Kosugi; Masao
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kosugi; Masao.The latest application filed is for "alignment and exposure apparatus and method for manufacture of integrated circuits".
- Kosugi; Masao - Yokohama JP
- Kosugi; Masao - Hamamatsu JP
- Kosugi; Masao - Hamakita JP
| Patent | Date |
|---|---|
| Alignment and exposure apparatus and method for manufacture of integrated circuits Grant 5,365,342 - Ayata , et al. November 15, 1 | 1994-11-15 |
| Alignment and exposure apparatus Grant 5,160,957 - Ina , et al. November 3, 1 | 1992-11-03 |
| Projection exposure apparatus Grant 5,137,363 - Kosugi , et al. August 11, 1 | 1992-08-11 |
| Precision actuator Grant 5,053,670 - Kosugi October 1, 1 | 1991-10-01 |
| Alignment and exposure apparatus and method for manufacture of integrated circuits Grant 5,050,111 - Ayata , et al. September 17, 1 | 1991-09-17 |
| Alignment and exposure apparatus and method for manufacture of integrated circuits Grant 4,937,618 - Ayata , et al. June 26, 1 | 1990-06-26 |
| Step-and-repeat alignment and exposure method and apparatus Grant 4,910,679 - Takahashi , et al. March 20, 1 | 1990-03-20 |
| Observation system for a projection exposure apparatus Grant 4,888,614 - Suzuki , et al. December 19, 1 | 1989-12-19 |
| Step-and-repeat alignment and exposure method and apparatus Grant 4,843,563 - Takahashi , et al. June 27, 1 | 1989-06-27 |
| Step and repeat exposure apparatus having improved system for aligning Grant 4,823,012 - Kosugi April 18, 1 | 1989-04-18 |
| Projection exposure apparatus Grant 4,814,829 - Kosugi , et al. March 21, 1 | 1989-03-21 |
| Projection exposure apparatus Grant 4,786,947 - Kosugi , et al. November 22, 1 | 1988-11-22 |
| Container for a sheet-like article Grant 4,776,462 - Kosugi , et al. October 11, 1 | 1988-10-11 |
| Method and apparatus for processing a plate-like workpiece Grant 4,775,877 - Kosugi , et al. October 4, 1 | 1988-10-04 |
| Mask storing mechanism Grant 4,757,355 - Iizuka , et al. July 12, 1 | 1988-07-12 |
| Semiconductor circuit manufacturing apparatus having selectively operable detectors for effecting automatic alignment Grant 4,719,357 - Ayata , et al. January 12, 1 | 1988-01-12 |
| Projection exposure apparatus having an alignment light of a wavelength other than that of the exposure light Grant 4,682,037 - Kosugi July 21, 1 | 1987-07-21 |
| Device for adjusting projection magnification Grant 4,676,631 - Kosugi , et al. June 30, 1 | 1987-06-30 |
| Method and device for discriminating stillness of a step exposure apparatus Grant 4,627,010 - Kosugi December 2, 1 | 1986-12-02 |
| Step type mask aligner Grant 4,530,587 - Kosugi , et al. July 23, 1 | 1985-07-23 |
| Exposure apparatus Grant 4,521,082 - Suzuki , et al. June 4, 1 | 1985-06-04 |
| Transfer apparatus provided with an auto-focusing mechanism Grant 4,506,977 - Sato , et al. March 26, 1 | 1985-03-26 |
| Disc orienting device Grant 4,441,853 - Kosugi April 10, 1 | 1984-04-10 |
| Process of manufacturing semiconductor devices Grant 4,179,794 - Kosugi , et al. December 25, 1 | 1979-12-25 |
| Field effect transistor having unsaturated characteristics Grant 4,106,044 - Yoshida , et al. August 8, 1 | 1978-08-08 |
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