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Patent applications and USPTO patent grants for Kools; Jacques.The latest application filed is for "source-collector modules for euv lithography employing a gic mirror and a lpp source".
Patent | Date |
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Source-collector modules for EUV lithography employing a GIC mirror and a LPP source Grant 8,895,946 - Ceglio , et al. November 25, 2 | 2014-11-25 |
EUV mirror module with a nickel electroformed curved mirror Grant 8,810,775 - Kools August 19, 2 | 2014-08-19 |
Source-collector modules for EUV lithography employing a GIC mirror and a LPP source App 20130207004 - Ceglio; Natale M. ;   et al. | 2013-08-15 |
Adjustable clips for grazing-incidence collectors Grant 8,276,866 - Pirovano , et al. October 2, 2 | 2012-10-02 |
Zone-optimized mirrors and optical systems using same Grant 8,050,380 - Zocchi , et al. November 1, 2 | 2011-11-01 |
EUV mirror module App 20110255068 - Kools; Jacques | 2011-10-20 |
Adjustable clips for grazing-incidence collectors App 20110216395 - Pirovano; Giorgio ;   et al. | 2011-09-08 |
Zone-optimized mirrors and optical systems using same App 20100284511 - Zocchi; Fabio ;   et al. | 2010-11-11 |
Dual collimated deposition apparatus and method of use Grant 6,592,728 - Paranjpe , et al. July 15, 2 | 2003-07-15 |
Dual collimated deposition apparatus and method of use Grant 6,572,744 - Paranjpe , et al. June 3, 2 | 2003-06-03 |
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