| Patent | Date |
|---|
Radiation sensor device for high energy photons
Grant 10,014,165 - Maas , et al. July 3, 2 | 2018-07-03 |
Apparatus and method for reactive ion etching
Grant 9,761,458 - Roozeboom , et al. September 12, 2 | 2017-09-12 |
A Radiation Sensor Device For High Energy Photons
App 20170092474 - Maas; Diederik Jan ; et al. | 2017-03-30 |
Plasma generator and method for cleaning an object
Grant 8,961,694 - Wieringa , et al. February 24, 2 | 2015-02-24 |
Surface Cleaning Device And A Method Of Cleaning A Surface
App 20140373868 - Koster; Norbertus Benedictus ; et al. | 2014-12-25 |
Ion gauge, a monitoring system and a method for determining a total integrated concentration of substances having specific molecular weight in a gas sample
Grant 8,749,245 - Koster June 10, 2 | 2014-06-10 |
Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure
Grant 8,480,807 - Koster , et al. July 9, 2 | 2013-07-09 |
Method Of Making A Support Structure
App 20130126226 - Koster; Norbertus Benedictus ; et al. | 2013-05-23 |
Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method
Grant 8,446,560 - Moors , et al. May 21, 2 | 2013-05-21 |
Apparatus And Method For Reactive Ion Etching
App 20130118895 - Roozeboom; Freddy ; et al. | 2013-05-16 |
Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure
App 20110247649 - Koster; Norbertus Benedictus ; et al. | 2011-10-13 |
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
Grant 7,963,144 - Koster , et al. June 21, 2 | 2011-06-21 |
Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element
Grant 7,959,310 - Ehm , et al. June 14, 2 | 2011-06-14 |
Ion Gauge, A Monitoring System And A Method For Determining A Total Integrated Concentration Of Substances Having Specific Molecular Weight In A Gas Sample
App 20110050242 - Koster; Norbertus Benedictus | 2011-03-03 |
Lithographic Apparatus Comprising A Magnet, Method For The Protection Of A Magnet In A Lithographic Apparatus And Device Manufacturing Method
App 20110013157 - Moors; Johannes Hubertus Josephina ; et al. | 2011-01-20 |
System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing Method
App 20100151394 - Scaccabarozzi; Luigi ; et al. | 2010-06-17 |
Plasma Generator And Method For Cleaning An Object
App 20100059085 - Wieringa; Fokko Pieter ; et al. | 2010-03-11 |
Gas Analyzing System, Lithographic Apparatus and Method of Improving a Sensitivity of a Gas Analyzing System
App 20100005854 - KOSTER; Norbertus Benedictus ; et al. | 2010-01-14 |
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
Grant 7,624,617 - Koster , et al. December 1, 2 | 2009-12-01 |
Optical Arrangement And Euv Lithography Device With At Least One Heated Optical Element, Operating Methods, And Methods For Cleaning As Well As For Providing An Optical Element
App 20080143981 - EHM; Dirk Heinrich ; et al. | 2008-06-19 |
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
App 20080128636 - Koster; Norbertus Benedictus ; et al. | 2008-06-05 |
Apparatus and method for the detection of a surface reaction, especially for cleaning of an arbitrary two-dimensional surface or three-dimensional body
App 20070143032 - Wieringa; Fokko Pieter ; et al. | 2007-06-21 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
Grant 7,115,886 - Van Schaik , et al. October 3, 2 | 2006-10-03 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
App 20050112508 - Van Schaik, Willem ; et al. | 2005-05-26 |
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby
Grant 6,862,075 - Koster , et al. March 1, 2 | 2005-03-01 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
Grant 6,828,569 - Van Schaik , et al. December 7, 2 | 2004-12-07 |
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
Grant 6,724,460 - Van Schaik , et al. April 20, 2 | 2004-04-20 |
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby
App 20040032574 - Koster, Norbertus Benedictus ; et al. | 2004-02-19 |
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
Grant 6,614,505 - Koster , et al. September 2, 2 | 2003-09-02 |
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
App 20030095240 - Van Schaik, Willem ; et al. | 2003-05-22 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
App 20030096193 - Van Schaik, Willem ; et al. | 2003-05-22 |
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
App 20020154279 - Koster, Norbertus Benedictus ; et al. | 2002-10-24 |
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