Korovin; Nikolay

Patent Applications and Registrations

Patent applications and USPTO patent grants for Korovin; Nikolay.The latest application filed is for "integrated pressure control system for workpiece carrier".

Company Profile

0.4.7

Korovin; Nikolay - Phoenix AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and apparatuses for conditioning polishing surfaces utilized during CMP processing Grant 6,953,382 - Korovin , et al. October 11, 2	2005-10-11
Method for controlling a chemical mechanical polishing (CMP) operation Grant 6,932,671 - Korovin , et al. August 23, 2	2005-08-23
Integrated Pressure Control System For Workpiece Carrier App 20050070205 - Korovin, Nikolay ; et al.	2005-03-31
Method for processing a work piece in a multi-zonal processing apparatus Grant 6,790,123 - Korovin , et al. September 14, 2	2004-09-14
Method for processing a work piece in a multi-zonal processing apparatus App 20030216104 - Korovin, Nikolay ; et al.	2003-11-20
Front-reference carrier on orbital solid platen App 20030077986 - Schultz, Stephen C. ; et al.	2003-04-24
Method to mathematically characterize a multizone carrier Grant 6,468,131 - Korovin October 22, 2	2002-10-22
Method and apparatus for electrochemically depositing a material onto a workpiece surface App 20020148732 - Emesh, Ismail ; et al.	2002-10-17
Method and apparatus for electrochemical planarization of a workpiece App 20020108861 - Emesh, Ismail ; et al.	2002-08-15
Multi-zone pressure control carrier App 20020094759 - Korovin, Nikolay	2002-07-18
Process for monitoring a process, planarizing a surface, and for quantifying the results of a planarization process App 20020086531 - Korovin, Nikolay	2002-07-04

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