loadpatents
Patent applications and USPTO patent grants for Konishi; Nobuo.The latest application filed is for "processing device and processing method".
Patent | Date |
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Substrate processing method and apparatus Grant 7,300,598 - Konishi , et al. November 27, 2 | 2007-11-27 |
Processing device and processing method App 20050260771 - Iwashita, Mitsuaki ;   et al. | 2005-11-24 |
Film forming method and film forming apparatus App 20050026454 - Konishi, Nobuo ;   et al. | 2005-02-03 |
Film forming method by radiating a plasma on a surface of a low dielectric constant film Grant 6,800,546 - Konishi , et al. October 5, 2 | 2004-10-05 |
Substrate processing method and apparatus App 20040187896 - Konishi, Nobuo ;   et al. | 2004-09-30 |
Film forming method and film forming apparatus App 20040127019 - Konishi, Nobuo ;   et al. | 2004-07-01 |
Film forming method and film forming apparatus Grant 6,683,006 - Konishi , et al. January 27, 2 | 2004-01-27 |
Film forming method and film forming system Grant 6,656,273 - Toshima , et al. December 2, 2 | 2003-12-02 |
Coating apparatus Grant 6,551,400 - Hasbe , et al. April 22, 2 | 2003-04-22 |
Resist processing method and resist processing apparatus Grant 6,514,073 - Toshima , et al. February 4, 2 | 2003-02-04 |
Film forming method and film forming apparatus App 20020197878 - Konishi, Nobuo ;   et al. | 2002-12-26 |
Film forming method and film forming apparatus App 20020177298 - Konishi, Nobuo ;   et al. | 2002-11-28 |
Scrubbing apparatus Grant 6,385,805 - Konishi , et al. May 14, 2 | 2002-05-14 |
Method of forming resist film Grant 6,300,043 - Konishi , et al. October 9, 2 | 2001-10-09 |
Film forming method and film forming apparatus App 20010014224 - Hasebe, Keizo ;   et al. | 2001-08-16 |
Developing method and developing apparatus App 20010012456 - Konishi, Nobuo ;   et al. | 2001-08-09 |
Scrubbing Apparatus App 20010010103 - KONISHI, NOBUO ;   et al. | 2001-08-02 |
Film forming method and film forming apparatus App 20010009135 - Hasebe, Keizo ;   et al. | 2001-07-26 |
Film forming method and film forming apparatus Grant 6,228,561 - Hasebe , et al. May 8, 2 | 2001-05-08 |
Process solution supplying apparatus Grant 6,165,270 - Konishi , et al. December 26, 2 | 2000-12-26 |
Polishing apparatus, polishing member Grant 6,120,361 - Konishi , et al. September 19, 2 | 2000-09-19 |
Polishing system Grant 6,106,369 - Konishi , et al. August 22, 2 | 2000-08-22 |
Coating apparatus Grant 6,053,977 - Konishi April 25, 2 | 2000-04-25 |
Apparatus and method for forming liquid film Grant 6,012,858 - Konishi , et al. January 11, 2 | 2000-01-11 |
Method of manufacturing a semiconductor device Grant 6,001,739 - Konishi December 14, 1 | 1999-12-14 |
Substrate processing system Grant 5,826,129 - Hasebe , et al. October 20, 1 | 1998-10-20 |
Method and apparatus for polishing Grant 5,722,875 - Iwashita , et al. March 3, 1 | 1998-03-03 |
Apparatus for removing process liquid Grant 5,608,943 - Konishi , et al. March 11, 1 | 1997-03-11 |
Method for applying process solution to substrates Grant 5,416,047 - Konishi , et al. May 16, 1 | 1995-05-16 |
Coating apparatus with nozzle moving means Grant 5,250,114 - Konishi , et al. October 5, 1 | 1993-10-05 |
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