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Substrate Gripping Mechanism, Substrate Transfer Device, And Substrate Processing System App 20190214289 - DOGOME; Masahiro ;   et al. | 2019-07-11 |
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Substrate Transfer Chamber, Substrate Processing System, And Method For Replacing Gas In Substrate Transfer Chamber App 20180211850 - KONDOH; Keisuke | 2018-07-26 |
Carrier Transport Device And Carrier Transport Method App 20180033663 - WAKABAYASHI; Shinji ;   et al. | 2018-02-01 |
Substrate Transfer Method And Processing System App 20170287746 - KONDOH; Keisuke | 2017-10-05 |
Gate valve and substrate processing system Grant 9,732,881 - Wakabayashi , et al. August 15, 2 | 2017-08-15 |
Connecting Mechanism And Connecting Method Of Substrate Container App 20170221743 - KONDOH; Keisuke ;   et al. | 2017-08-03 |
Substrate Transfer Chamber And Container Connecting Mechanism App 20170154799 - WAKABAYASHI; Shinji ;   et al. | 2017-06-01 |
Substrate transporting apparatus, substrate delivery position confirming method, and substrate processing system Grant 9,455,166 - Kondoh September 27, 2 | 2016-09-27 |
Method and apparatus for detecting position of substrate transfer device, and storage medium Grant 9,448,063 - Kondoh September 20, 2 | 2016-09-20 |
Gate Valve And Substrate Processing System App 20160084389 - Wakabayashi; Shinji ;   et al. | 2016-03-24 |
Cover Opening/closing Apparatus And Cover Opening/closing Method App 20160086835 - Kondoh; Keisuke ;   et al. | 2016-03-24 |
Method And Apparatus For Detecting Position Of Substrate Transfer Device, And Storage Medium App 20150219439 - KONDOH; Keisuke | 2015-08-06 |
Substrate Transfer Chamber And Container Connecting Mechanism App 20150098788 - WAKABAYASHI; Shinji ;   et al. | 2015-04-09 |
Substrate Transporting Apparatus, Substrate Delivery Position Confirming Method, And Substrate Processing System App 20140241836 - Kondoh; Keisuke | 2014-08-28 |
Delivery position aligning method for use in vacuum processing apparatus, vacuum processing apparatus and computer storage medium Grant 8,740,535 - Kondoh , et al. June 3, 2 | 2014-06-03 |
Positional deviation detection apparatus and process system employing the same Grant 8,395,136 - Kondoh March 12, 2 | 2013-03-12 |
Substrate processing apparatus Grant 8,382,088 - Kondoh February 26, 2 | 2013-02-26 |
Gate valve cleaning method and substrate processing system Grant 8,382,938 - Moriya , et al. February 26, 2 | 2013-02-26 |
Substrate transfer apparatus, substrate transfer module, substrate transfer method and computer readable storage medium Grant 8,326,468 - Kondoh December 4, 2 | 2012-12-04 |
Vacuum processing apparatus and method, and storage medium for executing the method Grant 8,280,545 - Kondoh October 2, 2 | 2012-10-02 |
Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber Grant 8,113,757 - Moriya , et al. February 14, 2 | 2012-02-14 |
Gate Valve Cleaning Method And Substrate Processing System App 20120012254 - MORIYA; Tsuyoshi ;   et al. | 2012-01-19 |
Gate valve cleaning method and substrate processing system Grant 8,048,235 - Moriya , et al. November 1, 2 | 2011-11-01 |
Delivery Position Aligning Method For Use In Vacuum Processing Apparatus, Vacuum Processing Apparatus And Computer Storage Medium App 20110178631 - KONDOH; Keisuke ;   et al. | 2011-07-21 |
Substrate Transfer Apparatus, Substrate Transfer Module, Substrate Transfer Method And Computer Readable Storage Medium App 20110178626 - Kondoh; Keisuke | 2011-07-21 |
Transfer/alignment method in vacuum processing apparatus, vacuum processing apparatus and computer storage medium Grant 7,942,622 - Kondoh , et al. May 17, 2 | 2011-05-17 |
Positional Deviation Detection Apparatus And Process System Employing The Same App 20100172720 - Kondoh; Keisuke | 2010-07-08 |
Substrate Processing Apparatus, Substrate Processing Method, And Computer Readable Storage Medium App 20100102030 - Kondoh; Keisuke | 2010-04-29 |
Substrate Supporting Apparatus, Substrate Supporting Method, Semiconductor Manufacturing Apparatus And Storage Medium App 20090087932 - Kondoh; Keisuke | 2009-04-02 |
Transfer/Alignment Method in Vacuum Processing Apparatus, Vacuum Processing Apparatus and Computer Storage Medium App 20080304952 - Kondoh; Keisuke ;   et al. | 2008-12-11 |
Single-wafer type substrate processing apparatus having a carry-in port provided with first and second placement tables arranged in a line App 20080236755 - Kondoh; Keisuke ;   et al. | 2008-10-02 |
Vacuum Processing Apparatus And Method, And Storage Medium For Executing The Method App 20080187413 - Kondoh; Keisuke | 2008-08-07 |
Gate Valve Cleaning Method And Substrate Processing System App 20080181750 - Moriya; Tsuyoshi ;   et al. | 2008-07-31 |
Substrate processing apparatus and transfer positioning method thereof Grant 7,361,920 - Kondoh April 22, 2 | 2008-04-22 |
Substrate Processing Device, Method Of Adjusting Pressure In Substrate Processing Device, And Method Of Executing Charge Neutralization Processing On Mounting Table Of Substrate Processing Device App 20080069669 - Kondoh; Keisuke ;   et al. | 2008-03-20 |
Intermediate Transfer Chamber, Substrate Processing System, And Exhaust Method For The Intermediate Transfer Chamber App 20080031710 - MORIYA; Tsuyoshi ;   et al. | 2008-02-07 |
Load-lock chamber Grant D556,157 - Kondoh , et al. November 27, 2 | 2007-11-27 |
Transfer apparatus for target object Grant 7,286,890 - Machiyama , et al. October 23, 2 | 2007-10-23 |
Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same Grant 7,198,251 - Kondoh April 3, 2 | 2007-04-03 |
Transfer apparatus for target object App 20060291988 - Machiyama; Wataru ;   et al. | 2006-12-28 |
Delivery position aligning method for use in a transfer system and a processing system employing the method Grant 7,129,147 - Kumagai , et al. October 31, 2 | 2006-10-31 |
Transfer-chamber Grant D527,751 - Kondoh , et al. September 5, 2 | 2006-09-05 |
Substrate processing apparatus and transfer positioning method thereof App 20060138367 - Kondoh; Keisuke | 2006-06-29 |
Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same App 20060131278 - Kondoh; Keisuke | 2006-06-22 |
Articulated carrying device Grant 7,018,162 - Kondoh March 28, 2 | 2006-03-28 |
Delivery position aligning method for use in a transfer system and a processing system employing the method App 20050255609 - Kumagai, Motohiro ;   et al. | 2005-11-17 |
Positioning substrate for semiconductor process Grant 6,950,721 - Tashiro , et al. September 27, 2 | 2005-09-27 |
Articulated carrying device App 20040179930 - Kondoh, Keisuke | 2004-09-16 |
Carrying device Grant 6,699,003 - Saeki , et al. March 2, 2 | 2004-03-02 |
Positioning substrate for semiconductor process App 20040018745 - Tashiro, Makoto ;   et al. | 2004-01-29 |
Carrying device App 20030012632 - Saeki, Hiroaki ;   et al. | 2003-01-16 |
Conveyor system Grant 6,450,757 - Saeki , et al. September 17, 2 | 2002-09-17 |