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Resist Composition And Method Of Forming Resist Pattern App 20220171286 - INARI; Takatoshi ;   et al. | 2022-06-02 |
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Resist Composition, Method Of Forming Resist Pattern, Compound, Acid Generator, And Method Of Producing Compound App 20210389668 - YAMAZAKI; Hiroto ;   et al. | 2021-12-16 |
Resist composition and method of forming resist pattern Grant 11,181,822 - Onishi , et al. November 23, 2 | 2021-11-23 |
Alternating Copolymer, Method Of Producing Alternating Copolymer, Method Of Producing Polymeric Compound, And Method Of Forming Resist Pattern App 20210230332 - YAMAZAKI; Akiyoshi ;   et al. | 2021-07-29 |
Organically Modified Metal Oxide Nanoparticles, Organically Modified Metal Oxide Nanoparticles-containing Solution, Organically Modified Metal Oxide Nanoparticles-containing Resist Composition, And Resist Pattern Forming Method App 20210191261 - SUE; Kiwamu ;   et al. | 2021-06-24 |
Resist Composition And Method Of Forming Resist Pattern App 20210141307 - Murata; Mari ;   et al. | 2021-05-13 |
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Resist Composition, Method Of Forming Resist Pattern, Compound, Acid Generator, And Method Of Producing Compound App 20190361344 - YAMAZAKI; Hiroto ;   et al. | 2019-11-28 |
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Resist Composition And Method Of Forming Resist Pattern App 20190361342 - MAEHASHI; Takaya ;   et al. | 2019-11-28 |
Method of preparing polymer compound Grant 10,414,918 - Komuro , et al. Sept | 2019-09-17 |
Resist composition, method for forming resist pattern, compound, and acid generator Grant 10,394,122 - Suzuki , et al. A | 2019-08-27 |
Pattern forming method Grant 10,366,888 - Yamada , et al. July 30, 2 | 2019-07-30 |
Resist composition and method of forming resist pattern Grant 10,324,377 - Hirayama , et al. | 2019-06-18 |
Pattern forming method for forming a pattern Grant 10,317,797 - Yaegashi , et al. | 2019-06-11 |
Resist composition, method for forming resist pattern, and polymer compound Grant 10,295,905 - Komuro , et al. | 2019-05-21 |
Pattern Forming Method App 20180374695 - YAMADA; Kazuki ;   et al. | 2018-12-27 |
Method for manufacturing polymer compound Grant 10,100,134 - Arai , et al. October 16, 2 | 2018-10-16 |
Pattern Forming Method For Forming A Pattern App 20180143536 - YAEGASHI; Hidetami ;   et al. | 2018-05-24 |
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Method Of Preparing Polymer Compound App 20180022916 - KOMURO; Yoshitaka ;   et al. | 2018-01-25 |
Monomer having N-acyl carbamoyl group and lactone skeleton, and polymeric compound Grant 9,862,695 - Koyama , et al. January 9, 2 | 2018-01-09 |
Resist Composition, Method For Forming Resist Pattern, Compound, And Acid Generator App 20170369698 - SUZUKI; Issei ;   et al. | 2017-12-28 |
Positive-type resist composition, method for forming resist pattern, photo-reactive quencher, and polymeric compound Grant 9,766,541 - Yamazaki , et al. September 19, 2 | 2017-09-19 |
Method For Manufacturing Polymer Compound App 20170166664 - ARAI; Masatoshi ;   et al. | 2017-06-15 |
Method of forming resist pattern Grant 9,639,002 - Arai , et al. May 2, 2 | 2017-05-02 |
Resist composition, method of forming resist pattern, polymeric compound and compound Grant 9,606,433 - Utsumi , et al. March 28, 2 | 2017-03-28 |
Resist composition and method of forming resist pattern Grant 9,557,647 - Komuro , et al. January 31, 2 | 2017-01-31 |
Positive-type Resist Composition, Method For Forming Resist Pattern, Photo-reactive Quencher, And Polymeric Compound App 20160376233 - YAMAZAKI; Hiroto ;   et al. | 2016-12-29 |
Resist Composition And Method Of Forming Resist Pattern App 20160363860 - HIRAYAMA; Taku ;   et al. | 2016-12-15 |
Negative resist composition, method of forming resist pattern and complex Grant 9,499,646 - Yamashita , et al. November 22, 2 | 2016-11-22 |
Negative Resist Composition, Method Of Forming Resist Pattern And Complex App 20160259244 - YAMASHITA; Naoki ;   et al. | 2016-09-08 |
Resist composition, method of forming resist pattern, compound, and polymeric compound Grant 9,411,227 - Nagamine , et al. August 9, 2 | 2016-08-09 |
Negative resist composition, method of forming resist pattern, and complex Grant 9,366,960 - Yamashita , et al. June 14, 2 | 2016-06-14 |
Resist composition, acid generator, polymeric compound and method of forming resist pattern Grant 9,354,515 - Nagamine , et al. May 31, 2 | 2016-05-31 |
Resist composition and method of forming resist pattern Grant 9,341,947 - Komuro , et al. May 17, 2 | 2016-05-17 |
Method Of Forming Resist Pattern App 20160116843 - ARAI; Masatoshi ;   et al. | 2016-04-28 |
Resist Composition And Method Of Forming Resist Pattern App 20160062236 - Komuro; Yoshitaka ;   et al. | 2016-03-03 |
Monomer Having N-acyl Carbamoyl Group And Lactone Skeleton, And Polymeric Compound App 20160060374 - KOYAMA; Hiroshi ;   et al. | 2016-03-03 |
Resist composition, compound, polymeric compound and method of forming resist pattern Grant 9,244,347 - Komuro , et al. January 26, 2 | 2016-01-26 |
Resist composition and resist pattern forming method Grant 9,235,123 - Nakamura , et al. January 12, 2 | 2016-01-12 |
Resist composition, method of forming resist pattern, and compound Grant 9,164,381 - Komuro , et al. October 20, 2 | 2015-10-20 |
Resist composition and method of forming resist pattern Grant 9,164,380 - Komuro , et al. October 20, 2 | 2015-10-20 |
Resist composition, method for forming resist pattern, and compound Grant 9,164,379 - Utsumi , et al. October 20, 2 | 2015-10-20 |
Resist composition, method of forming resist pattern and polymeric compound Grant 9,104,101 - Matsuzawa , et al. August 11, 2 | 2015-08-11 |
Resist Composition, Method Of Forming Resist Pattern, Compound, And Polymeric Compound App 20150198881 - Nagamine; Takashi ;   et al. | 2015-07-16 |
Negative Resist Composition, Method Of Forming Resist Pattern, And Complex App 20150192851 - Yamashita; Naoki ;   et al. | 2015-07-09 |
Resist composition, method of forming resist pattern and compound Grant 9,063,416 - Komuro , et al. June 23, 2 | 2015-06-23 |
Sulfonium salt and photo-acid generator Grant 9,045,398 - Suzuki , et al. June 2, 2 | 2015-06-02 |
Resist composition, method of forming resist pattern, novel compound and acid generator Grant 9,017,919 - Utsumi , et al. April 28, 2 | 2015-04-28 |
Compound, polymeric compound, acid generator, resist composition, and method of forming resist pattern Grant 9,005,874 - Komuro , et al. April 14, 2 | 2015-04-14 |
Resist Composition, Acid Generator, Polymeric Compound And Method Of Forming Resist Pattern App 20150037734 - Nagamine; Takashi ;   et al. | 2015-02-05 |
Resist Composition, Compound, Polymeric Compound And Method Of Forming Resist Pattern App 20140356787 - Komuro; Yoshitaka ;   et al. | 2014-12-04 |
Sulfonium Salt And Photo-acid Generator App 20140357896 - Suzuki; Issei ;   et al. | 2014-12-04 |
Resist Composition And Method Of Forming Resist Pattern App 20140322652 - Komuro; Yoshitaka ;   et al. | 2014-10-30 |
Resist Composition And Resist Pattern Forming Method App 20140287361 - Nakamura; Tsuyoshi ;   et al. | 2014-09-25 |
Resist Composition, Polymeric Compound, Compound And Method Of Forming Resist Pattern App 20140220492 - Kaiho; Takaaki ;   et al. | 2014-08-07 |
Resist composition and method of forming resist pattern Grant 8,785,106 - Komuro , et al. July 22, 2 | 2014-07-22 |
Resist composition and method of forming resist pattern Grant 8,614,049 - Utsumi , et al. December 24, 2 | 2013-12-24 |
Resist Composition, Method Of Forming Resist Pattern, And Compound App 20130323645 - Komuro; Yoshitaka ;   et al. | 2013-12-05 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Compound App 20130309614 - Utsumi; Yoshiyuki ;   et al. | 2013-11-21 |
Resist Composition, Method For Forming Resist Pattern, And Compound App 20130302736 - Utsumi; Yoshiyuki ;   et al. | 2013-11-14 |
Resist Composition And Method Of Forming Resist Pattern App 20130224658 - Komuro; Yoshitaka ;   et al. | 2013-08-29 |
Compound Grant 8,497,395 - Utsumi , et al. July 30, 2 | 2013-07-30 |
Resist Composition And Method Of Forming Resist Pattern App 20130189619 - Komuro; Yoshitaka ;   et al. | 2013-07-25 |
Resist Composition, Method Of Forming Resist Pattern And Compound App 20130157197 - Komuro; Yoshitaka ;   et al. | 2013-06-20 |
Resist Composition And Method Of Forming Resist Pattern App 20130065180 - Kurosawa; Tsuyoshi ;   et al. | 2013-03-14 |
Resist Composition, Method Of Forming Resist Pattern And Polymeric Compound App 20120282551 - MATSUZAWA; Kensuke ;   et al. | 2012-11-08 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,298,748 - Seshimo , et al. October 30, 2 | 2012-10-30 |
Compound, Polymeric Compound, Acid Generator, Resist Composition, And Method Of Forming Resist Pattern App 20120270155 - Komuro; Yoshitaka ;   et al. | 2012-10-25 |
Resist Composition And Method Of Forming Resist Pattern App 20120148956 - UTSUMI; Yoshiyuki ;   et al. | 2012-06-14 |
Novel Compound App 20120149916 - UTSUMI; Yoshiyuki ;   et al. | 2012-06-14 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound And Acid Generator App 20120107744 - Utsumi; Yoshiyuki ;   et al. | 2012-05-03 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20120015299 - Komuro; Yoshitaka ;   et al. | 2012-01-19 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20120015297 - KOMURO; Yoshitaka ;   et al. | 2012-01-19 |
Compound, acid generator, resist composition and method of forming resist pattern Grant 7,955,777 - Seshimo , et al. June 7, 2 | 2011-06-07 |
Photosensitive resin, and photosensitive composition Grant 7,858,287 - Watanabe , et al. December 28, 2 | 2010-12-28 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20100297560 - SESHIMO; Takehiro ;   et al. | 2010-11-25 |
Novel Compound, Acid Generator, Resist Composition And Method Of Forming Resist Pattern App 20090162787 - Seshimo; Takehiro ;   et al. | 2009-06-25 |
Photosensitive Resin, And Photosensitive Composition App 20090142697 - Watanabe; Takeo ;   et al. | 2009-06-04 |