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Composition for forming films, film produced from said composition, and method for producing organic semiconductor element using said composition Grant 9,966,575 - Komoriya , et al. May 8, 2 | 2018-05-08 |
Film-forming composition, film formed thereby, and method for manufacturing organic semiconductor element using same Grant 9,842,993 - Terui , et al. December 12, 2 | 2017-12-12 |
Polymerizable fluoromonomer, fluoropolymer, resist material, and method of pattern formation Grant 9,678,425 - Komoriya , et al. June 13, 2 | 2017-06-13 |
Polymerizable fluoromonomer, fluoropolymer, resist material, and method of pattern formation Grant 9,678,426 - Komoriya , et al. June 13, 2 | 2017-06-13 |
Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions Grant 9,650,451 - Sumida , et al. May 16, 2 | 2017-05-16 |
Method for producing compound containing BIS (perfluoroalkylsulfonyl) methyl group and salt thereof, and solid electrolyte membrane produced using same Grant 9,512,070 - Takahashi , et al. December 6, 2 | 2016-12-06 |
Film-Forming Composition, Film Formed Thereby, and Method for Manufacturing Organic Semiconductor Element Using Same App 20160181531 - TERUI; Yoshiharu ;   et al. | 2016-06-23 |
Composition for Forming Films, Film Produced from Said Composition, and Method for Producing Organic Semiconductor Element Using Said Composition App 20160164047 - KOMORIYA; Haruhiko ;   et al. | 2016-06-09 |
Proton conducting polymer membrane, membrane-electrode assembly using same, and polymer electrolyte fuel cell Grant 9,318,764 - Tanaka , et al. April 19, 2 | 2016-04-19 |
Positive-type resist composition Grant 9,310,682 - Terui , et al. April 12, 2 | 2016-04-12 |
Antibacterial agent, substrate surface treatment method using the same, antibacterial agent composition, and substrate surface treatment method using the same Grant 9,204,652 - Komoriya , et al. December 8, 2 | 2015-12-08 |
Solid electrolyte film, and method for producing same Grant 9,171,655 - Suzuki , et al. October 27, 2 | 2015-10-27 |
Method for Producing Compound Containing BIS (Perfluoroalkylsulfonyl) Methyl Group and Salt Thereof, and Solid Electrolyte Membrane Produced Using Same App 20150266816 - Takahashi; Arata ;   et al. | 2015-09-24 |
Fluorine-containing polymer and anti-static agent wherein same is used Grant 8,822,588 - Terui , et al. September 2, 2 | 2014-09-02 |
Polymerizable Fluoromonomer, Fluoropolymer, Resist Material, and Method of Pattern Formation App 20140221589 - KOMORIYA; Haruhiko ;   et al. | 2014-08-07 |
Polymerizable Fluoromonomer, Fluoropolymer, Resist Material, and Method of Pattern Formation App 20140220490 - KOMORIYA; Haruhiko ;   et al. | 2014-08-07 |
Fluorine-Containing Compounds and Their Polymers Useful for Anti-Reflection Film Materials and Resist Compositions App 20140171584 - SUMIDA; Shinichi ;   et al. | 2014-06-19 |
Positive-Type Resist Composition App 20140134542 - Terui; Yoshiharu ;   et al. | 2014-05-15 |
Polymerizable fluoromonomer, fluoropolymer, resist material, and method of pattern formation Grant 8,716,385 - Komoriya , et al. May 6, 2 | 2014-05-06 |
Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions Grant 8,691,491 - Sumida , et al. April 8, 2 | 2014-04-08 |
Top coating composition Grant 8,663,903 - Maeda , et al. March 4, 2 | 2014-03-04 |
Proton Conducting Polymer Membrane, Membrane-Electrode Assembly Using Same, and Polymer Electrolyte Fuel Cell App 20140023953 - Tanaka; Toru ;   et al. | 2014-01-23 |
Top coat composition Grant 8,592,508 - Komoriya , et al. November 26, 2 | 2013-11-26 |
Water Repellent Additive for Immersion Resist App 20130216960 - MAEDA; Kazuhiko ;   et al. | 2013-08-22 |
Antibacterial Agent, Substrate Surface Treatment Method Using The Same, Antibacterial Agent Composition, And Substrate Surface Treatment Method Using The Same App 20130189220 - Komoriya; Haruhiko ;   et al. | 2013-07-25 |
Solid electrolyte membrane for fuel cell and process for producing same Grant 8,445,551 - Obara , et al. May 21, 2 | 2013-05-21 |
Solid Electrolyte Film, and Method for Producing Same App 20120301811 - Suzuki; Katsutoshi ;   et al. | 2012-11-29 |
Fluorine-containing polymer coating composition, method for forming fluorine-containing polymer film using coating composition, and method for forming photoresist or lithographic pattern Grant 8,211,612 - Maeda , et al. July 3, 2 | 2012-07-03 |
Solid Electrolyte Membrane for Fuel Cell and Process for Producing Same App 20120142791 - Obara; Yoshihiko ;   et al. | 2012-06-07 |
Water Repellent Additive for Immersion Resist App 20120064459 - Maeda; Kazuhiko ;   et al. | 2012-03-15 |
Top Coating Composition App 20120040294 - Maeda; Kazuhiko ;   et al. | 2012-02-16 |
Fluorine-containing cyclic compound, fluorine-containing polymer compound, resist material using same and method for forming pattern Grant 8,115,036 - Komoriya , et al. February 14, 2 | 2012-02-14 |
Top Coat Composition App 20110245395 - Komoriya; Haruhiko ;   et al. | 2011-10-06 |
Polymerizable Fluoromonomer, Fluoropolymer, Resist Material, and Method of Pattern Formation App 20110244188 - Komoriya; Haruhiko ;   et al. | 2011-10-06 |
Fluorine-Containing Compounds and their Polymers Useful for Anti-Reflection Film Materials and Resist Compositions App 20110196121 - SUMIDA; Shinichi ;   et al. | 2011-08-11 |
Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions Grant 7,947,422 - Sumida , et al. May 24, 2 | 2011-05-24 |
Fluorine-Containing Polymer and Anti-Static Agent Wherein Same is Used App 20110065857 - Terui; Yoshiharu ;   et al. | 2011-03-17 |
Fluorinated cyclic compound, polymerizable fluoromonomer, fluoropolymer, resist material comprising the same, and method of forming pattern with the same Grant 7,781,602 - Komoriya , et al. August 24, 2 | 2010-08-24 |
Fluorine-Containing Cyclic Compound, Fluorine-Containing Polymer Compound, Resist Material Using Same and Method for Forming Pattern App 20100204422 - Komoriya; Haruhiko ;   et al. | 2010-08-12 |
Fluorine-containing cyclic compound, fluorine-containing polymer compound, resist material using same and method for forming pattern Grant 7,736,835 - Komoriya , et al. June 15, 2 | 2010-06-15 |
Ester compound, polymer, resist composition, and patterning process Grant 7,666,967 - Harada , et al. February 23, 2 | 2010-02-23 |
Resist protective coating material and patterning process Grant 7,569,323 - Hatakeyama , et al. August 4, 2 | 2009-08-04 |
Polymer, resist composition and patterning process Grant 7,488,567 - Harada , et al. February 10, 2 | 2009-02-10 |
Transparent fluorine-containing copolymer Grant 7,417,100 - Komoriya , et al. August 26, 2 | 2008-08-26 |
Fluorinated Cyclic Compound, Polymerizable Fluoromonomer, Fluoropolymer, Resist Material Comprising the Same, and Method of Forming Pattern with the Same App 20080194764 - KOMORIYA; Haruhiko ;   et al. | 2008-08-14 |
Top coat composition Grant 7,402,626 - Maeda , et al. July 22, 2 | 2008-07-22 |
Fluorine-containing allyl ether compounds, their copolymers, and resist compositions and anti-reflection film materials using such copolymers Grant 7,399,815 - Kobayashi , et al. July 15, 2 | 2008-07-15 |
Polymer, resist composition and patterning process Grant 7,378,218 - Harada , et al. May 27, 2 | 2008-05-27 |
Polymer, resist protective coating material, and patterning process Grant 7,354,693 - Hatakeyama , et al. April 8, 2 | 2008-04-08 |
Fluorine-Containing Cyclic Compound, Fluorine-Containing Polymer Compound, Resist Material Using Same and Method for Forming Pattern App 20080003517 - Komoriya; Haruhiko ;   et al. | 2008-01-03 |
Polymerizable ester compounds Grant 7,276,623 - Harada , et al. October 2, 2 | 2007-10-02 |
Polymer, resist composition, and patterning process Grant 7,241,553 - Hatakeyama , et al. July 10, 2 | 2007-07-10 |
Cyclic fluorine compounds, polymerizable fluoromonomers, fluoropolymers, and resist materials containing the fluoropolymers and method for pattern formation Grant 7,232,917 - Sumida , et al. June 19, 2 | 2007-06-19 |
Novel ester compound, polymer, resist composition, and patterning process App 20070128555 - Harada; Yuji ;   et al. | 2007-06-07 |
Fluorine-containing polymer coating composition, method for forming fluorine-containing polymer film using coating composition, and method for forming photoresist or lithographic pattern App 20070105044 - Maeda; Kazuhiko ;   et al. | 2007-05-10 |
Process for producing top coat film used in lithography App 20070087125 - Maeda; Kazuhiko ;   et al. | 2007-04-19 |
Resist protective coating material and patterning process App 20070026341 - Hatakeyama; Jun ;   et al. | 2007-02-01 |
Polymers, resist compositions and patterning process Grant 7,169,869 - Harada , et al. January 30, 2 | 2007-01-30 |
Cyclic fluorine compounds, polymerizable fluoromonomers, fluoropolymers, and resist materials containing the fluoropolymers and method for pattern formation App 20060270864 - Sumida; Shinichi ;   et al. | 2006-11-30 |
Novel polymerizable ester compounds App 20060269870 - Harada; Yuji ;   et al. | 2006-11-30 |
Polymer, resist composition and patterning process App 20060269871 - Harada; Yuji ;   et al. | 2006-11-30 |
Fluorine-containing allyl ether compounds, their copolymers, and resist compositions and anti-reflection file material using such copolymers App 20060264592 - Kobayashi; Satoru ;   et al. | 2006-11-23 |
Polymers, resist compositions and patterning process Grant 7,125,643 - Harada , et al. October 24, 2 | 2006-10-24 |
Sulfonates, polymers, resist compositions and patterning process Grant 7,125,642 - Harada , et al. October 24, 2 | 2006-10-24 |
Polymers, resist compositions and patterning process Grant 7,125,641 - Harada , et al. October 24, 2 | 2006-10-24 |
Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions Grant 7,125,943 - Sumida , et al. October 24, 2 | 2006-10-24 |
Lactone compounds, lactone-containing monomers, their polymers, resist compositions using same, and processes for forming patterns using same Grant 7,122,292 - Sumida , et al. October 17, 2 | 2006-10-17 |
Fluorine-containing allyl ether compounds, their copolymers, and resist compositions and anti-reflection film materials using such copolymers Grant 7,109,383 - Kobayashi , et al. September 19, 2 | 2006-09-19 |
Fluorine-containing polymerizable monomers and polymers, anti-reflection film materials and resist compositions using same Grant 7,105,618 - Komoriya , et al. September 12, 2 | 2006-09-12 |
Fluorine-containing polymerizable monomers, fluorine-containing polymer compounds, resist compositions using the same, and patterning process App 20060194143 - Sumida; Shinichi ;   et al. | 2006-08-31 |
Polymer, resist composition and patterning process App 20060177765 - Harada; Yuji ;   et al. | 2006-08-10 |
Polymers, resist compositions and patterning process Grant 7,067,231 - Harada , et al. June 27, 2 | 2006-06-27 |
Fluorinated cyclic compound, polymerizable fluoromonomer, fluoropolymer, resist material comprising the same, and method of forming pattern with the same App 20060135744 - Komoriya; Haruhiko ;   et al. | 2006-06-22 |
Transparent fluorine-containing copolymer Grant 7,060,771 - Komoriya , et al. June 13, 2 | 2006-06-13 |
Transparent fluorine-containing copolymer App 20060063902 - Komoriya; Haruhiko ;   et al. | 2006-03-23 |
Lactone compounds, lactone-containing monomers, their polymers, resist compositions using same, and processes for forming patterns using same App 20060057489 - Sumida; Shinichi ;   et al. | 2006-03-16 |
Resist compositions and patterning process Grant 7,001,707 - Hatakeyama , et al. February 21, 2 | 2006-02-21 |
Polymer, resist protective coating material, and patterning process App 20060029884 - Hatakeyama; Jun ;   et al. | 2006-02-09 |
Fluorine-containing cyclic esters, fluorine-containing cyclic alcohols, and their production processes Grant 6,992,210 - Kobayashi , et al. January 31, 2 | 2006-01-31 |
Polymers, resist compositions and patterning process App 20050267275 - Harada, Yuji ;   et al. | 2005-12-01 |
Top coat composition App 20050250898 - Maeda, Kazuhiko ;   et al. | 2005-11-10 |
Polymer, resist composition, and patterning process App 20050221221 - Hatakeyama, Jun ;   et al. | 2005-10-06 |
Polymers, resist compositions and patterning process Grant 6,946,235 - Harada , et al. September 20, 2 | 2005-09-20 |
Process for producing fluorine-containing, polymerizable styrene monomer and intermediates used in same Grant 6,943,271 - Sumida , et al. September 13, 2 | 2005-09-13 |
Polymer, resist composition, and patterning process App 20050175935 - Harada, Yuji ;   et al. | 2005-08-11 |
Esters, polymers, resist compositions and patterning process Grant 6,916,592 - Harada , et al. July 12, 2 | 2005-07-12 |
Polymers, resist compositions and patterning process App 20050106499 - Harada, Yuji ;   et al. | 2005-05-19 |
Polymers, resist compositions and patterning process App 20050089797 - Harada, Yuji ;   et al. | 2005-04-28 |
Resist compositions and patterning process App 20050084796 - Hatakeyama, Jun ;   et al. | 2005-04-21 |
Resist compositions and patterning process Grant 6,875,556 - Harada , et al. April 5, 2 | 2005-04-05 |
Polymers, resist compositions and patterning process Grant 6,872,514 - Harada , et al. March 29, 2 | 2005-03-29 |
Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method Grant 6,858,760 - Komoriya , et al. February 22, 2 | 2005-02-22 |
Chemically amplified resist compositions and patterning process Grant 6,855,477 - Hatakeyama , et al. February 15, 2 | 2005-02-15 |
Polymers, resist compositions and patterning process Grant 6,824,955 - Harada , et al. November 30, 2 | 2004-11-30 |
Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method App 20040225159 - Komoriya, Haruhiko ;   et al. | 2004-11-11 |
Fluorine-containing cyclic esters, fluorine-containing cyclic alcohols, and their production processes App 20040180954 - Kobayashi, Satoru ;   et al. | 2004-09-16 |
Polymers, resist compositions and patterning process App 20040157155 - Harada, Yuji ;   et al. | 2004-08-12 |
Sulfonates, polymers, resist compositions and patterning process App 20040157156 - Harada, Yuji ;   et al. | 2004-08-12 |
Resist compositions and patterning process App 20040144752 - Harada, Yuji ;   et al. | 2004-07-29 |
Fluorine-containing allyl ether compounds, their copolymers, and resist compositions and anti-reflection film materials using such copolymers App 20040116750 - Kobayashi, Satoru ;   et al. | 2004-06-17 |
Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions App 20040106755 - Sumida, Shinichi ;   et al. | 2004-06-03 |
Polymers, resist compositions and patterning process App 20040030079 - Harada, Yuji ;   et al. | 2004-02-12 |
Fluorinated polymer App 20040023176 - Harada, Yuji ;   et al. | 2004-02-05 |
Process for producing fluorine-containing, polymerizable styrene monomer and intermediates used in same App 20040002612 - Sumida, Shinichi ;   et al. | 2004-01-01 |
Transparent fluorine-containing copolymer App 20030236369 - Komoriya, Haruhiko ;   et al. | 2003-12-25 |
Fluorine-containing polymerizable monomers and polymers, anti-reflection film materials and resist compositions using same App 20030232940 - Komoriya, Haruhiko ;   et al. | 2003-12-18 |
Novel esters, polymers, resist compositions and patterning process App 20030219678 - Harada, Yuji ;   et al. | 2003-11-27 |
Polymers, resist compositions and patterning process App 20030215739 - Harada, Yuji ;   et al. | 2003-11-20 |
Polymers, resist compositions and patterning process App 20030165773 - Harada, Yuji ;   et al. | 2003-09-04 |
Ester compounds Grant 6,603,037 - Harada , et al. August 5, 2 | 2003-08-05 |
Novel Ester Compounds App 20030100791 - Harada, Yuji ;   et al. | 2003-05-29 |
Chemically amplified resist compositions and patterning process App 20030099901 - Hatakeyama, Jun ;   et al. | 2003-05-29 |
Coated granular fertilizer and method for producing same Grant 6,322,606 - Komoriya , et al. November 27, 2 | 2001-11-27 |
Coated granular fertilizer and method for producing same Grant 6,176,891 - Komoriya , et al. January 23, 2 | 2001-01-23 |