Koshelev; Konstantin Nikolaevitch

Patent Applications and Registrations

Patent applications and USPTO patent grants for Koshelev; Konstantin Nikolaevitch.The latest application filed is for "target material, a source, an euv lithographic apparatus and a device manufacturing method using the same".

Company Profile

0.22.24

Koshelev; Konstantin Nikolaevitch - Troitsk RU
Koshelev; Konstantin Nikolaevitch - Troitzk RU
Koshelev; Konstantin Nikolaevitch - Moscow RU
Koshelev; Konstantin Nikolaevitch - Moscow Region RU
Koshelev, Konstantin Nikolaevitch - RU-Troitsk RU

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method Grant 8,362,444 - Ivanov , et al. January 29, 2	2013-01-29
Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus Grant 8,317,929 - Rakhimova , et al. November 27, 2	2012-11-27
Lithographic apparatus, radiation system and device manufacturing method Grant 8,018,574 - Gayazov , et al. September 13, 2	2011-09-13
Target Material, A Source, An Euv Lithographic Apparatus And A Device Manufacturing Method Using The Same App 20110043777 - Krivtsun; Vladimir Mihailovitc ; et al.	2011-02-24
Plasma Radiation Source, Method Of Forming Plasma Radiation, Apparatus For Projecting A Pattern From A Patterning Device Onto A Substrate And Device Manufacturing Method App 20110031866 - IVANOV; Vladimir Vitalevitch ; et al.	2011-02-10
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method Grant 7,838,853 - Ivanov , et al. November 23, 2	2010-11-23
Radiation System And Lithographic Apparatus App 20100141909 - Wassink; Arnoud Cornelis ; et al.	2010-06-10
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant RE41,362 - Koshelev , et al. June 1, 2	2010-06-01
Radiation system and lithographic apparatus Grant 7,696,493 - Van Herpen , et al. April 13, 2	2010-04-13
Radiation system and lithographic apparatus Grant 7,696,492 - Wassink , et al. April 13, 2	2010-04-13
Radiation source, lithographic apparatus and device manufacturing method Grant 7,528,395 - Koshelev , et al. May 5, 2	2009-05-05
Plasma radiation source for a lithographic apparatus Grant 7,518,134 - Ivanov , et al. April 14, 2	2009-04-14
Radiation source Grant 7,501,642 - Moors , et al. March 10, 2	2009-03-10
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,462,851 - Banine , et al. December 9, 2	2008-12-09
Reducing fast ions in a plasma radiation source App 20080151205 - Ivanov; Vladimir Vitalevitch ; et al.	2008-06-26
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method App 20080142740 - Ivanov; Vladimir Vitalevitch ; et al.	2008-06-19
Radiation system and lithographic apparatus App 20080142736 - Wassink; Arnoud Cornelis ; et al.	2008-06-19
Radiation system and lithographic apparatus App 20080142741 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al.	2008-06-19
Plasma radiation source for a lithographic apparatus App 20080137050 - Ivanov; Vladimir Vitalevitch ; et al.	2008-06-12
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,335,900 - Koshelev , et al. February 26, 2	2008-02-26
Lithographic apparatus and device manufacturing method Grant 7,279,690 - Bakker , et al. October 9, 2	2007-10-09
Radiation source App 20070152175 - Moors; Johannes Hubertus Josephina ; et al.	2007-07-05
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,208,746 - Koshelev , et al. April 24, 2	2007-04-24
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby App 20070069159 - Banine; Vadim Yevgenyevich ; et al.	2007-03-29
Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus App 20070062557 - Rakhimova; Tatyana Victorovna ; et al.	2007-03-22
Lithographic apparatus, radiation system and device manufacturing method App 20070001126 - Gayazov; Robert Rafilevitch ; et al.	2007-01-04
Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation Grant 7,135,692 - Ivanov , et al. November 14, 2	2006-11-14
Lithographic apparatus and device manufacturing method App 20060219950 - Bakker; Levinus Pieter ; et al.	2006-10-05
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby Grant 7,061,574 - Bakker , et al. June 13, 2	2006-06-13
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby App 20060071180 - Koshelev; Konstantin Nikolaevitch ; et al.	2006-04-06
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby App 20060011864 - Koshelev; Konstantin Nikolaevitch ; et al.	2006-01-19
Radiation source, lithographic apparatus, and device manufacturing method App 20050253092 - Zukavishvili, Givi Georgievitch ; et al.	2005-11-17
Radiation source, lithographic apparatus, and device manufacturing method Grant 6,933,510 - Zukavishvili , et al. August 23, 2	2005-08-23
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby App 20050122491 - Bakker, Levinus Pieter ; et al.	2005-06-09
Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation App 20050121624 - Ivanov, Vladimir Vitalevitch ; et al.	2005-06-09
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby Grant 6,862,075 - Koster , et al. March 1, 2	2005-03-01
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,818,912 - Koshelev , et al. November 16, 2	2004-11-16
Radiation source, lithographic apparatus, and device manufacturing method App 20040141165 - Zukavishvili, Givi Georgievitch ; et al.	2004-07-22
Radiation source, lithographic apparatus and device manufacturing method App 20040105082 - Koshelev, Konstantin Nikolaevitch ; et al.	2004-06-03
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040089819 - Koshelev, Konstantin Nikolaevitch ; et al.	2004-05-13
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby App 20040032574 - Koster, Norbertus Benedictus ; et al.	2004-02-19
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,667,484 - Koshelev , et al. December 23, 2	2003-12-23
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby Grant 6,614,505 - Koster , et al. September 2, 2	2003-09-02
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby App 20020154279 - Koster, Norbertus Benedictus ; et al.	2002-10-24
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020021430 - Koshelev, Konstantin Nikolaevitch ; et al.	2002-02-21

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