Komiya; Takaharu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Komiya; Takaharu.The latest application filed is for "optical element, exposure apparatus using this, and device manufacturing method".

Company Profile

0.4.6

Komiya; Takaharu - Sagamihara JP
Komiya; Takaharu - Sagamihara-shi JP
Komiya; Takaharu - Yokohama JP
Komiya; Takaharu - Yokohama-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical element, exposure apparatus using this, and device manufacturing method Grant 8,121,254 - Murakami , et al. February 21, 2	2012-02-21
Optical Element, Exposure Apparatus Using This, And Device Manufacturing Method App 20100190113 - Murakami; Katsuhiko ; et al.	2010-07-29
Multilayer mirror, method for manufacturing the same, and exposure equipment Grant 7,706,058 - Kandaka , et al. April 27, 2	2010-04-27
Multilayer mirror, method for manufacturing the same, and exposure equipment App 20090097104 - Kandaka; Noriaki ; et al.	2009-04-16
Optical Apparatus, Multilayer-film Reflective Mirror, Exposure Apparatus, And Device App 20080266651 - Murakami; Katsuhiko ; et al.	2008-10-30
Optical Apparatus, Multilayer-film Reflective Mirror, Exposure Apparatus, And Device App 20080268380 - Murakami; Katsuhiko ; et al.	2008-10-30
Multilayer mirror, method for manufacturing the same, and exposure equipment Grant 7,440,182 - Kandaka , et al. October 21, 2	2008-10-21
EUV multilayer mirror with phase shifting layer Grant 7,382,527 - Kandaka , et al. June 3, 2	2008-06-03
Multilayer mirror, method for manufacturing the same, and exposure equipment App 20080049307 - Kandaka; Nariaki ; et al.	2008-02-28
Multilayer mirror, method for manufacturing the same, and exposure equipment App 20060192147 - Kandaka; Noriaki ; et al.	2006-08-31

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