| Patent | Date |
|---|
Contact plug formation for devices with stacked capacitors
Grant 6,753,252 - Park , et al. June 22, 2 | 2004-06-22 |
Contact plug formation for devices with stacked capacitors
App 20020173094 - Park, Youngjin ; et al. | 2002-11-21 |
Retrograde openings in thin films
Grant 6,355,567 - Halle , et al. March 12, 2 | 2002-03-12 |
Method for simultaneously forming a storage-capacitor electrode and interconnect
App 20010050385 - Kotecki, David E. ; et al. | 2001-12-13 |
Hydrogen Peroxide And Acid Etchant For A Wet Etch Process
App 20010037995 - AKATSU, HIROYUKI ; et al. | 2001-11-08 |
Method of fabricating a stack capacitor DRAM
App 20010035551 - Kotecki, David E. ; et al. | 2001-11-01 |
Method for preparing the surface of a dielectric
App 20010016226 - Natzle, Wesley ; et al. | 2001-08-23 |
DRAM stack capacitor with vias and conductive connection extending from above conductive lines to the substrate
Grant 6,262,450 - Kotecki , et al. July 17, 2 | 2001-07-17 |
Crown capacitor using a tapered etch of a damascene lower electrode
Grant 6,222,219 - Gambino , et al. April 24, 2 | 2001-04-24 |
Trench separator for self-defining discontinuous film
Grant 6,150,230 - Kotecki , et al. November 21, 2 | 2000-11-21 |
Method of forming a capacitor and a capacitor formed using the method
Grant 6,025,226 - Gambino , et al. February 15, 2 | 2000-02-15 |
Method of delivering source reagent vapor mixtures for chemical vapor deposition using interiorly partitioned injector
Grant 6,010,748 - Van Buskirk , et al. January 4, 2 | 2000-01-04 |
Adherent separator for self-defining discontinuous film
Grant 6,002,575 - Kotecki , et al. December 14, 1 | 1999-12-14 |
Semiconductor device with high dielectric constant insulator material
Grant 5,973,351 - Kotecki , et al. October 26, 1 | 1999-10-26 |
Crown capacitor using a tapered etch of a damascene lower electrode
Grant 5,879,985 - Gambino , et al. March 9, 1 | 1999-03-09 |
Overhanging separator for self-defining stacked capacitor
Grant 5,796,573 - Kotecki , et al. August 18, 1 | 1998-08-18 |
Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition
Grant 5,741,363 - Van Buskirk , et al. April 21, 1 | 1998-04-21 |
Sealed chamber with heating lamps provided within transparent tubes
Grant 5,636,320 - Yu , et al. June 3, 1 | 1997-06-03 |
Isolated sidewall capacitor having a compound plate electrode
Grant 5,633,781 - Saenger , et al. May 27, 1 | 1997-05-27 |
Isolated sidewall capacitor with dual dielectric
Grant 5,585,998 - Kotecki , et al. December 17, 1 | 1996-12-17 |
Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity
Grant 5,548,470 - Husain , et al. August 20, 1 | 1996-08-20 |
Removable gas injectors for use in chemical vapor deposition of aluminium oxide
Grant 5,425,810 - Conti , et al. June 20, 1 | 1995-06-20 |
Thermal dissipation of integrated circuits using diamond paths
Grant 5,313,094 - Beyer , et al. May 17, 1 | 1994-05-17 |
Safe method for etching silicon dioxide
Grant 5,268,069 - Chapple-Sokol , et al. December 7, 1 | 1993-12-07 |
Low temperature emitter process for high performance bipolar devices
Grant 5,266,504 - Blouse , et al. November 30, 1 | 1993-11-30 |
Sub-layer contact technique using in situ doped amorphous silicon and solid phase recrystallization
Grant 5,192,708 - Beyer , et al. March 9, 1 | 1993-03-09 |
LPCVD reactor for high efficiency, high uniformity deposition
Grant 5,134,963 - Barbee , et al. August 4, 1 | 1992-08-04 |
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