Koosau; Denis M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Koosau; Denis M..The latest application filed is for "apparatus and method for controlling edge ring variation".
- Koosau; Denis M. - Pleasanton CA
- Koosau; Denis M. - Hayward CA US
| Patent | Date |
|---|---|
| Wafer edge ring lifting solution Grant 11,393,710 - Rice , et al. July 19, 2 | 2022-07-19 |
| Apparatus And Method For Controlling Edge Ring Variation App 20210254957 - GHANTASALA; Sathyendra ; et al. | 2021-08-19 |
| Movable and removable process kit Grant 11,043,400 - Schmid , et al. June 22, 2 | 2021-06-22 |
| Adjustable extended electrode for edge uniformity control Grant 10,991,556 - Luere , et al. April 27, 2 | 2021-04-27 |
| Sensors And System For In-situ Edge Ring Erosion Monitor App 20200335368 - PAN; Yaoling ; et al. | 2020-10-22 |
| Movable And Removable Process Kit App 20200234981 - SCHMID; Andreas ; et al. | 2020-07-23 |
| Adjustable Extended Electrode For Edge Uniformity Control App 20200118798 - LUERE; Olivier ; et al. | 2020-04-16 |
| Cooling base with spiral channels for ESC Grant 10,586,718 - Knyazik , et al. | 2020-03-10 |
| Adjustable extended electrode for edge uniformity control Grant 10,553,404 - Luere , et al. Fe | 2020-02-04 |
| Calibration Jig And Calibration Method App 20190385880 - MYLES; Andrew ; et al. | 2019-12-19 |
| Adjustable extended electrode for edge uniformity control Grant 10,504,702 - Luere , et al. Dec | 2019-12-10 |
| Processing With Powered Edge Ring App 20190228952 - DORF; Leonid ; et al. | 2019-07-25 |
| Adjustable Extended Electrode For Edge Uniformity Control App 20180315583 - LUERE; Olivier ; et al. | 2018-11-01 |
| Adjustable extended electrode for edge uniformity control Grant 10,103,010 - Luere , et al. October 16, 2 | 2018-10-16 |
| Adjustable Extended Electrode For Edge Uniformity Control App 20180233334 - LUERE; Olivier ; et al. | 2018-08-16 |
| Adjustable Extended Electrode For Edge Uniformity Control App 20180218933 - LUERE; Olivier ; et al. | 2018-08-02 |
| Adjustable extended electrode for edge uniformity control Grant 9,947,517 - Luere , et al. April 17, 2 | 2018-04-17 |
| Wafer Edge Ring Lifting Solution App 20170213758 - RICE; Michael R. ; et al. | 2017-07-27 |
| Cooling Base With Spiral Channels For Esc App 20170133244 - KNYAZIK; Vladimir ; et al. | 2017-05-11 |
| Polishing head zone boundary smoothing Grant 9,050,699 - Chen , et al. June 9, 2 | 2015-06-09 |
| Sensors in Carrier Head of a CMP System App 20140020829 - Chen; Hung Chih ; et al. | 2014-01-23 |
| Apparatus and method for temperature control during polishing Grant 8,591,286 - Chen , et al. November 26, 2 | 2013-11-26 |
| Polishing head zone boundary smoothing Grant 8,460,067 - Chen , et al. June 11, 2 | 2013-06-11 |
| Apparatus And Method For Temperature Control During Polishing App 20120040592 - CHEN; HUNG CHIH ; et al. | 2012-02-16 |
| Substrate Holder To Reduce Substrate Edge Stress During Chemical Mechanical Polishing App 20120021673 - Chen; Hung Chih ; et al. | 2012-01-26 |
| Polishing Head Zone Boundary Smoothing App 20100291842 - CHEN; HUNG CHIH ; et al. | 2010-11-18 |
| Method and apparatus for controlling temperature of a substrate Grant 7,436,645 - Holland , et al. October 14, 2 | 2008-10-14 |
| Method And Apparatus For Controlling Temperature Of A Substrate App 20070139856 - Holland; John ; et al. | 2007-06-21 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 