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Grant 11,373,865 - Kondoh , et al. June 28, 2 | 2022-06-28 |
Manufacturing method of semiconductor device
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Method For Manufacturing Semiconductor Device
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Manufacturing Method Of Semiconductor Device
App 20210066090 - HASHIMOTO; Junichi ; et al. | 2021-03-04 |
Pattern Formation Method
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Semiconductor storage device having communicated air gaps between adjacent memory cells
Grant 9,543,310 - Nagashima , et al. January 10, 2 | 2017-01-10 |
Pattern Formation Method
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Semiconductor Storage Device And Manufacturing Method Thereof
App 20160071856 - NAGASHIMA; Satoshi ; et al. | 2016-03-10 |
Pattern formation method and semiconductor device
Grant 9,280,049 - Kondoh March 8, 2 | 2016-03-08 |
Pattern Forming Method And Method Of Manufacturing Semiconductor Device
App 20160020099 - SEGAWA; Kazuhiro ; et al. | 2016-01-21 |
Pattern Formation Method And Semiconductor Device
App 20150227045 - KONDOH; Takehiro | 2015-08-13 |
Method of manufacturing a memory device using fine patterning techniques
Grant 8,975,178 - Kikutani , et al. March 10, 2 | 2015-03-10 |
Stacked Structure Body And Pattern Formation Method
App 20150056811 - KONDOH; Takehiro ; et al. | 2015-02-26 |
Method Of Manufacturing Semiconductor Device
App 20130237051 - KIKUTANI; Keisuke ; et al. | 2013-09-12 |
Immersion Multiple-exposure Method And Immersion Exposure System For Separately Performing Multiple Exposure Of Micropatterns And Non-micropatterns
App 20120154771 - Kondoh; Takehiro | 2012-06-21 |
Immersion multiple-exposure method and immersion exposure system for separately performing multiple exposure of micropatterns and non-micropatterns
Grant 8,148,054 - Kondoh April 3, 2 | 2012-04-03 |
Method for manufacturing semiconductor device
Grant 8,097,398 - Kondoh , et al. January 17, 2 | 2012-01-17 |
Pattern forming method
Grant 7,851,139 - Shiobara , et al. December 14, 2 | 2010-12-14 |
Pattern forming method and semiconductor device manufacturing method
Grant 7,662,542 - Shiobara , et al. February 16, 2 | 2010-02-16 |
Method For Manufacturing Semiconductor Device
App 20090305167 - KONDOH; Takehiro ; et al. | 2009-12-10 |
Pattern Forming Method
App 20090117498 - Shiobara; Eishi ; et al. | 2009-05-07 |
Pattern forming method and method for manufacturing a semiconductor device
Grant 7,527,918 - Kondoh , et al. May 5, 2 | 2009-05-05 |
Immersion Multiple-exposure Method And Immersion Exposure System For Separately Performing Multiple Exposure Of Micropatterns And Non-micropatterns
App 20080311529 - Kondoh; Takehiro | 2008-12-18 |
Substrate Processing Method And Substrate Processing Apparatus
App 20080289656 - KONDOH; Takehiro | 2008-11-27 |
Pattern formation method using fine pattern formation material for use in semiconductor fabrication step
App 20080138746 - Kondoh; Takehiro ; et al. | 2008-06-12 |
Chemical solution qualification method, semiconductor device fabrication method, and liquid crystal display manufacturing method
App 20070010028 - Kondoh; Takehiro ; et al. | 2007-01-11 |
Pattern forming method and semiconductor device manufacturing method
App 20060189147 - Shiobara; Eishi ; et al. | 2006-08-24 |
Pattern forming method and method for manufacturing a semiconductor device
App 20050130068 - Kondoh, Takehiro ; et al. | 2005-06-16 |
Pattern formation material, pattern formation method, and exposure mask fabrication method
App 20040058279 - Itoh, Masamitsu ; et al. | 2004-03-25 |
Pattern formation material, pattern formation method, and exposure mask fabrication method
Grant 6,660,455 - Itoh , et al. December 9, 2 | 2003-12-09 |
Pattern formation material, pattern formation method, and exposure mask fabrication method
App 20010026895 - Itoh, Masamitsu ; et al. | 2001-10-04 |
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