Patent | Date |
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Use Of Vacuum During Transfer Of Substrates App 20220305601 - CHANDRASEKHARAN; Ramesh ;   et al. | 2022-09-29 |
Planar substrate edge contact with open volume equalization pathways and side containment Grant 11,443,975 - Breiling , et al. September 13, 2 | 2022-09-13 |
Pad raising mechanism in wafer positioning pedestal for semiconductor processing Grant 11,387,136 - Konkola , et al. July 12, 2 | 2022-07-12 |
Auto-calibration To A Station Of A Process Module That Spins A Wafer App 20220108902 - Hiester; Jacob L. ;   et al. | 2022-04-07 |
Auto-calibration to a station of a process module that spins a wafer Grant 11,239,100 - Hiester , et al. February 1, 2 | 2022-02-01 |
Multilayer Coatings Of Component Parts For A Work Piece Processing Chamber App 20220028662 - KONKOLA; Paul ;   et al. | 2022-01-27 |
Wafer positioning pedestal for semiconductor processing Grant 11,056,380 - Konkola , et al. July 6, 2 | 2021-07-06 |
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing Grant 10,870,922 - Konkola , et al. December 22, 2 | 2020-12-22 |
Wafer Positioning Pedestal For Semiconductor Processing App 20200312703 - Konkola; Paul ;   et al. | 2020-10-01 |
Auto-calibration To A Station Of A Process Module That Spins A Wafer App 20200273731 - Hiester; Jacob L. ;   et al. | 2020-08-27 |
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment App 20200227304 - Breiling; Patrick ;   et al. | 2020-07-16 |
Integrated Showerhead With Thermal Control For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Pla App 20200219757 - BREILING; Patrick ;   et al. | 2020-07-09 |
Wafer positioning pedestal for semiconductor processing Grant 10,699,937 - Konkola , et al. | 2020-06-30 |
Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing App 20200176301 - Konkola; Paul ;   et al. | 2020-06-04 |
Moment Cancelling Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing App 20200173016 - Konkola; Paul ;   et al. | 2020-06-04 |
Auto-calibration to a station of a process module that spins a wafer Grant 10,651,065 - Hiester , et al. | 2020-05-12 |
Planar substrate edge contact with open volume equalization pathways and side containment Grant 10,622,243 - Breiling , et al. | 2020-04-14 |
Pad raising mechanism in wafer positioning pedestal for semiconductor processing Grant 10,573,549 - Konkola , et al. Feb | 2020-02-25 |
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing Grant 10,570,515 - Konkola , et al. Feb | 2020-02-25 |
Wafer Positioning Pedestal For Semiconductor Processing App 20190341292 - Konkola; Paul ;   et al. | 2019-11-07 |
Wafer positioning pedestal for semiconductor processing Grant 10,354,909 - Konkola , et al. July 16, 2 | 2019-07-16 |
Auto-calibration To A Station Of A Process Module That Spins A Wafer App 20190172738 - Hiester; Jacob L. ;   et al. | 2019-06-06 |
Moment Cancelling Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing App 20190067071 - Konkola; Paul ;   et al. | 2019-02-28 |
Wafer Positioning Pedestal For Semiconductor Processing App 20180323098 - Konkola; Paul ;   et al. | 2018-11-08 |
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing Grant 10,121,689 - Konkola , et al. November 6, 2 | 2018-11-06 |
Moment Cancelling Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing App 20180211862 - Konkola; Paul ;   et al. | 2018-07-26 |
Wafer positioning pedestal for semiconductor processing Grant 10,020,220 - Konkola , et al. July 10, 2 | 2018-07-10 |
Pad Raising Mechanism In Wafer Positioning Pedestal For Semiconductor Processing App 20180158716 - Konkola; Paul ;   et al. | 2018-06-07 |
Wafer Positioning Pedestal For Semiconductor Processing App 20180130696 - Konkola; Paul ;   et al. | 2018-05-10 |
Planar Substrate Edge Contact With Open Volume Equalization Pathways And Side Containment App 20180122685 - Breiling; Patrick ;   et al. | 2018-05-03 |
Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing Grant 9,960,068 - Konkola , et al. May 1, 2 | 2018-05-01 |
Wafer positioning pedestal for semiconductor processing Grant 9,892,956 - Konkola , et al. February 13, 2 | 2018-02-13 |
Fast acceleration reaction force cancelling motor Grant 9,099,908 - Konkola August 4, 2 | 2015-08-04 |
Methods and apparatus involving selectively tailored electromagnetic fields Grant 6,316,849 - Konkola , et al. November 13, 2 | 2001-11-13 |