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Patent applications and USPTO patent grants for KOMORI; Eiichi.The latest application filed is for "powder transfer apparatus, gas supply apparatus, and powder removal method".
Patent | Date |
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Powder Transfer Apparatus, Gas Supply Apparatus, And Powder Removal Method App 20220243321 - KOMORI; Eiichi | 2022-08-04 |
Valve device, processing apparatus, and control method Grant 11,306,847 - Kimoto , et al. April 19, 2 | 2022-04-19 |
Substrate processing apparatus, substrate processing system, and substrate processing method Grant 11,286,563 - Komori March 29, 2 | 2022-03-29 |
Method of processing substrate Grant 11,236,425 - Mo , et al. February 1, 2 | 2022-02-01 |
Source material container Grant 11,193,205 - Furuya , et al. December 7, 2 | 2021-12-07 |
Pipe Heating Device and Substrate Processing Apparatus App 20200182390 - KIMOTO; Tomohisa ;   et al. | 2020-06-11 |
Substrate Processing Apparatus, Substrate Processing System, And Substrate Processing Method App 20200157681 - KOMORI; Eiichi | 2020-05-21 |
Raw material gas supply apparatus and film forming apparatus Grant 10,612,143 - Komori , et al. | 2020-04-07 |
Valve Device, Processing Apparatus, And Control Method App 20200056724 - KIMOTO; Tomohisa ;   et al. | 2020-02-20 |
Film forming apparatus Grant 10,526,702 - Toriya , et al. J | 2020-01-07 |
Source Material Container App 20190180988 - FURUYA; Yuichi ;   et al. | 2019-06-13 |
Method Of Processing Substrate, Storage Medium, And Raw Material Gas Supply Device App 20190177849 - MO; Kennan ;   et al. | 2019-06-13 |
Film forming apparatus Grant 10,094,019 - Toriya , et al. October 9, 2 | 2018-10-09 |
Trap mechanism, exhaust system, and film formation device Grant 10,036,090 - Komori , et al. July 31, 2 | 2018-07-31 |
Film Forming Apparatus App 20160355928 - TORIYA; Daisuke ;   et al. | 2016-12-08 |
Raw Material Gas Supply Apparatus And Film Forming Apparatus App 20160273101 - KOMORI; Eiichi ;   et al. | 2016-09-22 |
Etching method, storage medium and etching apparatus Grant 9,390,933 - Narushima , et al. July 12, 2 | 2016-07-12 |
Etching Method, Storage Medium And Etching Apparatus App 20150187593 - NARUSHIMA; Kensaku ;   et al. | 2015-07-02 |
Trap Mechanism, Exhaust System, and Film Formation Device App 20150047565 - Komori; Eiichi ;   et al. | 2015-02-19 |
Film Forming Apparatus App 20140130743 - TORIYA; Daisuke ;   et al. | 2014-05-15 |
Method For Supplying Process Gas, System For Supplying Process Gas, And System For Processing Object To Be Processed App 20100037959 - Kamaishi; Takayuki ;   et al. | 2010-02-18 |
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