loadpatents
Patent applications and USPTO patent grants for Kotsugai; Tatsuhiro.The latest application filed is for "load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in pod".
Patent | Date |
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Sensor built-in filter structure and wafer accommodation container Grant 11,199,528 - Kotsugai , et al. December 14, 2 | 2021-12-14 |
Wafer transport container interior atmosphere measurement device, wafer transport container, wafer transport container interior cleaning device, and wafer transport container interior cleaning method Grant 11,135,623 - Sasaki , et al. October 5, 2 | 2021-10-05 |
Load Port Apparatus, Semiconductor Manufacturing Apparatus, And Method Of Controlling Atmosphere In Pod App 20200035530 - KOTSUGAI; Tatsuhiro ;   et al. | 2020-01-30 |
Sensor Built-in Filter Structure And Wafer Accommodation Container App 20200033308 - KOTSUGAI; Tatsuhiro ;   et al. | 2020-01-30 |
Wafer Transport Container Interior Atmosphere Measurement Device, Wafer Transport Container, Wafer Transport Container Interior Cleaning Device, And Wafer Transport Container Interior Cleaning Method App 20180161830 - SASAKI; Mutsuo ;   et al. | 2018-06-14 |
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