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Semiconductor device and method of manufacturing the same
Grant 11,361,995 - Choi , et al. June 14, 2 | 2022-06-14 |
Maintaining height of alignment key in semiconductor devices
Grant 11,189,572 - Lee , et al. November 30, 2 | 2021-11-30 |
Semiconductor Device And Method Of Manufacturing The Same
App 20210166976 - Choi; Seung-Hoon ; et al. | 2021-06-03 |
Semiconductor device and method of manufacturing the same
Grant 10,910,266 - Choi , et al. February 2, 2 | 2021-02-02 |
Substrate Cleaning Equipment, Substrate Treatment System Including The Same, And Method Of Fabricating Semiconductor Device Using The Substrate Cleaning Equipment
App 20200303218 - CHOI; SEUNG HOON ; et al. | 2020-09-24 |
Polishing Pad Conditioning Apparatus
App 20200206870 - LEE; Eun Seok ; et al. | 2020-07-02 |
Semiconductor Device And Method Of Manufacturing The Same
App 20200058549 - CHOI; SEUNG-HOON ; et al. | 2020-02-20 |
Maintaining Height Of Alignment Key In Semiconductor Devices
App 20200027842 - LEE; Kyung-Tae ; et al. | 2020-01-23 |
Methods for fabricating semiconductor device
Grant 10,056,466 - Lee , et al. August 21, 2 | 2018-08-21 |
Method of manufacturing semiconductor devices
Grant 10,032,890 - Yim , et al. July 24, 2 | 2018-07-24 |
Method of manufacturing semiconductor device
Grant 9,870,950 - Hwang , et al. January 16, 2 | 2018-01-16 |
Method Of Manufacturing Semiconductor Device
App 20170170072 - HWANG; CHANG-SUN ; et al. | 2017-06-15 |
Method Of Manufacturing Semiconductor Devices
App 20170162675 - YIM; Jun-Hwan ; et al. | 2017-06-08 |
Methods For Fabricating Semiconductor Device
App 20170040436 - LEE; Seung-Jae ; et al. | 2017-02-09 |
Method of forming the semiconductor device
Grant 7,595,253 - Yoon , et al. September 29, 2 | 2009-09-29 |
Method Of Manufacturing Semiconductor Device
App 20080132030 - YOON; Il-Young ; et al. | 2008-06-05 |
Method of Fabricating Semiconductor Device Having Dual Stress Liner
App 20080081406 - Choo; Jae-ouk ; et al. | 2008-04-03 |
Methods of fabricating semiconductor device using sacrificial layer
Grant 7,348,277 - Koo , et al. March 25, 2 | 2008-03-25 |
Method of chemical-mechanical polishing and method of forming isolation layer using the same
App 20080045018 - Yoon; Il-young ; et al. | 2008-02-21 |
Semiconductor devices and methods of forming the same
App 20070262393 - Yoon; Il-Young ; et al. | 2007-11-15 |
Semiconductor device having an insulating layer and method of fabricating the same
App 20070178644 - Koo; Ja-eung ; et al. | 2007-08-02 |
Fixed abrasive polishing pad, method of preparing the same, and chemical mechanical polishing apparatus including the same
App 20070128991 - Yoon; Il-young ; et al. | 2007-06-07 |
Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same
Grant 7,166,019 - Park , et al. January 23, 2 | 2007-01-23 |
Methods of fabricating semiconductor device using sacrificial layer
App 20060183333 - Koo; Ja-Eung ; et al. | 2006-08-17 |
Interconnection structure having double diffusion barrier layer and method of fabricating the same
App 20060151887 - Oh; Jun-Hwan ; et al. | 2006-07-13 |
Chemical mechanical polishing apparatus
Grant 6,976,902 - Koo , et al. December 20, 2 | 2005-12-20 |
Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same
App 20050176354 - Park, Moo-Yong ; et al. | 2005-08-11 |
Method of fabricating a metal-insulator-metal capacitor
Grant 6,924,207 - Son , et al. August 2, 2 | 2005-08-02 |
Chemical mechanical polishing apparatus
App 20050048875 - Koo, Ja-Eung ; et al. | 2005-03-03 |
Method of fabricating a metal-insulator-metal capacitor
App 20040126984 - Son, Hong-Seong ; et al. | 2004-07-01 |
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