KOMURO; Osamu
Patent Applications and Registrations
Patent applications and USPTO patent grants for KOMURO; Osamu.The latest application filed is for "electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment".
Company Profile
0.47.48
- KOMURO; Osamu - Tokyo JP
- Komuro; Osamu - Hitachinaka JP
- Komuro; Osamu - Hitachinaka-shi JP
Patent Activity
| Patent | Date |
|---|---|
| Electromagnetic Field Shielding Plate, Method for Manufacturing Same, Electromagnetic Field Shielding Structure, and Semiconductor Manufacturing Environment App 20220007556 - MIYANO; Ichiro ; et al. | 2022-01-06 |
| Scanning electron microscope and sample observation method Grant 10,840,060 - Cheng , et al. November 17, 2 | 2020-11-17 |
| Overlay error measuring device and computer program for causing computer to measure pattern Grant 10,545,017 - Yamaguchi , et al. Ja | 2020-01-28 |
| Scanning Electron Microscope And Sample Observation Method App 20180269032 - CHENG; Zhaohui ; et al. | 2018-09-20 |
| Scanning electron microscope and sample observation method Grant 9,991,092 - Cheng , et al. June 5, 2 | 2018-06-05 |
| Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof Grant 9,702,695 - Kawada , et al. July 11, 2 | 2017-07-11 |
| Charged-particle beam device Grant 9,443,695 - Ohashi , et al. September 13, 2 | 2016-09-13 |
| Image forming device and computer program Grant 9,275,829 - Setoguchi , et al. March 1, 2 | 2016-03-01 |
| Charged-particle Beam Device App 20150348747 - OHASHI; Takeyoshi ; et al. | 2015-12-03 |
| Charged particle beam apparatus for removing charges developed on a region of a sample Grant 9,202,665 - Matsui , et al. December 1, 2 | 2015-12-01 |
| Overlay Error Measuring Device And Computer Program For Causing Computer To Measure Pattern App 20150285627 - Yamaguchi; Satoru ; et al. | 2015-10-08 |
| Charged particle beam device, and image analysis device Grant 9,129,353 - Shirai , et al. September 8, 2 | 2015-09-08 |
| Edge detection technique and charged particle radiation equipment Grant 8,953,855 - Namai , et al. February 10, 2 | 2015-02-10 |
| Scanning electron microscope Grant 8,704,175 - Sohda , et al. April 22, 2 | 2014-04-22 |
| Scanning electron microscope Grant 8,666,165 - Yamaguchi , et al. March 4, 2 | 2014-03-04 |
| Charged Particle Beam Apparatus App 20140027635 - Matsui; Hiroyuki ; et al. | 2014-01-30 |
| Charged Particle Beam Device, And Image Analysis Device App 20130301954 - Shirai; Masumi ; et al. | 2013-11-14 |
| Scanning Electron Microscope App 20130175447 - Sohda; Yasunari ; et al. | 2013-07-11 |
| Image Processing Device, Charged Particle Beam Device, Charged Particle Beam Device Adjustment Sample, and Manufacturing Method Thereof App 20130146763 - Kawada; Hiroki ; et al. | 2013-06-13 |
| Image Forming Device And Computer Program App 20130141563 - Setoguchi; Katsumi ; et al. | 2013-06-06 |
| Method Of Determining The Concavity And Convexity On Sample Surface, And Charged Particle Beam Apparatus App 20120305764 - Kimura; Yoshihiro ; et al. | 2012-12-06 |
| Charged particle beam system Grant 8,304,725 - Komuro , et al. November 6, 2 | 2012-11-06 |
| Microstructured pattern inspection method Grant 8,304,724 - Sasajima , et al. November 6, 2 | 2012-11-06 |
| Method and apparatus for computing degree of matching Grant 8,285,056 - Taguchi , et al. October 9, 2 | 2012-10-09 |
| Scanning Electron Microscope And Sample Observation Method App 20120153145 - Cheng; Zhaohui ; et al. | 2012-06-21 |
| Pattern search method Grant 7,941,008 - Satou , et al. May 10, 2 | 2011-05-10 |
| Charged Particle Beam System App 20110057101 - KOMURO; Osamu ; et al. | 2011-03-10 |
| Microstructured Pattern Inspection Method App 20100314541 - SASAJIMA; Fumihiro ; et al. | 2010-12-16 |
| Charged particle beam system Grant 7,851,754 - Komuro , et al. December 14, 2 | 2010-12-14 |
| Microstructured pattern inspection method Grant 7,791,021 - Sasajima , et al. September 7, 2 | 2010-09-07 |
| High-accuracy pattern shape evaluating method and apparatus Grant 7,619,751 - Yamaguchi , et al. November 17, 2 | 2009-11-17 |
| Method And Apparatus For Computing Degree Of Matching App 20090232405 - Taguchi; Junichi ; et al. | 2009-09-17 |
| Edge Detection Technique And Charged Particle Radiation Equipment App 20090226096 - NAMAI; Hitoshi ; et al. | 2009-09-10 |
| Scanning Electron Microscope App 20090041333 - YAMAGUCHI; Satoru ; et al. | 2009-02-12 |
| Microstructured Pattern Inspection Method App 20090020699 - Sasajima; Fumihiro ; et al. | 2009-01-22 |
| Scanning electron microscope Grant 7,439,505 - Yamaguchi , et al. October 21, 2 | 2008-10-21 |
| Microstructured pattern inspection method Grant 7,435,959 - Sasajima , et al. October 14, 2 | 2008-10-14 |
| High-accuracy Pattern Shape Evaluating Method And Apparatus App 20080226177 - Yamaguchi; Atsuko ; et al. | 2008-09-18 |
| High-accuracy pattern shape evaluating method and apparatus Grant 7,405,835 - Yamaguchi , et al. July 29, 2 | 2008-07-29 |
| Method and apparatus for circuit pattern inspection Grant 7,369,703 - Yamaguchi , et al. May 6, 2 | 2008-05-06 |
| Microstructured pattern inspection method App 20070290697 - Sasajima; Fumihiro ; et al. | 2007-12-20 |
| Pattern measuring method Grant 7,288,764 - Sasajima , et al. October 30, 2 | 2007-10-30 |
| High-accuracy pattern shape evaluating method and apparatus App 20070242885 - Yamaguchi; Atsuko ; et al. | 2007-10-18 |
| Charged particle beam system App 20070221845 - Komuro; Osamu ; et al. | 2007-09-27 |
| High-accuracy pattern shape evaluating method and apparatus Grant 7,230,723 - Yamaguchi , et al. June 12, 2 | 2007-06-12 |
| Pattern measuring method App 20070114399 - Sasajima; Fumihiro ; et al. | 2007-05-24 |
| Microstructured pattern inspection method Grant 7,217,923 - Sasajima , et al. May 15, 2 | 2007-05-15 |
| Electron microscope Grant 7,214,937 - Abe , et al. May 8, 2 | 2007-05-08 |
| Pattern measuring method Grant 7,180,062 - Sasajima , et al. February 20, 2 | 2007-02-20 |
| Method for determining depression/protrusion of sample and charged particle beam apparatus therefor Grant 7,166,840 - Takane , et al. January 23, 2 | 2007-01-23 |
| Method and apparatus for circuit pattern inspection App 20060269121 - Yamaguchi; Atsuko ; et al. | 2006-11-30 |
| Method and apparatus for circuit pattern inspection Grant 7,095,884 - Yamaguchi , et al. August 22, 2 | 2006-08-22 |
| High-accuracy pattern shape evaluating method and apparatus App 20060145076 - Yamaguchi; Atsuko ; et al. | 2006-07-06 |
| Scanning electron microscope App 20060097158 - Yamaguchi; Satoru ; et al. | 2006-05-11 |
| Scanning electron microscope Grant 7,002,151 - Yamaguchi , et al. February 21, 2 | 2006-02-21 |
| Microstructured pattern inspection method App 20050277029 - Sasajima, Fumihiro ; et al. | 2005-12-15 |
| Pattern search method App 20050232493 - Satou, Norio ; et al. | 2005-10-20 |
| Pattern measuring method App 20050211897 - Sasajima, Fumihiro ; et al. | 2005-09-29 |
| Microstructured pattern inspection method Grant 6,936,819 - Sasajima , et al. August 30, 2 | 2005-08-30 |
| Method for determining depression/protrusion of sample and charged particle beam apparatus therefor App 20050151078 - Takane, Atsushi ; et al. | 2005-07-14 |
| Electron microscope App 20050145793 - Abe, Katsuaki ; et al. | 2005-07-07 |
| Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device Grant 6,913,861 - Shishido , et al. July 5, 2 | 2005-07-05 |
| Method and system for monitoring a semiconductor device manufacturing process Grant 6,909,930 - Shishido , et al. June 21, 2 | 2005-06-21 |
| Scanning electron microscope App 20050109937 - Yamaguchi, Satoru ; et al. | 2005-05-26 |
| Method for determining depression/protrusion of sample and charged particle beam apparatus therefor Grant 6,872,943 - Takane , et al. March 29, 2 | 2005-03-29 |
| Method of determining the concavity and convexity on sample surface, and charged particle beam apparatus App 20040222375 - Kimura, Yoshihiro ; et al. | 2004-11-11 |
| Microstructured pattern inspection method App 20040217288 - Sasajima, Fumihiro ; et al. | 2004-11-04 |
| Scanning electron microscope Grant 6,803,573 - Yamaguchi , et al. October 12, 2 | 2004-10-12 |
| Process conditions change monitoring systems that use electron beams, and related monitoring methods Grant 6,791,096 - Komuro , et al. September 14, 2 | 2004-09-14 |
| Process conditions change monitoring systems that use electron beams, and related monitoring methods Grant 6,791,082 - Komuro , et al. September 14, 2 | 2004-09-14 |
| Microstructured pattern inspection method Grant 6,765,204 - Sasajima , et al. July 20, 2 | 2004-07-20 |
| Scanning electron microscope App 20040016882 - Yamaguchi, Satoru ; et al. | 2004-01-29 |
| Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device App 20030219658 - Shishido, Chie ; et al. | 2003-11-27 |
| Scanning electron microscope Grant 6,627,888 - Yamaguchi , et al. September 30, 2 | 2003-09-30 |
| Microstructured pattern inspection method App 20030168596 - Sasajima, Fumihiro ; et al. | 2003-09-11 |
| Process conditions change monitoring systems that use electron beams, and related monitoring methods App 20030106999 - Komuro, Osamu ; et al. | 2003-06-12 |
| Process conditions change monitoring systems that use electron beams, and related monitoring methods App 20030038250 - Komuro, Osamu ; et al. | 2003-02-27 |
| Method and apparatus for circuit pattern inspection App 20030021463 - Yamaguchi, Atsuko ; et al. | 2003-01-30 |
| Method and system for monitoring a semiconductor device manufacturing process App 20030015660 - Shishido, Chie ; et al. | 2003-01-23 |
| Method for determining depression/protrusion of sample and charged particle beam apparatus therefor App 20030010914 - Takane, Atsushi ; et al. | 2003-01-16 |
| Electron microscope App 20020024012 - Abe, Katsuaki ; et al. | 2002-02-28 |
| Scanning electron microscope App 20010019109 - Yamaguchi, Satoru ; et al. | 2001-09-06 |
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