Koolen; Armand Eugene Albert

Patent Applications and Registrations

Patent applications and USPTO patent grants for Koolen; Armand Eugene Albert.The latest application filed is for "metrology system and method for determining a characteristic of one or more structures on a substrate".

Company Profile

13.30.28

Koolen; Armand Eugene Albert - Nuth NL
Koolen; Armand Eugene Albert - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Metrology system and method for determining a characteristic of one or more structures on a substrate Grant 11,415,900 - Tinnemans , et al. August 16, 2	2022-08-16
Method of measuring a parameter of a patterning process, metrology apparatus, target Grant 11,150,563 - Sokolov , et al. October 19, 2	2021-10-19
Method of measuring a parameter of a lithographic process, metrology apparatus Grant 11,099,489 - Cramer , et al. August 24, 2	2021-08-24
Method and apparatus for measuring a parameter of interest using image plane detection techniques Grant 10,983,445 - Pandey , et al. April 20, 2	2021-04-20
Metrology apparatus, lithographic system, and method of measuring a structure Grant 10,895,812 - Pandey , et al. January 19, 2	2021-01-19
Metrology System and Method For Determining a Characteristic of one or More Structures on a Substrate App 20210003924 - TINNEMANS; Patricius Aloysius Jacobus ; et al.	2021-01-07
Metrology method and device Grant 10,866,526 - Shmarev , et al. December 15, 2	2020-12-15
Variable corrector of a wave front Grant 10,852,247 - Smirnov , et al. December 1, 2	2020-12-01
Metrology system and method for determining a characteristic of one or more structures on a substrate Grant 10,816,909 - Tinnemans , et al. October 27, 2	2020-10-27
Metrology method and apparatus, computer program and lithographic system Grant 10,788,757 - Cheng , et al. September 29, 2	2020-09-29
Method Of Measuring A Parameter Of A Patterning Process, Metrology Apparatus, Target App 20200192230 - SOKOLOV; Sergei ; et al.	2020-06-18
Method of Measuring a Parameter of a Lithographic Process, Metrology Apparatus App 20200192231 - CRAMER; Hugo Augustinus Joseph ; et al.	2020-06-18
Radiation receiving system Grant 10,678,145 - Polo , et al.	2020-06-09
Metrology apparatus, method of measuring a structure, device manufacturing method Grant 10,599,048 - Tarabrin , et al.	2020-03-24
Metrology apparatus, lithographic system, and method of measuring a structure Grant 10,599,047 - Ravensbergen , et al.	2020-03-24
Metrology method, apparatus and computer program Grant 10,598,483 - Tarabrin , et al.	2020-03-24
Focus control arrangement and method Grant 10,551,308 - Jak , et al. Fe	2020-02-04
Beam homogenizer, illumination system and metrology system Grant 10,495,889 - Eurlings , et al. De	2019-12-03
Metrology Method and Apparatus, Computer Program and Lithographic System App 20190317413 - CHENG; Su-Ting ; et al.	2019-10-17
Metrology method and apparatus, computer program and lithographic system Grant 10,423,077 - Pandey , et al. Sept	2019-09-24
Method for monitoring a characteristic of illumination from a metrology apparatus Grant 10,317,805 - Schmetz-Schagen , et al.	2019-06-11
Metrology Method and Apparatus, Computer Program and Lithographic System App 20190146356 - Pandey; Nitesh ; et al.	2019-05-16
Metrology Apparatus, Method of Measuring a Structure, Device Manufacturing Method App 20190129315 - Tarabrin; Sergey ; et al.	2019-05-02
Metrology System and Method For Determining a Characteristic of One or More Structures on a Substrate App 20190107781 - TINNEMANS; Patricius Aloysius Jacobus ; et al.	2019-04-11
Metrology Method And Device App 20190094702 - Shmarev; Yevgeniy Konstantinovich ; et al.	2019-03-28
Metrology method and apparatus, computer program and lithographic system Grant 10,191,391 - Pandey , et al. Ja	2019-01-29
Metrology Apparatus, Lithographic System, And Method Of Measuring A Structure App 20180348645 - Ravensbergen; Janneke ; et al.	2018-12-06
Method and device for focusing in an inspection system Grant 10,107,761 - Shmarev , et al. October 23, 2	2018-10-23
Radiation Receiving System App 20180292757 - POLO; Alessandro ; et al.	2018-10-11
Metrology Apparatus, Lithographic System, and Method of Measuring a Structure App 20180173111 - Pandey; Nitesh ; et al.	2018-06-21
Method for Monitoring a Characteristic of Illumination From a Metrology Apparatus App 20180173113 - SCHMETZ-SCHAGEN; Jolanda Theodora Josephina ; et al.	2018-06-21
Metrology Method, Apparatus and Computer Program App 20180073866 - Tarabrin; Sergey ; et al.	2018-03-15
Variable Corrector Of A Wave Front App 20180045657 - SMIRNOV; Stanislav ; et al.	2018-02-15
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,811,003 - Jak , et al. November 7, 2	2017-11-07
Beam Homogenizer, Illumination System and Metrology System App 20170248794 - EURLINGS; Markus Franciscus Antonius ; et al.	2017-08-31
Method And Device For Focusing In An Inspection System App 20170191944 - SHMAREV; Yevgeniy Konstantinovich ; et al.	2017-07-06
Focus Control Arrangement And Method App 20170176328 - JAK; Martin Jacobus Johan ; et al.	2017-06-22
Metrology Method and Apparatus, Computer Program and Lithographic System App 20170097575 - PANDEY; Nitesh ; et al.	2017-04-06
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20170068173 - JAK; Martin Jacobus Johan ; et al.	2017-03-09
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,535,338 - Jak , et al. January 3, 2	2017-01-03
Metrology method and apparatus, and device manufacturing method Grant 9,158,194 - Koolen , et al. October 13, 2	2015-10-13
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20150138523 - Jak; Martin Jacobus Johan ; et al.	2015-05-21
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 8,497,975 - De Wit , et al. July 30, 2	2013-07-30
Metrology Method and Apparatus, and Device Manufacturing Method App 20130100427 - KOOLEN; Armand Eugene Albert ; et al.	2013-04-25
Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate Grant 8,411,287 - Smilde , et al. April 2, 2	2013-04-02
Metrology Method and Apparatus, Lithographic Apparatus, Device Manufacturing Method and Substrate App 20110043791 - Smilde; Hendrik Jan Hidde ; et al.	2011-02-24
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20100315613 - DE WIT; Johannes Matheus Marie ; et al.	2010-12-16
Method of determining an illumination profile and device manufacturing method Grant 7,425,397 - Finders , et al. September 16, 2	2008-09-16
Method of determining an illumination profile and device manufacturing method App 20070059614 - Finders; Jozef Maria ; et al.	2007-03-15
Method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby Grant 7,026,082 - Eurlings , et al. April 11, 2	2006-04-11
Lithographic apparatus and device manufacturing method Grant 6,958,806 - Mulder , et al. October 25, 2	2005-10-25
Lithographic apparatus and device manufacturing method App 20040257547 - Koolen, Armand Eugene Albert ; et al.	2004-12-23
Method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby App 20040137343 - Eurlings, Markus Franciscus Antonius ; et al.	2004-07-15
Lithographic apparatus and device manufacturing method App 20040114123 - Mulder, Heine Melle ; et al.	2004-06-17

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