Kosuge; Shogo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kosuge; Shogo.The latest application filed is for "method of detecting a pattern and an apparatus thereof".
- Kosuge; Shogo - Tachikawa JP
| Patent | Date |
|---|---|
| Method of detecting a pattern and an apparatus thereof Grant 6,868,354 - Kosuge , et al. March 15, 2 | 2005-03-15 |
| Method of detecting a pattern and an apparatus thereof App 20040111230 - Kosuge, Shogo ; et al. | 2004-06-10 |
| Critical dimension measurement method and apparatus capable of measurement below the resolution of an optical microscope Grant 6,680,781 - Kosuge , et al. January 20, 2 | 2004-01-20 |
| Precision size measuring apparatus App 20040008352 - Hirokawa, Satoshi ; et al. | 2004-01-15 |
| Critical dimension measurement method and apparatus capable of measurement below the resolution of an optical microscope App 20020145741 - Kosuge, Shogo ; et al. | 2002-10-10 |
| Size inspection/measurement method and size inspection/measurement apparatus App 20010002462 - Kosuge, Shogo | 2001-05-31 |
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