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Patent applications and USPTO patent grants for KOSCHE; Serge.The latest application filed is for "substrate processing system including dual ion filter for downstream plasma".
Patent | Date |
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Substrate Processing System Including Dual Ion Filter For Downstream Plasma App 20220076924 - BRAVO; Andrew Stratton ;   et al. | 2022-03-10 |
Systems And Methods For Plasma-less De-halogenation App 20190051540 - Zhu; Ji ;   et al. | 2019-02-14 |
Gas distribution device with actively cooled grid Grant 9,679,749 - Angelov , et al. June 13, 2 | 2017-06-13 |
Gas Distribution Device With Actively Cooled Grid App 20160093472 - Angelov; Ivelin ;   et al. | 2016-03-31 |
Partial Contact Wafer Retaining Ring Apparatus App 20100120335 - Fang; Haoquan ;   et al. | 2010-05-13 |
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