loadpatents
Patent applications and USPTO patent grants for Koparal; Erkan.The latest application filed is for "substrate processing system and method of processing substrates".
Patent | Date |
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Method and system for maintaining an edge exclusion shield Grant 9,640,372 - Lindenberg , et al. May 2, 2 | 2017-05-02 |
Coating apparatus and method Grant 9,211,563 - Koparal , et al. December 15, 2 | 2015-12-15 |
Substrate Processing System And Method Of Processing Substrates App 20150348811 - GRAW; Oliver ;   et al. | 2015-12-03 |
Method And System For Maintaining An Edge Exclusion Shield App 20150303041 - LINDENBERG; Ralph ;   et al. | 2015-10-22 |
Coating Apparatus And Method App 20140044880 - Koparal; Erkan ;   et al. | 2014-02-13 |
System For Utilization Improvement Of Process Chambers And Method Of Operating Thereof App 20120213938 - KOPARAL; Erkan | 2012-08-23 |
Processing System And Method Of Operating A Processing System App 20110299961 - Lindenberg; Ralph ;   et al. | 2011-12-08 |
Processing System And Method Of Operating A Processing System App 20090324368 - Koparal; Erkan ;   et al. | 2009-12-31 |
Coating System And Method For Coating A Substrate App 20090304907 - Koparal; Erkan | 2009-12-10 |
Vertically Mounted Rotary Cathodes In Sputtering System On Elevated Rails App 20080127887 - Leung; Samuel ;   et al. | 2008-06-05 |
Machine for treating substrates and method App 20070144889 - Koparal; Erkan ;   et al. | 2007-06-28 |
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