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Patent applications and USPTO patent grants for Kouno; Hitoshi.The latest application filed is for "electrostatic chuck device".
Patent | Date |
---|---|
Electrostatic chuck device Grant 11,348,819 - Kinpara , et al. May 31, 2 | 2022-05-31 |
Electrostatic chuck device having focus ring Grant 11,024,528 - Moriya , et al. June 1, 2 | 2021-06-01 |
Electrostatic chuck device Grant 10,923,381 - Kosakai , et al. February 16, 2 | 2021-02-16 |
Electrostatic Chuck Device App 20200343125 - KINPARA; Yuuki ;   et al. | 2020-10-29 |
Plate-shaped body for temperature measurement and temperature measuring apparatus provided with the same Grant 10,502,639 - Kosakai , et al. Dec | 2019-12-10 |
Electrostatic chuck device Grant 10,262,886 - Kouno , et al. | 2019-04-16 |
Electrostatic Chuck Device App 20190019714 - KOSAKAI; Mamoru ;   et al. | 2019-01-17 |
Electrostatic chuck device Grant 10,153,192 - Maeta , et al. Dec | 2018-12-11 |
Electrostatic Chuck Device App 20180308737 - MORIYA; Yoshiaki ;   et al. | 2018-10-25 |
Electrostatic Chuck Device App 20180269097 - MAETA; Shinichi ;   et al. | 2018-09-20 |
Electrostatic chuck device Grant 10,068,790 - Kouno , et al. September 4, 2 | 2018-09-04 |
Electrostatic Chuck Device App 20170287764 - KOUNO; Hitoshi ;   et al. | 2017-10-05 |
Electrostatic Chuck Device App 20170243778 - KOUNO; Hitoshi ;   et al. | 2017-08-24 |
Electrostatic chuck apparatus Grant 9,721,822 - Sasaki , et al. August 1, 2 | 2017-08-01 |
Electrostatic Chuck Apparatus App 20150179492 - Sasaki; Yasuharu ;   et al. | 2015-06-25 |
Electrostatic chuck apparatus Grant 8,981,263 - Sasaki , et al. March 17, 2 | 2015-03-17 |
Plate-shaped Body For Temperature Measurement And Temperature Measuring Apparatus Provided With The Same App 20140204975 - Kosakai; Mamoru ;   et al. | 2014-07-24 |
Electrostatic Chuck Apparatus App 20120281334 - Sasaki; Yasuharu ;   et al. | 2012-11-08 |
Heat dissipating structure base board, module using heat dissipating structure base board, and method for manufacturing heat dissipating structure base board Grant 8,130,499 - Ohnishi , et al. March 6, 2 | 2012-03-06 |
Heat Dissipating Structure Base Board, Module Using Heat Dissipating Structure Base Board, And Method For Manufacturing Heat Dissipating Structure Base Board App 20100091464 - Ohnishi; Tohru ;   et al. | 2010-04-15 |
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