Patent | Date |
---|
Plasma probe device and plasma processing apparatus Grant 11,164,730 - Ikeda , et al. November 2, 2 | 2021-11-02 |
Plasma processing apparatus and gas introduction mechanism Grant 10,804,078 - Fujino , et al. October 13, 2 | 2020-10-13 |
Microwave plasma source and plasma processing apparatus Grant 10,727,030 - Ikeda , et al. | 2020-07-28 |
Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate Grant 10,557,200 - Ikeda , et al. Feb | 2020-02-11 |
Microwave Plasma Processing Apparatus App 20190189398 - IKEDA; Taro ;   et al. | 2019-06-20 |
Plasma Probe Device And Plasma Processing Apparatus App 20190074166 - IKEDA; Taro ;   et al. | 2019-03-07 |
Plasma Processing Apparatus App 20190075644 - IKEDA; Taro ;   et al. | 2019-03-07 |
Microwave plasma source and plasma processing apparatus Grant 10,211,032 - Komatsu , et al. Feb | 2019-02-19 |
Plasma Processing Apparatus App 20180337023 - IKEDA; Taro ;   et al. | 2018-11-22 |
Plasma processing apparatus Grant 9,991,097 - Komatsu , et al. June 5, 2 | 2018-06-05 |
Plasma Processing Apparatus App 20180114677 - KOMATSU; Tomohito ;   et al. | 2018-04-26 |
Plasma Processing Apparatus And Gas Introduction Mechanism App 20170309452 - FUJINO; Yutaka ;   et al. | 2017-10-26 |
Antenna for plasma generation, plasma processing apparatus and plasma processing method Grant 9,552,966 - Komatsu , et al. January 24, 2 | 2017-01-24 |
Microwave radiation antenna, microwave plasma source and plasma processing apparatus Grant 9,548,187 - Ikeda , et al. January 17, 2 | 2017-01-17 |
Plasma processing apparatus and plasma generation antenna Grant 9,543,123 - Ikeda , et al. January 10, 2 | 2017-01-10 |
Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus Grant 9,520,272 - Ikeda , et al. December 13, 2 | 2016-12-13 |
Microwave Plasma Source And Plasma Processing Apparatus App 20160358757 - IKEDA; Taro ;   et al. | 2016-12-08 |
Plasma Processing Device App 20160222516 - IKEDA; Taro ;   et al. | 2016-08-04 |
Impedance Matching Slug, Impedance Matching Device, Electromagnetic Wave Transmission Device, Electromagnetic Wave Radiation Device, And Plasma Processing Apparatus App 20150348758 - MIYASHITA; Hiroyuki ;   et al. | 2015-12-03 |
Microwave Plasma Source And Plasma Processing Apparatus App 20150170881 - KOMATSU; Tomohito ;   et al. | 2015-06-18 |
Microwave Emission Mechanism, Microwave Plasma Source And Surface Wave Plasma Processing Apparatus App 20140361684 - Ikeda; Taro ;   et al. | 2014-12-11 |
Antenna For Plasma Generation, Plasma Processing Apparatus And Plasma Processing Method App 20140339981 - Komatsu; Tomohito ;   et al. | 2014-11-20 |
Microwave Radiation Antenna, Microwave Plasma Source And Plasma Processing Apparatus App 20140158302 - IKEDA; Taro ;   et al. | 2014-06-12 |
Mounting table structure, and processing apparatus Grant 8,334,481 - Komatsu , et al. December 18, 2 | 2012-12-18 |
Plasma Processing Apparatus And Plasma Generation Antenna App 20120247675 - IKEDA; Taro ;   et al. | 2012-10-04 |
Mounting table structure and heat treatment apparatus Grant 8,203,104 - Komatsu June 19, 2 | 2012-06-19 |
Heat Treatment Apparatus App 20120145697 - Komatsu; Tomohito ;   et al. | 2012-06-14 |
Mounting Table Structure And Processing Apparatus App 20120031889 - Komatsu; Tomohito | 2012-02-09 |
Substrate stage mechanism and substrate processing apparatus Grant 8,055,125 - Komatsu November 8, 2 | 2011-11-08 |
Loading Table Structure And Processing Device App 20110005686 - TANAKA; Sumi ;   et al. | 2011-01-13 |
Vaporizer, Material Gas Supply System Including Vaporizer And Film Forming Apparatus Using Such System App 20100186673 - TANAKA; Sumi ;   et al. | 2010-07-29 |
Mounting Table Structure, And Processing Apparatus App 20090277895 - KOMATSU; Tomohito ;   et al. | 2009-11-12 |
Heater for manufacturing semiconductor Grant D601,521 - Komatsu October 6, 2 | 2009-10-06 |
Placing Table Structure, Method For Manufacturing Placing Table Structure And Heat Treatment Apparatus App 20090139979 - Komatsu; Tomohito | 2009-06-04 |
Substrate Stage Mechanism And Substrate Processing Apparatus App 20090123140 - Komatsu; Tomohito | 2009-05-14 |
Mounting Table Structure And Heat Treatment Apparatus App 20090095733 - KOMATSU; Tomohito | 2009-04-16 |
Heater for manufacturing semiconductor Grant D589,471 - Komatsu March 31, 2 | 2009-03-31 |
Trapping device, processing system, and method removing impurities Grant 7,488,374 - Komatsu February 10, 2 | 2009-02-10 |
Substrate-placing mechanism having substrate-heating function Grant 7,299,566 - Komatsu November 27, 2 | 2007-11-27 |
Substrate-placing mechanism having substrate-heating function App 20060207120 - Komatsu; Tomohito | 2006-09-21 |
Vacuum processing apparatus App 20060160359 - Kasai; Shigeru ;   et al. | 2006-07-20 |
Trapping device, processing system, and method removing impurities App 20060144234 - Komatsu; Tomohito | 2006-07-06 |