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Patent applications and USPTO patent grants for Kostelak, Jr.; Robert L..The latest application filed is for "fabrication of phase-shifting lithographic masks".
Patent | Date |
---|---|
Fabrication of phase-shifting lithographic masks Grant 5,338,626 - Garofalo , et al. August 16, 1 | 1994-08-16 |
Single-alignment-level lithographic technique for achieving self-aligned features Grant 5,275,896 - Garofalo , et al. January 4, 1 | 1994-01-04 |
Self aligned registration marks for integrated circuit fabrication Grant 4,992,394 - Kostelak, Jr. , et al. February 12, 1 | 1991-02-12 |
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