| Patent | Date |
|---|
Semiconductor Device And Manufacturing Method Of Semiconductor Device
App 20160260643 - KOSHIBA; Takeshi | 2016-09-08 |
Method of forming pattern, system for calculating resist coating distribution and program for calculating the same
Grant 9,389,513 - Koshiba July 12, 2 | 2016-07-12 |
Pattern forming method
Grant 9,381,540 - Koshiba , et al. July 5, 2 | 2016-07-05 |
Pattern Forming Method
App 20150224536 - KOSHIBA; Takeshi ; et al. | 2015-08-13 |
Pattern forming method
Grant 9,046,763 - Koshiba , et al. June 2, 2 | 2015-06-02 |
Imprint apparatus, imprint method, and manufacturing method of semiconductor device
Grant 8,907,346 - Koshiba , et al. December 9, 2 | 2014-12-09 |
Exposure Method, Reflection Type Mask, And Semiconductor Device Manufacturing Method
App 20140349219 - MIZUNO; Hiroyuki ; et al. | 2014-11-27 |
Semiconductor Device And Method Of Manufacturing Same
App 20140319700 - KOSHIBA; Takeshi | 2014-10-30 |
Imprint Apparatus, Imprint Method, And Manufacturing Method Of Semiconductor Device
App 20140065735 - Koshiba; Takeshi ; et al. | 2014-03-06 |
Method For Fabricating Template
App 20130220970 - KOSHIBA; Takeshi | 2013-08-29 |
Acceptance determining method of blank for EUV mask and manufacturing method of EUV mask
Grant 8,423,926 - Koshiba , et al. April 16, 2 | 2013-04-16 |
Acceptance Determining Method Of Blank For Euv Mask And Manufacturing Method Of Euv Mask
App 20120174045 - KOSHIBA; Takeshi ; et al. | 2012-07-05 |
Pattern forming method, manufacturing method of semiconductor device, and template manufacturing method
Grant 8,178,366 - Miyoshi , et al. May 15, 2 | 2012-05-15 |
Pattern Formation Method
App 20120009791 - ZHANG; Yingkang ; et al. | 2012-01-12 |
Pattern Forming Method, Manufacturing Method Of Semiconductor Device, And Template Manufacturing Method
App 20110300646 - MIYOSHI; Seiro ; et al. | 2011-12-08 |
Pattern Verification Method, Pattern Generating Method, Device Fabrication Method, Pattern Verification Program, And Pattern Verification System
App 20110194751 - TAKIMOTO; Michiya ; et al. | 2011-08-11 |
Method Of Forming Pattern, System For Calculating Resist Coating Distribution And Program For Calculating The Same
App 20110189601 - KOSHIBA; Takeshi | 2011-08-04 |
Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program
Grant 7,985,958 - Nakasugi , et al. July 26, 2 | 2011-07-26 |
Pattern Generating Method And Process Determining Method
App 20110143271 - KOSHIBA; Takeshi ; et al. | 2011-06-16 |
Character pattern extracting method, charged particle beam drawing method, and character pattern extracting program
Grant 7,889,910 - Nakasugi , et al. February 15, 2 | 2011-02-15 |
Pattern Transfer Method
App 20110012297 - KOBIKI; Ayumi ; et al. | 2011-01-20 |
Pattern Forming Method
App 20100237045 - KOSHIBA; Takeshi ; et al. | 2010-09-23 |
Pattern Generation Method, Recording Medium, And Pattern Formation Method
App 20100187714 - KOBIKI; Ayumi ; et al. | 2010-07-29 |
Pattern Forming Method And Pattern Forming Device
App 20100029084 - KOSHIBA; Takeshi ; et al. | 2010-02-04 |
Method For Forming Pattern, And Template
App 20100022036 - YONEDA; Ikuo ; et al. | 2010-01-28 |
Charged-beam Exposure Apparatus Having An Improved Alignment Precision And Exposure Method
App 20090206280 - KOSHIBA; Takeshi ; et al. | 2009-08-20 |
Microfabrication Apparatus And Device Manufacturing Method
App 20090095711 - Koshiba; Takeshi ; et al. | 2009-04-16 |
Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device
Grant 7,482,604 - Nakasugi , et al. January 27, 2 | 2009-01-27 |
Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device
Grant 7,459,705 - Nakasugi , et al. December 2, 2 | 2008-12-02 |
Charged particle beam drawing apparatus, charged particle beam drawing method and semiconductor device manufacturing method
App 20080001077 - Nakasugi; Tetsuro ; et al. | 2008-01-03 |
Character pattern extracting method, charged particle beam drawing method, and character pattern extracting program
App 20070263921 - Nakasugi; Tetsuro ; et al. | 2007-11-15 |
Cryptographical pseudo-random number generation apparatus and program
Grant 7,257,224 - Koshiba August 14, 2 | 2007-08-14 |
Charged particle beam exposure method of character projection system, charged particle beam exposure device of character projection system, program for use in charged particle beam exposure device, and manufacturing method of semiconductor device
App 20070114463 - Nakasugi; Tetsuro ; et al. | 2007-05-24 |
Electron beam lithography apparatus, lithography method, lithography program, and manufacturing method of a semiconductor device
App 20060289805 - Nakasugi; Tetsuro ; et al. | 2006-12-28 |
Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program
App 20060151721 - Nakasugi; Tetsuro ; et al. | 2006-07-13 |
Cryptographical pseudo-random number generation apparatus and program
App 20040005053 - Koshiba, Takeshi | 2004-01-08 |
Dialog interface system
Grant 6,330,539 - Takayama , et al. December 11, 2 | 2001-12-11 |
Virtual clay system and its method of simulation
Grant 6,040,840 - Koshiba , et al. March 21, 2 | 2000-03-21 |
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