Kondo; Shinjiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kondo; Shinjiro.The latest application filed is for "focus test mask, focus measurement method, exposure method and exposure apparatus".
- Kondo; Shinjiro - Kounosu JP
- KONDO; Shinjiro - Kounosu-shi JP
- Kondo; Shinjiro - Kounosu-city JP
- Kondo; Shinjiro - Tokyo JP
| Patent | Date |
|---|---|
| Focus test mask, focus measurement method, exposure method and exposure apparatus Grant 8,343,693 - Hirukawa , et al. January 1, 2 | 2013-01-01 |
| Method of measuring shot shape and mask Grant 8,339,614 - Kondo December 25, 2 | 2012-12-25 |
| Focus Test Mask, Focus Measurement Method, Exposure Method And Exposure Apparatus App 20110212389 - HIRUKAWA; Shigeru ; et al. | 2011-09-01 |
| Method of Measuring Shot Shape and Mask App 20090033948 - Kondo; Shinjiro | 2009-02-05 |
| Focus test mask, focus measurement method and exposure apparatus Grant 7,426,017 - Kondo September 16, 2 | 2008-09-16 |
| Focus test mask, focus measurement method and exposure apparatus App 20060103825 - Kondo; Shinjiro | 2006-05-18 |
| Imaging characteristic and asymetric abrerration measurement of projection optical system Grant 5,615,006 - Hirukawa , et al. March 25, 1 | 1997-03-25 |
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