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Imprint Apparatus And Imprint Method App 20190079391 - FUKUHARA; Kazuya ;   et al. | 2019-03-14 |
Imprint apparatus, imprint method, and article manufacturing method Grant 10,168,615 - Yamashita , et al. J | 2019-01-01 |
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Imprint Apparatus, Imprint Method, And Article Manufacturing Method App 20150014876 - Yamashita; Keiji ;   et al. | 2015-01-15 |
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Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon Grant 8,691,123 - Nakagawa , et al. April 8, 2 | 2014-04-08 |
Template and method of manufacturing a semiconductor device Grant 8,647,106 - Inanami , et al. February 11, 2 | 2014-02-11 |
Imprint Method And Imprint System App 20130020741 - SUZUKI; Masato ;   et al. | 2013-01-24 |
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Template Chuck, Imprint Apparatus, And Pattern Forming Method App 20120061875 - KONO; Takuya | 2012-03-15 |
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Immersion exposure apparatus and method of manufacturing a semiconductor device Grant 7,804,580 - Kono September 28, 2 | 2010-09-28 |
Substrate Holding Member, Immersion Type Exposure Device And Method Of Fabricating Semiconductor Device App 20100136796 - HATANO; Masayuki ;   et al. | 2010-06-03 |
Surface position measuring system, exposure method and semiconductor device manufacturing method Grant 7,710,583 - Kono May 4, 2 | 2010-05-04 |
Immersion exposure method and immersion exposure apparatus which transfer image of pattern formed on mask onto substrate through immersion medium Grant 7,652,747 - Kono , et al. January 26, 2 | 2010-01-26 |
Exposure processing system, exposure processing method and method for manufacturing a semiconductor device Grant 7,630,052 - Kono , et al. December 8, 2 | 2009-12-08 |
Immersion Lithography Method App 20090296054 - KONO; Takuya ;   et al. | 2009-12-03 |
System for controlling an overlay, method for controlling overlay, and method for manufacturing a semiconductor device Grant 7,556,899 - Ikeda , et al. July 7, 2 | 2009-07-07 |
Exposure Method, Photo Mask, And Reticle Stage App 20090148782 - Kono; Takuya ;   et al. | 2009-06-11 |
Immersion Exposure Apparatus And Method Of Manufacturing A Semiconductor Device App 20080278703 - Kono; Takuya | 2008-11-13 |
Immersion exposure method and apparatus, and manufacturing method of a semiconductor device Grant 7,423,728 - Matsunaga , et al. September 9, 2 | 2008-09-09 |
Exposure Apparatus, Exposure Method And Lithography System App 20080204685 - KONO; Takuya ;   et al. | 2008-08-28 |
Immersion Lithography Apparatus and Exposure Method App 20080106713 - Katano; Makiko ;   et al. | 2008-05-08 |
Surface position measuring system, exposure method and semiconductor device manufacturing method App 20080100843 - Kono; Takuya | 2008-05-01 |
Exposure apparatus and semiconductor device manufacturing method App 20070268467 - Katano; Makiko ;   et al. | 2007-11-22 |
System and program for making recipe and method for manufacturing products by using recipe Grant 7,260,443 - Morinaga , et al. August 21, 2 | 2007-08-21 |
Immersion exposure apparatus and method of manufacturing semiconductor device App 20070096764 - Kono; Takuya ;   et al. | 2007-05-03 |
Exposure apparatus correction system, exposure apparatus correcting method, and manufacturing method of semiconductor device App 20070020537 - Harakawa; Shoichi ;   et al. | 2007-01-25 |
Immersion exposure method and immersion exposure apparatus which transfer image of pattern formed on mask onto substrate through immersion medium App 20070008507 - Kono; Takuya ;   et al. | 2007-01-11 |
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Immersion exposure method and apparatus, and manufacturing method of a semiconductor device App 20060177776 - Matsunaga; Kentaro ;   et al. | 2006-08-10 |
Displacement correction apparatus, exposure system, exposure method and a computer program product Grant 7,046,334 - Kono , et al. May 16, 2 | 2006-05-16 |
System and program for making recipe and method for manufacturing products by using recipe App 20060020362 - Morinaga; Hiroyuki ;   et al. | 2006-01-26 |
Exposure system and method for manufacturing semiconductor device App 20060001846 - Kono; Takuya ;   et al. | 2006-01-05 |
Exposure processing system, exposure processing method and method for manufacturing a semiconductor device App 20050170262 - Kono, Takuya ;   et al. | 2005-08-04 |
Displacement correction apparatus, exposure system, exposure method and a computer program product App 20040227916 - Kono, Takuya ;   et al. | 2004-11-18 |