KOPPA; Manjunatha
Patent Applications and Registrations
Patent applications and USPTO patent grants for KOPPA; Manjunatha.The latest application filed is for "gas distribution ceramic heater for deposition chamber".
- KOPPA; Manjunatha - Bengaluru IN
- Koppa; Manjunatha - Bangalore IN
- Koppa; Manjunatha - Karnataka IN
| Patent | Date |
|---|---|
| Gas Distribution Ceramic Heater For Deposition Chamber App 20210176831 - LEI; Pingyan ; et al. | 2021-06-10 |
| High Temperature Dual Chamber Showerhead App 20210130956 - LEI; Pingyan ; et al. | 2021-05-06 |
| Lift pin assembly Grant 10,892,180 - Chia , et al. January 12, 2 | 2021-01-12 |
| Apparatus to improve substrate temperature uniformity Grant 10,711,348 - Tsai , et al. | 2020-07-14 |
| Quick disconnect resistance temperature detector assembly for rotating pedestal Grant 10,704,142 - Mustafa , et al. | 2020-07-07 |
| Batch processing apparatus Grant 10,373,860 - Sundararajan , et al. | 2019-08-06 |
| Quick Disconnect Resistance Temperature Detector Assembly For Rotating Pedestal App 20190032210 - MUSTAFA; Muhannad ; et al. | 2019-01-31 |
| Dual PVD Chamber And Hybrid PVD-CVD Chambers App 20180197760 - Jadhav; Deepak ; et al. | 2018-07-12 |
| Electrostatic chuck design for high temperature RF applications Grant 9,984,911 - Hanson , et al. May 29, 2 | 2018-05-29 |
| Substrate support with multiple heating zones Grant 9,888,528 - Matsushita , et al. February 6, 2 | 2018-02-06 |
| Pad design for electrostatic chuck surface Grant 9,613,846 - Raj , et al. April 4, 2 | 2017-04-04 |
| Batch Processing Apparatus App 20170004982 - SUNDARARAJAN; Mukund ; et al. | 2017-01-05 |
| Apparatus To Improve Substrate Temperature Uniformity App 20160258061 - TSAI; CHENG-HSIUNG ; et al. | 2016-09-08 |
| Substrate Support With Multiple Heating Zones App 20160192444 - MATSUSHITA; TOMOHARU ; et al. | 2016-06-30 |
| Electrostatic Chuck Design For High Temperature Rf Applications App 20160172227 - HANSON; Ryan ; et al. | 2016-06-16 |
| Substrate Support With More Uniform Edge Purge App 20160002778 - RAVI; JALLEPALLY ; et al. | 2016-01-07 |
| Lift Pin Assembly App 20150348823 - CHIA; BONNIE T. ; et al. | 2015-12-03 |
| Pad Design For Electrostatic Chuck Surface App 20150146339 - RAJ; Govinda ; et al. | 2015-05-28 |
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