Korenaga; Nobushige

Patent Applications and Registrations

Patent applications and USPTO patent grants for Korenaga; Nobushige.The latest application filed is for "positioning apparatus, lithography apparatus, and method of manufacturing article".

Company Profile

0.56.51

Korenaga; Nobushige - Utsunomiya JP
Korenaga; Nobushige - Utsunomiya-shi JP
Korenaga; Nobushige - Tochigi JP
Korenaga, Nobushige - Tochigi-ken JP
Korenaga; Nobushige - Sagamihara JP
Korenaga; Nobushige - Atsugi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Positioning apparatus, lithography apparatus, and method of manufacturing article Grant 9,977,347 - Suzuki , et al. May 22, 2	2018-05-22
Lithography apparatus, and method of manufacturing an article Grant 9,947,508 - Iwase , et al. April 17, 2	2018-04-17
Lithography apparatus, stage apparatus, and method of manufacturing articles Grant 9,823,587 - Kimura , et al. November 21, 2	2017-11-21
Positioning Apparatus, Lithography Apparatus, And Method Of Manufacturing Article App 20170329237 - Suzuki; Kentaro ; et al.	2017-11-16
Lithography apparatus, and method of manufacturing article Grant 9,547,242 - Ito , et al. January 17, 2	2017-01-17
Guide apparatus, exposure apparatus, and method of manufacturing article Grant 9,373,532 - Morohashi , et al. June 21, 2	2016-06-21
Processing apparatus and article manufacturing method using same Grant 9,310,688 - Iwase , et al. April 12, 2	2016-04-12
Stage apparatus with flexible utility line, lithography apparatus, and article manufacturing method Grant 9,280,068 - Morohashi , et al. March 8, 2	2016-03-08
Stage apparatus, lithography apparatus and method of manufacturing article Grant 9,280,066 - Kii , et al. March 8, 2	2016-03-08
Stage Apparatus, Lithography Apparatus, And Articles Manufacturing Method App 20150364292 - Ishikawa; Tomonori ; et al.	2015-12-17
Moving Apparatus And Charged Particle Beam Drawing System App 20150348744 - Uchida; Shinji ; et al.	2015-12-03
Lithography Apparatus, And Method Of Manufacturing An Article App 20150318145 - Iwase; Daisuke ; et al.	2015-11-05
Lithography Apparatus, Stage Apparatus, And Method Of Manufacturing Articles App 20150277229 - Kimura; Tadashi ; et al.	2015-10-01
Driving apparatus, exposure apparatus, and method of manufacturing article Grant 9,124,151 - Morohashi , et al. September 1, 2	2015-09-01
Lithography Apparatus, And Method Of Manufacturing Article App 20150219447 - ITO; Atsushi ; et al.	2015-08-06
Lithography Apparatus, And Method Of Manufacturing Article App 20150219998 - Ito; Atsushi ; et al.	2015-08-06
Drawing Apparatus And Method Of Manufacturing Article App 20150187540 - Ito; Atsushi ; et al.	2015-07-02
Stage Apparatus, Lithography Apparatus And Method Of Manufacturing Article App 20150029484 - KII; Hiroshi ; et al.	2015-01-29
Imprint apparatus for forming a pattern of a resin on a substrate using a mold Grant 8,834,769 - Korenaga September 16, 2	2014-09-16
Exposure apparatus and article manufacturing method Grant 8,810,770 - Maehara , et al. August 19, 2	2014-08-19
Stage Apparatus, Lithography Apparatus, And Article Manufacturing Method App 20140118710 - Morohashi; Akira ; et al.	2014-05-01
Processing Apparatus And Article Manufacturing Method Using Same App 20140111780 - Iwase; Daisuke ; et al.	2014-04-24
Stage Apparatus, Lithography Apparatus, And Method Of Manufacturing Article App 20140036249 - Kii; Hiroshi ; et al.	2014-02-06
Imprint apparatus and method for producing article Grant 8,562,323 - Ito , et al. October 22, 2	2013-10-22
Driving Apparatus, Exposure Apparatus, And Method Of Manufacturing Article App 20130271743 - MOROHASHI; Akira ; et al.	2013-10-17
Guide Apparatus, Exposure Apparatus, And Method Of Manufacturing Article App 20130273477 - Morohashi; Akira ; et al.	2013-10-17
Drawing Apparatus, And Method Of Manufacturing Article App 20130171570 - Sentoku; Koichi ; et al.	2013-07-04
Charged particle beam drawing apparatus and article manufacturing method Grant 8,476,607 - Ishikawa , et al. July 2, 2	2013-07-02
Charged Particle Beam Drawing Apparatus And Article Manufacturing Method App 20130011797 - Ishikawa; Tomonori ; et al.	2013-01-10
Exposure Apparatus And Article Manufacturing Method App 20110310366 - Maehara; Yuji ; et al.	2011-12-22
Imprint Apparatus And Method For Producing Article App 20110159189 - Ito; Hirohito ; et al.	2011-06-30
Imprint Apparatus And Manufacturing Method Of Commodities App 20110084423 - KORENAGA; Nobushige	2011-04-14
Aligning apparatus including an attraction preventing plate provided between permanent magnet and magnetic member Grant 7,547,998 - Korenaga June 16, 2	2009-06-16
Driving apparatus, exposure apparatus, and device manufacturing method Grant 7,508,099 - Korenaga March 24, 2	2009-03-24
Anti-vibration technique Grant 7,383,929 - Korenaga June 10, 2	2008-06-10
Linear motor, moving stage system, exposure apparatus, and device manufacturing method Grant 7,348,695 - Korenaga , et al. March 25, 2	2008-03-25
Exposure apparatus and device manufacturing method Grant 7,307,692 - Korenaga , et al. December 11, 2	2007-12-11
Driving Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20070267920 - KORENAGA; Nobushige	2007-11-22
Stage apparatus, exposure apparatus, and device manufacturing method Grant 7,282,819 - Korenaga October 16, 2	2007-10-16
Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device Grant 7,280,185 - Korenaga October 9, 2	2007-10-09
Alignment Apparatus And Exposure Apparatus Using The Same App 20070228844 - KORENAGA; Nobushige	2007-10-04
Alignment apparatus and exposure apparatus using the same Grant 7,227,284 - Korenaga June 5, 2	2007-06-05
Alignment apparatus and exposure apparatus using the same App 20060214519 - Korenaga; Nobushige	2006-09-28
Aligning apparatus, exposure apparatus, and device manufacturing method App 20060202568 - Korenaga; Nobushige	2006-09-14
Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device App 20060187439 - Korenaga; Nobushige	2006-08-24
Alignment apparatus and exposure apparatus using the same Grant 7,075,198 - Korenaga July 11, 2	2006-07-11
Aligning apparatus, exposure apparatus, and device manufacturing method Grant 7,075,197 - Korenaga July 11, 2	2006-07-11
Linear motor, moving stage system, exposure apparatus, and device manufacturing method Grant 7,067,942 - Korenaga , et al. June 27, 2	2006-06-27
Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device Grant 7,057,710 - Korenaga June 6, 2	2006-06-06
Linear motor, moving stage system, exposure apparatus, and device manufacturing method App 20060082225 - Korenaga; Nobushige ; et al.	2006-04-20
Stage system, exposure apparatus, and device manufacturing method App 20060082755 - Akutsu; Kotaro ; et al.	2006-04-20
Stage system, exposure apparatus, and device manufacturing method Grant 7,030,964 - Akutsu , et al. April 18, 2	2006-04-18
Alignment apparatus and exposure apparatus using the same Grant 6,987,335 - Korenaga January 17, 2	2006-01-17
Supporting system in exposure apparatus App 20050270517 - Korenaga, Nobushige	2005-12-08
Alignment apparatus and exposure apparatus using the same App 20050248219 - Korenaga, Nobushige	2005-11-10
Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus Grant 6,954,041 - Korenaga October 11, 2	2005-10-11
Exposure apparatus and device manufacturing method App 20050219486 - Korenaga, Nobushige ; et al.	2005-10-06
Alignment apparatus, exposure apparatus, and device manufacturing method App 20050218335 - Kimura, Atsushi ; et al.	2005-10-06
Supporting system in exposure apparatus Grant 6,952,254 - Korenaga October 4, 2	2005-10-04
Stage apparatus and method of controlling the same Grant 6,946,757 - Korenaga September 20, 2	2005-09-20
Aligning apparatus, exposure apparatus, and device manufacturing method App 20050194843 - Korenaga, Nobushige	2005-09-08
Positioning apparatus, charged-particle-beam exposure apparatus, and device manufacturing method Grant 6,917,046 - Korenaga July 12, 2	2005-07-12
Stage apparatus, exposure apparatus, and device manufacturing method App 20050140215 - Korenaga, Nobushige	2005-06-30
Moving stage device in exposure apparatus Grant 6,903,468 - Korenaga June 7, 2	2005-06-07
Stage apparatus and method of driving the same Grant 6,873,404 - Korenaga March 29, 2	2005-03-29
Linear motor, stage apparatus, and exposure apparatus Grant 6,864,602 - Korenaga March 8, 2	2005-03-08
Stage system Grant 6,859,257 - Korenaga February 22, 2	2005-02-22
Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device App 20050024621 - Korenaga, Nobushige	2005-02-03
Stage system, exposure apparatus, and device manufacturing method App 20050018166 - Akutsu, Kotaro ; et al.	2005-01-27
Linear motor, moving stage system, exposure apparatus, and device manufacturing method App 20040207271 - Korenaga, Nobushige ; et al.	2004-10-21
Moving-magnet linear motor, aligner and apparatus provided therewith, and method for manufacturing devices using the same Grant 6,791,214 - Korenaga September 14, 2	2004-09-14
Anti-vibration technique App 20040164470 - Korenaga, Nobushige	2004-08-26
Alignment apparatus and exposure apparatus using the same App 20040126907 - Korenaga, Nobushige	2004-07-01
Stage apparatus and method of controlling the same App 20040100153 - Korenaga, Nobushige	2004-05-27
Moving stage device in exposure apparatus App 20040095563 - Korenaga, Nobushige	2004-05-20
Supporting system in exposure apparatus App 20040046952 - Korenaga, Nobushige	2004-03-11
Positioning apparatus, charged-particle-beam exposure apparatus, and device manufacturing method App 20040041103 - Korenaga, Nobushige	2004-03-04
Supporting system in exposure apparatus Grant 6,665,053 - Korenaga December 16, 2	2003-12-16
Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus App 20030217694 - Korenaga, Nobushige	2003-11-27
Stage system App 20030179359 - Korenaga, Nobushige	2003-09-25
Moving-magnet linear motor, aligner and apparatus provided therewith, and method for manufacturing devices using the same App 20030117026 - Korenaga, Nobushige	2003-06-26
Linear motor, stage apparatus, and exposure apparatus App 20030102723 - Korenaga, Nobushige	2003-06-05
Stage system and stage driving method for use in exposure apparatus App 20030098966 - Korenaga, Nobushige ; et al.	2003-05-29
Stage system and stage driving method for use in exposure apparatus Grant 6,570,645 - Korenaga , et al. May 27, 2	2003-05-27
Stage apparatus and method of driving the same App 20030007140 - Korenaga, Nobushige	2003-01-09
Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stage Grant 6,479,991 - Korenaga November 12, 2	2002-11-12
Stage System And Stage Driving Method For Use In Exposure Apparatus App 20020145721 - KORENAGA, NOBUSHIGE ; et al.	2002-10-10
Stage apparatus, and exposure apparatus and device manufacturing method using the same Grant 6,414,742 - Korenaga , et al. July 2, 2	2002-07-02
Stage apparatus, exposure apparatus using the same, and a device manufacturing method Grant 6,359,677 - Itoh , et al. March 19, 2	2002-03-19
Stage Apparatus, And Exposure Apparatus And Device Manufacturing Method Using The Same App 20020021423 - KORENAGA, NOBUSHIGE ; et al.	2002-02-21
Stage system and exposure apparatus, and device manufacturing method using the same Grant 6,320,645 - Inoue , et al. November 20, 2	2001-11-20
Supporting system in exposure apparatus App 20010031191 - Korenaga, Nobushige	2001-10-18
Stage Apparatus, Exposure Apparatus Using The Same, And A Device Manufacturing Method App 20010013927 - ITOH, HIROSHI ; et al.	2001-08-16
Linear motor coil for exposure apparatus Grant 6,265,793 - Korenaga July 24, 2	2001-07-24
Stage device and exposure apparatus using the same Grant 6,177,978 - Korenaga January 23, 2	2001-01-23
Scanning exposure apparatus and device manufacturing method using the same Grant 6,172,738 - Korenaga , et al. January 9, 2	2001-01-09
Linear motor mechanism for exposure apparatus, and device manufacturing method using the same Grant 6,107,703 - Korenaga August 22, 2	2000-08-22
Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus Grant 6,037,680 - Korenaga , et al. March 14, 2	2000-03-14
Stage device, exposure apparatus using the same, and device production method Grant 6,002,465 - Korenaga December 14, 1	1999-12-14
Substrate, and method and apparatus for holding the substrate Grant 5,681,638 - Korenaga October 28, 1	1997-10-28
Movable stage mechanism and exposure apparatus using the same Grant 5,537,186 - Korenaga , et al. July 16, 1	1996-07-16
Support device Grant 5,467,720 - Korenaga , et al. November 21, 1	1995-11-21
Radiation gauge Grant 5,050,196 - Kadosawa , et al. September 17, 1	1991-09-17

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