 |
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