Patent | Date |
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Metrology system and method for determining a characteristic of one or more structures on a substrate Grant 11,415,900 - Tinnemans , et al. August 16, 2 | 2022-08-16 |
Method of measuring a parameter of a patterning process, metrology apparatus, target Grant 11,150,563 - Sokolov , et al. October 19, 2 | 2021-10-19 |
Method of measuring a parameter of a lithographic process, metrology apparatus Grant 11,099,489 - Cramer , et al. August 24, 2 | 2021-08-24 |
Method and apparatus for measuring a parameter of interest using image plane detection techniques Grant 10,983,445 - Pandey , et al. April 20, 2 | 2021-04-20 |
Metrology apparatus, lithographic system, and method of measuring a structure Grant 10,895,812 - Pandey , et al. January 19, 2 | 2021-01-19 |
Metrology System and Method For Determining a Characteristic of one or More Structures on a Substrate App 20210003924 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2021-01-07 |
Metrology method and device Grant 10,866,526 - Shmarev , et al. December 15, 2 | 2020-12-15 |
Variable corrector of a wave front Grant 10,852,247 - Smirnov , et al. December 1, 2 | 2020-12-01 |
Metrology system and method for determining a characteristic of one or more structures on a substrate Grant 10,816,909 - Tinnemans , et al. October 27, 2 | 2020-10-27 |
Metrology method and apparatus, computer program and lithographic system Grant 10,788,757 - Cheng , et al. September 29, 2 | 2020-09-29 |
Method Of Measuring A Parameter Of A Patterning Process, Metrology Apparatus, Target App 20200192230 - SOKOLOV; Sergei ;   et al. | 2020-06-18 |
Method of Measuring a Parameter of a Lithographic Process, Metrology Apparatus App 20200192231 - CRAMER; Hugo Augustinus Joseph ;   et al. | 2020-06-18 |
Radiation receiving system Grant 10,678,145 - Polo , et al. | 2020-06-09 |
Metrology apparatus, method of measuring a structure, device manufacturing method Grant 10,599,048 - Tarabrin , et al. | 2020-03-24 |
Metrology apparatus, lithographic system, and method of measuring a structure Grant 10,599,047 - Ravensbergen , et al. | 2020-03-24 |
Metrology method, apparatus and computer program Grant 10,598,483 - Tarabrin , et al. | 2020-03-24 |
Focus control arrangement and method Grant 10,551,308 - Jak , et al. Fe | 2020-02-04 |
Beam homogenizer, illumination system and metrology system Grant 10,495,889 - Eurlings , et al. De | 2019-12-03 |
Metrology Method and Apparatus, Computer Program and Lithographic System App 20190317413 - CHENG; Su-Ting ;   et al. | 2019-10-17 |
Metrology method and apparatus, computer program and lithographic system Grant 10,423,077 - Pandey , et al. Sept | 2019-09-24 |
Method for monitoring a characteristic of illumination from a metrology apparatus Grant 10,317,805 - Schmetz-Schagen , et al. | 2019-06-11 |
Metrology Method and Apparatus, Computer Program and Lithographic System App 20190146356 - Pandey; Nitesh ;   et al. | 2019-05-16 |
Metrology Apparatus, Method of Measuring a Structure, Device Manufacturing Method App 20190129315 - Tarabrin; Sergey ;   et al. | 2019-05-02 |
Metrology System and Method For Determining a Characteristic of One or More Structures on a Substrate App 20190107781 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2019-04-11 |
Metrology Method And Device App 20190094702 - Shmarev; Yevgeniy Konstantinovich ;   et al. | 2019-03-28 |
Metrology method and apparatus, computer program and lithographic system Grant 10,191,391 - Pandey , et al. Ja | 2019-01-29 |
Metrology Apparatus, Lithographic System, And Method Of Measuring A Structure App 20180348645 - Ravensbergen; Janneke ;   et al. | 2018-12-06 |
Method and device for focusing in an inspection system Grant 10,107,761 - Shmarev , et al. October 23, 2 | 2018-10-23 |
Radiation Receiving System App 20180292757 - POLO; Alessandro ;   et al. | 2018-10-11 |
Metrology Apparatus, Lithographic System, and Method of Measuring a Structure App 20180173111 - Pandey; Nitesh ;   et al. | 2018-06-21 |
Method for Monitoring a Characteristic of Illumination From a Metrology Apparatus App 20180173113 - SCHMETZ-SCHAGEN; Jolanda Theodora Josephina ;   et al. | 2018-06-21 |
Metrology Method, Apparatus and Computer Program App 20180073866 - Tarabrin; Sergey ;   et al. | 2018-03-15 |
Variable Corrector Of A Wave Front App 20180045657 - SMIRNOV; Stanislav ;   et al. | 2018-02-15 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,811,003 - Jak , et al. November 7, 2 | 2017-11-07 |
Beam Homogenizer, Illumination System and Metrology System App 20170248794 - EURLINGS; Markus Franciscus Antonius ;   et al. | 2017-08-31 |
Method And Device For Focusing In An Inspection System App 20170191944 - SHMAREV; Yevgeniy Konstantinovich ;   et al. | 2017-07-06 |
Focus Control Arrangement And Method App 20170176328 - JAK; Martin Jacobus Johan ;   et al. | 2017-06-22 |
Metrology Method and Apparatus, Computer Program and Lithographic System App 20170097575 - PANDEY; Nitesh ;   et al. | 2017-04-06 |
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20170068173 - JAK; Martin Jacobus Johan ;   et al. | 2017-03-09 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,535,338 - Jak , et al. January 3, 2 | 2017-01-03 |
Metrology method and apparatus, and device manufacturing method Grant 9,158,194 - Koolen , et al. October 13, 2 | 2015-10-13 |
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20150138523 - Jak; Martin Jacobus Johan ;   et al. | 2015-05-21 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 8,497,975 - De Wit , et al. July 30, 2 | 2013-07-30 |
Metrology Method and Apparatus, and Device Manufacturing Method App 20130100427 - KOOLEN; Armand Eugene Albert ;   et al. | 2013-04-25 |
Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate Grant 8,411,287 - Smilde , et al. April 2, 2 | 2013-04-02 |
Metrology Method and Apparatus, Lithographic Apparatus, Device Manufacturing Method and Substrate App 20110043791 - Smilde; Hendrik Jan Hidde ;   et al. | 2011-02-24 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20100315613 - DE WIT; Johannes Matheus Marie ;   et al. | 2010-12-16 |
Method of determining an illumination profile and device manufacturing method Grant 7,425,397 - Finders , et al. September 16, 2 | 2008-09-16 |
Method of determining an illumination profile and device manufacturing method App 20070059614 - Finders; Jozef Maria ;   et al. | 2007-03-15 |
Method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby Grant 7,026,082 - Eurlings , et al. April 11, 2 | 2006-04-11 |
Lithographic apparatus and device manufacturing method Grant 6,958,806 - Mulder , et al. October 25, 2 | 2005-10-25 |
Lithographic apparatus and device manufacturing method App 20040257547 - Koolen, Armand Eugene Albert ;   et al. | 2004-12-23 |
Method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby App 20040137343 - Eurlings, Markus Franciscus Antonius ;   et al. | 2004-07-15 |
Lithographic apparatus and device manufacturing method App 20040114123 - Mulder, Heine Melle ;   et al. | 2004-06-17 |