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Method and devices for determining metrology sites
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Systems And Methods For Detecting Discrepancy In A Combustion System
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Contact Area Size Determination Between 3d Structures In An Integrated Semiconductor Sample
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Automatic Air-flow Settings In Combustion Systems And Associated Methods
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FIB-SEM 3D Tomography for measuring shape deviations of HAR structures
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Method For Non-destructive Inspection Of A Structure And Corresponding System
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Cross Section Imaging With Improved 3d Volume Image Reconstruction Accuracy
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Interactive And Iterative Training Of A Classification Algorithm For Classifying Anomalies In Imaging Datasets
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Processing Image Data Sets
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Method Of Recording An Image Using A Particle Microscope
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Root Cause Analysis For Fabrication Processes Of Semiconductor Structures
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Multi-scanning electron microscopy for wafer alignment
Grant 10,901,391 - Saraswatula , et al. January 26, 2 | 2021-01-26 |
Methods And Systems For Defining A Process Window
App 20200402863 - Saraswatula; Jagdish Chandra ; et al. | 2020-12-24 |
Method And Devices For Determining Metrology Sites
App 20200285976 - Srikantha; Abhilash ; et al. | 2020-09-10 |
Error Reduction In Images Which Were Generated With Charged Particles And With The Aid Of Machine-learning-based Methods
App 20200258212 - A1 | 2020-08-13 |
Method For Characterising At Least One Optical Component Of A Projection Exposure Apparatus
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Low Nox And Co Combustion Burner Method And Apparatus
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Illumination system of a microlithographic projection device and method for operating such a system
Grant 10,539,883 - Deguenther , et al. Ja | 2020-01-21 |
Method of operating a microlithographic projection apparatus and illumination system of such an apparatus
Grant 10,444,631 - Deguenther , et al. Oc | 2019-10-15 |
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system
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Illumination System Of A Microlithographic Projection Device And Method For Operating Such A System
App 20180284622 - Deguenther; Markus ; et al. | 2018-10-04 |
Beam distributing optical device and associated unit, system and apparatus
Grant 10,061,203 - Deguenther , et al. August 28, 2 | 2018-08-28 |
Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unit
Grant 10,042,248 - Degunther , et al. August 7, 2 | 2018-08-07 |
Method Of Operating A Microlithographic Projection Apparatus And Illumination System Of Such An Apparatus
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Optical system of a microlithographic projection exposure apparatus
Grant 10,012,907 - Deguenther , et al. July 3, 2 | 2018-07-03 |
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system
Grant 9,977,334 - Deguenther , et al. May 22, 2 | 2018-05-22 |
Lighting System Of A Microlithographic Projection Exposure System And Method For Operating Such A Lighting System
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Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
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Lighting system of a microlithographic projection exposure system and method for operating such a lighting system
Grant 9,910,360 - Deguenther , et al. March 6, 2 | 2018-03-06 |
Illumination system of a microlithographic projection exposure apparatus
Grant 9,910,359 - Deguenther , et al. March 6, 2 | 2018-03-06 |
Optical System Of A Microlithographic Projection Exposure Apparatus
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Beam Distributing Optical Device And Associated Unit, System And Apparatus
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Lighting System Of A Microlithographic Projection Exposure System And Method For Operating Such A Lighting System
App 20160357113 - Deguenther; Markus ; et al. | 2016-12-08 |
Lighting System Of A Microlithographic Projection Exposure System And Method For Operating Such A Lighting System
App 20160349624 - Deguenther; Markus ; et al. | 2016-12-01 |
Illumination system of a microlithographic projection exposure apparatus
Grant 9,500,954 - Deguenther , et al. November 22, 2 | 2016-11-22 |
Substrate Coated With A Noise-optimized Glass-based Coating And Method Of Producing Such A Coating
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Illumination System Of A Microlithographic Projection Exposure Apparatus
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Illumination system of a microlithographic projection exposure apparatus
Grant 9,310,690 - Deguenther , et al. April 12, 2 | 2016-04-12 |
Illumination Optical Unit For A Mask Inspection System And Mask Inspection System With Such An Illumination Optical Unit
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Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20150146184 - Deguenther; Markus ; et al. | 2015-05-28 |
Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20150146183 - Deguenther; Markus ; et al. | 2015-05-28 |
Method for measuring an optical system
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Method For Measuring An Optical System
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Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method
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