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Edge Ring, Plasma Processing Apparatus, And Manufacturing Method Of Edge Ring App 20210057194 - KON; Masato | 2021-02-25 |
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Object-forming machine, cross-section measurement apparatus, and cross-section measurement method Grant 10,343,334 - Cho , et al. July 9, 2 | 2019-07-09 |
Method and device for controlling rotary table Grant 10,190,996 - Matsumiya , et al. Ja | 2019-01-29 |
Transfer Apparatus And Transfer Method App 20180315629 - KON; Masato | 2018-11-01 |
Film Forming Apparatus App 20180005800 - KON; Masato | 2018-01-04 |
Method For Forming Film On Flexible Substrate By Vapor Deposition App 20170211177 - KON; Masato | 2017-07-27 |
Film Formation Apparatus And Film Formation Method App 20170183774 - KON; Masato | 2017-06-29 |
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Method And Device For Controlling Rotary Table App 20160305894 - MATSUMIYA; Sadayuki ;   et al. | 2016-10-20 |
Mask blank for reflection-type exposure, and mask for reflection-type exposure Grant 9,442,364 - Kodera , et al. September 13, 2 | 2016-09-13 |
Electrically- and chemically-active adlayers for plasma electrodes Grant 9,133,546 - Dickey , et al. September 15, 2 | 2015-09-15 |
Electrically- And Chemically-active Adlayers For Plasma Electrodes App 20150252478 - Dickey; Eric R. ;   et al. | 2015-09-10 |
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