| Patent | Date |
|---|
Increased Number Of Load Ports On Factory Interface With Robot That Moves On Track
App 20220297320 - Reuter; Paul B. ; et al. | 2022-09-22 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls
Grant 11,450,539 - Koshti , et al. September 20, 2 | 2022-09-20 |
Shortened Load Port For Factory Interface
App 20220285193 - Gopalakrishna; Srinivas Poshatrahalli ; et al. | 2022-09-08 |
Semiconductor Processing Tool Platform Configuration With Reduced Footprint
App 20220199436 - Merry; Nir ; et al. | 2022-06-23 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls
Grant 11,282,724 - Koshti , et al. March 22, 2 | 2022-03-22 |
Systems And Methods For Integrating Load Locks Into A Factory Interface Footprint Space
App 20220068677 - Newman; Jacob ; et al. | 2022-03-03 |
Batch Wafer Degas Chamber And Integration Into Factory Interface And Vacuum-based Mainframe
App 20210398824 - Hruzek; Dean C. ; et al. | 2021-12-23 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
Grant 11,087,998 - Rice , et al. August 10, 2 | 2021-08-10 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20210143034 - Rice; Michael Robert ; et al. | 2021-05-13 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
Grant 10,971,381 - Rice , et al. April 6, 2 | 2021-04-06 |
Semiconductor device manufacturing platform with single and twinned processing chambers
Grant 10,847,391 - Merry , et al. November 24, 2 | 2020-11-24 |
Methods And Apparatus For Enhanced Flow Detection Repeatability Of Thermal-based Mass Flow Controllers (mfcs)
App 20190391602 - Xu; Ming ; et al. | 2019-12-26 |
Substrate Processing Systems, Apparatus, And Methods With Factory Interface Environmental Controls
App 20190362997 - Koshti; Sushant S. ; et al. | 2019-11-28 |
Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
Grant 10,409,295 - Xu , et al. Sept | 2019-09-10 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20190214284 - Rice; Michael Robert ; et al. | 2019-07-11 |
Methods and systems for improved mask processing
Grant 10,199,256 - Ng , et al. Fe | 2019-02-05 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls
Grant 10,192,765 - Koshti , et al. Ja | 2019-01-29 |
Semiconductor Device Manufacturing Platform With Single And Twinned Processing Chambers
App 20190013216 - Merry; Nir ; et al. | 2019-01-10 |
Substrate Processing Systems, Apparatus, And Methods With Factory Interface Environmental Controls
App 20180366355 - Koshti; Sushant S. ; et al. | 2018-12-20 |
Methods And Apparatus For Enhanced Flow Detection Repeatability Of Thermal-based Mass Flow Controllers (mfcs)
App 20180188748 - Xu; Ming ; et al. | 2018-07-05 |
Apparatus And Methods For A Mask Inverter
App 20170316967 - Ng; Edward ; et al. | 2017-11-02 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20160225646 - RICE; Michael Robert ; et al. | 2016-08-04 |
Degassing apparatus adapted to process substrates in multiple tiers with second actuator
Grant 9,177,842 - Englhardt , et al. November 3, 2 | 2015-11-03 |
Apparatus And Methods For A Mask Inverter
App 20150090295 - Ng; Edward ; et al. | 2015-04-02 |
Methods And Systems For Improved Mask Processing
App 20150090294 - Ng; Edward ; et al. | 2015-04-02 |
Substrate Processing Systems, Apparatus, And Methods With Factory Interface Environmental Controls
App 20150045961 - Koshti; Sushant S. ; et al. | 2015-02-12 |
Methods, systems and apparatus for rapid exchange of work material
Grant 8,886,354 - Shah , et al. November 11, 2 | 2014-11-11 |
Semiconductor Device Manufacturing Platform With Single And Twinned Processing Chambers
App 20140262035 - Merry; Nir ; et al. | 2014-09-18 |
System, methods and apparatus for substrate carrier content verification using a material handling system
Grant 8,379,082 - Shah , et al. February 19, 2 | 2013-02-19 |
Robot Systems, Apparatus, And Methods Adapted To Process Substrates In Multiple Tiers
App 20130039734 - Englhardt; Eric A. ; et al. | 2013-02-14 |
Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer
Grant 8,356,968 - Shah , et al. January 22, 2 | 2013-01-22 |
Methods and apparatus for sensing substrates in carriers
Grant 7,894,923 - Koshti , et al. February 22, 2 | 2011-02-22 |
Methods, Systems And Apparatus For Rapid Exchange Of Work Material
App 20100179683 - Shah; Vinay K. ; et al. | 2010-07-15 |
System, Methods And Apparatus For Substrate Carrier Content Verification Using A Material Handling System
App 20090225160 - Shah; Vinay K. ; et al. | 2009-09-10 |
Methods and apparatus for a band to band transfer module
Grant 7,577,487 - Lowrance , et al. August 18, 2 | 2009-08-18 |
Methods And Apparatus For An Efficient Handshake Between Material Handling And Material Processing Devices For Safe Material Transfer
App 20090202336 - Shah; Vinay K. ; et al. | 2009-08-13 |
Use Of Logical Lots In Semiconductor Substrate Processing
App 20080294282 - Koshti; Sushant S. ; et al. | 2008-11-27 |
Methods And Apparatus For Sensing Substrates In Carriers
App 20080156689 - Koshti; Sushant S. ; et al. | 2008-07-03 |
Methods And Apparatus For Transporting Substrate Carriers
App 20070258796 - Englhardt; Eric Andrew ; et al. | 2007-11-08 |
Methods and apparatus for a transport lift assembly
App 20070059153 - Lowrance; Robert B. ; et al. | 2007-03-15 |
Methods and apparatus for a band to band transfer module
App 20070061031 - Lowrance; Robert B. ; et al. | 2007-03-15 |
Methods and apparatus for a transfer station
App 20070059144 - Lowrance; Robert B. ; et al. | 2007-03-15 |
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