Komori; Katsuhiko
Patent Applications and Registrations
Patent applications and USPTO patent grants for Komori; Katsuhiko.The latest application filed is for "film forming apparatus, film forming method and heat insulating member".
- Komori; Katsuhiko - Nirasaki JP
- KOMORI; Katsuhiko - Nirasaki City JP
- Komori; Katsuhiko - Yamanashi JP
- Komori; Katsuhiko - Tokyo JP
| Patent | Date |
|---|---|
| Film forming apparatus, film forming method and heat insulating member Grant 10,570,508 - Takagi , et al. Feb | 2020-02-25 |
| Film Forming Apparatus, Film Forming Method And Heat Insulating Member App 20180179625 - TAKAGI; Satoshi ; et al. | 2018-06-28 |
| Film forming method Grant 9,984,875 - Takahashi , et al. May 29, 2 | 2018-05-29 |
| Substrate processing method and control apparatus Grant 9,798,317 - Takenaga , et al. October 24, 2 | 2017-10-24 |
| Heat treatment system, heat treatment method, and program Grant 9,799,577 - Takenaga , et al. October 24, 2 | 2017-10-24 |
| Silicon film forming method, thin film forming method and cross-sectional shape control method Grant 9,758,865 - Hasebe , et al. September 12, 2 | 2017-09-12 |
| Film Forming Method App 20170243742 - TAKAHASHI; Kazuya ; et al. | 2017-08-24 |
| Heat Treatment System, Heat Treatment Method, And Program App 20170133285 - Takenaga; Yuichi ; et al. | 2017-05-11 |
| Method and apparatus for forming silicon film Grant 9,558,940 - Komori January 31, 2 | 2017-01-31 |
| Method and apparatus for forming silicon film Grant 9,490,139 - Komori , et al. November 8, 2 | 2016-11-08 |
| Vertical Heat Treatment Apparatus App 20160289833 - OKADA; Mitsuhiro ; et al. | 2016-10-06 |
| Method for Crystallizing Group IV Semiconductor, and Film Forming Apparatus App 20160244892 - TAKAHASHI; Kazuya ; et al. | 2016-08-25 |
| Trench filling method and processing apparatus Grant 9,384,974 - Suzuki , et al. July 5, 2 | 2016-07-05 |
| Method and apparatus for forming silicon film Grant 9,318,328 - Komori , et al. April 19, 2 | 2016-04-19 |
| Film deposition method and film deposition apparatus Grant 9,005,459 - Kakimoto , et al. April 14, 2 | 2015-04-14 |
| Method And Apparatus For Forming Silicon Film App 20150037975 - KOMORI; Katsuhiko ; et al. | 2015-02-05 |
| Silicon Film Forming Method, Thin Film Forming Method and Cross-Sectional Shape Control Method App 20150037970 - HASEBE; Kazuhide ; et al. | 2015-02-05 |
| Film formation apparatus Grant 8,945,339 - Kakimoto , et al. February 3, 2 | 2015-02-03 |
| Substrate Processing Method And Control Apparatus App 20150011091 - Takenaga; Yuichi ; et al. | 2015-01-08 |
| Trench Filling Method And Processing Apparatus App 20140349468 - SUZUKI; Daisuke ; et al. | 2014-11-27 |
| Method And Apparatus For Forming Silicon Film App 20140199824 - KOMORI; Katsuhiko | 2014-07-17 |
| Method And Apparatus For Forming Silicon Film App 20130323915 - KOMORI; Katsuhiko ; et al. | 2013-12-05 |
| Film Deposition Method And Film Deposition Apparatus App 20120267340 - KAKIMOTO; Akinobu ; et al. | 2012-10-25 |
| Film Formation Apparatus App 20120103518 - KAKIMOTO; Akinobu ; et al. | 2012-05-03 |
| Vertical CVD apparatus for forming silicon-germanium film Grant 7,648,895 - Kurokawa , et al. January 19, 2 | 2010-01-19 |
| Vertical Cvd Appparatus For Forming Silicon-germanium Film App 20090104760 - KUROKAWA; Masaki ; et al. | 2009-04-23 |
| Film formation method and apparatus for semiconductor process Grant 7,273,818 - Kurokawa , et al. September 25, 2 | 2007-09-25 |
| Vertical CVD apparatus for forming silicon-germanium film App 20050181586 - Kurokawa, Masaki ; et al. | 2005-08-18 |
| Film formation method and apparatus for semiconductor process App 20050170617 - Kurokawa, Masaki ; et al. | 2005-08-04 |
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