| Patent | Date |
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Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method, And Method For Manufacturing Optical Apparatus
App 20220260923 - KOMATSUDA; Hideki ; et al. | 2022-08-18 |
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
Grant 11,353,795 - Komatsuda , et al. June 7, 2 | 2022-06-07 |
Image-forming Optical System, Exposure Apparatus, And Device Producing Method
App 20210200100 - KOMATSUDA; Hideki | 2021-07-01 |
Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method, And Method For Manufacturing Optical Apparatus
App 20210026251 - KOMATSUDA; Hideki ; et al. | 2021-01-28 |
Image-forming optical system, exposure apparatus, and device producing method
Grant 10,866,522 - Komatsuda December 15, 2 | 2020-12-15 |
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
Grant 10,831,106 - Komatsuda , et al. November 10, 2 | 2020-11-10 |
Illumination device
Grant 10,459,343 - Komatsuda Oc | 2019-10-29 |
Image-forming Optical System, Exposure Apparatus, And Device Producing Method
App 20190302621 - KOMATSUDA; Hideki | 2019-10-03 |
Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method
App 20190302435 - KOMATSUDA; Hideki ; et al. | 2019-10-03 |
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
Grant 10,345,708 - Komatsuda , et al. July 9, 2 | 2019-07-09 |
Illumination Device
App 20190086812 - KOMATSUDA; Hideki | 2019-03-21 |
Image-forming optical system, exposure apparatus, and device producing method
Grant 10,228,623 - Komatsuda | 2019-03-12 |
Illumination device
Grant 10,162,269 - Komatsuda Dec | 2018-12-25 |
Image-forming Optical System, Exposure Apparatus, And Device Producing Method
App 20180210347 - KOMATSUDA; Hideki | 2018-07-26 |
Image-forming optical system, exposure apparatus, and device producing method
Grant 9,939,733 - Komatsuda April 10, 2 | 2018-04-10 |
Illumination Device
App 20170343902 - KOMATSUDA; Hideki | 2017-11-30 |
Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method, And Method For Manufacturing Optical Apparatus
App 20170285314 - KOMATSUDA; Hideki ; et al. | 2017-10-05 |
Illumination device
Grant 9,760,012 - Komatsuda September 12, 2 | 2017-09-12 |
Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus
Grant 9,703,204 - Komatsuda , et al. July 11, 2 | 2017-07-11 |
Image-forming Optical System, Exposure Apparatus, And Device Producing Method
App 20170146911 - Komatsuda; Hideki | 2017-05-25 |
Image-forming optical system, exposure apparatus, and device producing method
Grant 9,557,548 - Komatsuda January 31, 2 | 2017-01-31 |
Reflecting optical member, optical system, exposure apparatus, and device manufacturing method
Grant 9,477,156 - Takino , et al. October 25, 2 | 2016-10-25 |
Illumination optical apparatus, exposure apparatus, and device manufacturing method
Grant 9,195,069 - Tanaka , et al. November 24, 2 | 2015-11-24 |
Illumination Optical Device, Optical Unit, Illumination Method, And Exposure Method And Device
App 20140293254 - KOMATSUDA; Hideki | 2014-10-02 |
Illumination Device
App 20140218705 - Komatsuda; Hideki | 2014-08-07 |
Illumination optical apparatus, exposure apparatus, and device manufacturing method
Grant 8,780,328 - Komatsuda July 15, 2 | 2014-07-15 |
Intermittent Temperature Control Of Movable Optical Elements
App 20140176931 - Phillips; Alton H. ; et al. | 2014-06-26 |
Reflecting Optical Member, Optical System, Exposure Apparatus, And Device Manufacturing Method
App 20130335720 - Takino; Hideo ; et al. | 2013-12-19 |
Exposure apparatus and electronic device manufacturing method
Grant 8,467,032 - Komatsuda June 18, 2 | 2013-06-18 |
Light Source Apparatus, Optical Apparatus, Exposure Apparatus, Device Manufacturing Method, Illuminating Method, Exposure Method, And Method For Manufacturing Optical Apparatus
App 20130128248 - Komatsuda; Hideki ; et al. | 2013-05-23 |
Image-forming Optical System, Exposure Apparatus, And Device Producing Method
App 20120287413 - Komatsuda; Hideki | 2012-11-15 |
Illumination optical apparatus, exposure apparatus, and device manufacturing method
Grant 8,081,296 - Komatsuda December 20, 2 | 2011-12-20 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,023,103 - Shibazaki , et al. September 20, 2 | 2011-09-20 |
Light Source Apparatus, Exposure Apparatus, And Electronic Device Manufacturing Method
App 20110109890 - KOMATSUDA; Hideki | 2011-05-12 |
Lighting apparatus, exposure apparatus and microdevice manufacturing method
Grant 7,800,734 - Komatsuda September 21, 2 | 2010-09-21 |
Illumination Optical Apparatus, Exposure Apparatus, And Device Manufacturing Method
App 20100141922 - KOMATSUDA; Hideki | 2010-06-10 |
Exposure apparatus and electronic device manufacturing method
App 20090257042 - Komatsuda; Hideki | 2009-10-15 |
Optical Attenuator Plate, Exposure Apparatus, Exposure Method, And Device Manufacturing Method
App 20090239178 - Ikeda; Junji ; et al. | 2009-09-24 |
Reflective Projection Optical System, Exposure Apparatus, Device Manufacturing Method, Projection Method, And Exposure Method
App 20090135510 - Ono; Takuro ; et al. | 2009-05-28 |
Illumination Optical Apparatus, Exposure Apparatus, And Device Manufacturing Method
App 20090046265 - KOMATSUDA; Hideki | 2009-02-19 |
Illumination Optical System, Illumination Optical Apparatus, Exposure Apparatus, And Device Manufacturing Method
App 20090040493 - Komatsuda; Hideki | 2009-02-12 |
Illumination Systems, Exposure Apparatus, And Microdevice-manufacturing Methods Using Same
App 20090033903 - Komatsuda; Hideki | 2009-02-05 |
Projection optical system, exposure apparatus, and exposure method
Grant 7,483,122 - Komatsuda , et al. January 27, 2 | 2009-01-27 |
Lighting Apparatus, Exposure Apparatus And Microdevice Manufacturing Method
App 20090002662 - Komatsuda; Hideki | 2009-01-01 |
Optical integrator, illumination optical device, exposure device, and exposure method
Grant 7,471,456 - Komatsuda December 30, 2 | 2008-12-30 |
Illumination systems, exposure apparatus, and microdevice-manufacturing methods using same
Grant 7,446,856 - Komatsuda November 4, 2 | 2008-11-04 |
Projection optical system, exposure apparatus, and exposure method
App 20080079924 - Komatsuda; Hideki ; et al. | 2008-04-03 |
Projection optical system, exposure apparatus, and exposure method in which a reflective projection optical system has a non-circular aperture stop
Grant 7,312,851 - Komatsuda , et al. December 25, 2 | 2007-12-25 |
Illumination optical apparatus, exposure apparatus, and device manufacturing method
App 20070273859 - Komatsuda; Hideki | 2007-11-29 |
Illumination optical apparatus, exposure apparatus, and device manufacturing method
App 20070258077 - Tanaka; Hirohisa ; et al. | 2007-11-08 |
Exposure apparatus, exposure method, and method for producing device
App 20070242249 - Shibazaki; Yuichi ; et al. | 2007-10-18 |
Optical integrator, illumination optical device, exposure device, and exposure method
App 20070132977 - Komatsuda; Hideki | 2007-06-14 |
Illumination systems, exposure apparatus, and microdevice-manufacturing methods using same
App 20060170894 - Komatsuda; Hideki | 2006-08-03 |
Exposure system and exposure method
Grant 7,023,523 - Komatsuda April 4, 2 | 2006-04-04 |
Illumination system and exposure apparatus and method
Grant 7,023,953 - Komatsuda April 4, 2 | 2006-04-04 |
Projection optical system, exposure apparatus, and exposure method
App 20060012767 - Komatsuda; Hideki ; et al. | 2006-01-19 |
Exposure system and exposure method
App 20050264789 - Komatsuda, Hideki | 2005-12-01 |
Exposure apparatus and exposure method using same
Grant 6,842,500 - Komatsuda , et al. January 11, 2 | 2005-01-11 |
Exposure apparatus and method of fabricating a micro-device using the exposure apparatus
Grant 6,833,904 - Komatsuda December 21, 2 | 2004-12-21 |
Illumination optical system, exposure apparatus, and microdevice manufacturing method
Grant 6,819,403 - Komatsuda November 16, 2 | 2004-11-16 |
Imaging optical system and exposure apparatus
Grant 6,781,671 - Komatsuda August 24, 2 | 2004-08-24 |
Projection optical system, exposure apparatus, and exposure method
Grant 6,768,537 - Suzuki , et al. July 27, 2 | 2004-07-27 |
Illumination apparatus, exposure method, exposure apparatus, and device manufacturing method
App 20040104359 - Komatsuda, Hideki ; et al. | 2004-06-03 |
Illumination system and exposure apparatus and method
App 20040090609 - Komatsuda, Hideki | 2004-05-13 |
Illumination system and exposure apparatus and method
App 20040085645 - Komatsuda, Hideki | 2004-05-06 |
Illumination system and exposure apparatus and method
App 20040084632 - Komatsuda, Hideki | 2004-05-06 |
Apparatus and method for pattern exposure and method for adjusting the apparatus
Grant 6,727,980 - Ota , et al. April 27, 2 | 2004-04-27 |
Projection optical system, exposure device using said projection optical system, and exposure method using said exposure device
App 20040051852 - Komatsuda, Hideki | 2004-03-18 |
Illumination system and exposure apparatus and method
Grant 6,665,051 - Komatsuda December 16, 2 | 2003-12-16 |
Projection exposure apparatus with a catadioptric projection optical system
Grant 6,661,499 - Omura , et al. December 9, 2 | 2003-12-09 |
Projection optical system, exposure apparatus, and exposure method
App 20030218729 - Suzuki, Takeshi ; et al. | 2003-11-27 |
Method and apparatus for illuminating a surface using a projection imaging apparatus
App 20030160949 - Komatsuda, Hideki ; et al. | 2003-08-28 |
Method and apparatus for illuminating a surface using a projection imaging apparatus
App 20030156269 - Komatsuda, Hideki ; et al. | 2003-08-21 |
Method and apparatus for illuminating a surface using a projection imaging apparatus
Grant 6,563,567 - Komatsuda , et al. May 13, 2 | 2003-05-13 |
Multilayer-film mirrors for use in extreme UV optical systems, and methods for manufacturing such mirrors exhibiting improved wave aberrations
App 20030081722 - Kandaka, Noriaki ; et al. | 2003-05-01 |
Imaging optical system and exposure apparatus
App 20030076483 - Komatsuda, Hideki | 2003-04-24 |
Illumination optical system, exposure apparatus, and microdevice manufacturing method
App 20030067591 - Komatsuda, Hideki | 2003-04-10 |
Projection exposure apparatus and method, and illumination optical system thereof
Grant 6,526,118 - Komatsuda , et al. February 25, 2 | 2003-02-25 |
Projection exposure apparatus with a catadioptric projection optical system
App 20030011756 - Omura, Yasuhiro ; et al. | 2003-01-16 |
Illumination system and exposure apparatus and method
App 20020191170 - Komatsuda, Hideki | 2002-12-19 |
Projection exposure apparatus with a catadioptric projection optical system
Grant 6,466,303 - Omura , et al. October 15, 2 | 2002-10-15 |
Illumination system and exposure apparatus and method
Grant 6,452,661 - Komatsuda September 17, 2 | 2002-09-17 |
Method for designing optical system, optical system and projection exposure apparatus
App 20020129328 - Komatsuda, Hideki | 2002-09-12 |
Illumination system and exposure apparatus and method
App 20020097387 - Komatsuda, Hideki | 2002-07-25 |
Illumination system and exposure apparatus and method
App 20020093636 - Komatsuda, Hideki | 2002-07-18 |
Projection Exposure Apparatus And Method, And Illumination Optical System Thereof
App 20020054660 - KOMATSUDA, HIDEKI ; et al. | 2002-05-09 |
Apparatus and method for pattern exposure and method for adjusting the apparatus
App 20020041368 - Ota, Kazuya ; et al. | 2002-04-11 |
High-intensity sources of short-wavelength electromagnetic radiation for microlithography and other uses
App 20010055364 - Kandaka, Noriaki ; et al. | 2001-12-27 |
Method for manufacturing a device, an exposure apparatus, and a method for manufacturing an exposure apparatus
Grant 6,266,389 - Murayama , et al. July 24, 2 | 2001-07-24 |
Illumination optical system and projection exposure apparatus using same
Grant 6,249,382 - Komatsuda June 19, 2 | 2001-06-19 |
Illumination apparatus, a projection exposure apparatus having the same, a method of manufacturing a device using the same, and a method of manufacturing the projection exposure apparatus
Grant 6,049,374 - Komatsuda , et al. April 11, 2 | 2000-04-11 |
Illumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the same
Grant 5,594,587 - Komatsuda , et al. January 14, 1 | 1997-01-14 |
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