Komatsu; Tomohito

Patent Applications and Registrations

Patent applications and USPTO patent grants for Komatsu; Tomohito.The latest application filed is for "microwave plasma processing apparatus".

Company Profile

5.18.25

Komatsu; Tomohito - Yamanashi JP
Komatsu; Tomohito - Nirasaki JP
KOMATSU; Tomohito - Nirasaki City JP
Komatsu; Tomohito - Nirasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma probe device and plasma processing apparatus Grant 11,164,730 - Ikeda , et al. November 2, 2	2021-11-02
Plasma processing apparatus and gas introduction mechanism Grant 10,804,078 - Fujino , et al. October 13, 2	2020-10-13
Microwave plasma source and plasma processing apparatus Grant 10,727,030 - Ikeda , et al.	2020-07-28
Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate Grant 10,557,200 - Ikeda , et al. Feb	2020-02-11
Microwave Plasma Processing Apparatus App 20190189398 - IKEDA; Taro ; et al.	2019-06-20
Plasma Probe Device And Plasma Processing Apparatus App 20190074166 - IKEDA; Taro ; et al.	2019-03-07
Plasma Processing Apparatus App 20190075644 - IKEDA; Taro ; et al.	2019-03-07
Microwave plasma source and plasma processing apparatus Grant 10,211,032 - Komatsu , et al. Feb	2019-02-19
Plasma Processing Apparatus App 20180337023 - IKEDA; Taro ; et al.	2018-11-22
Plasma processing apparatus Grant 9,991,097 - Komatsu , et al. June 5, 2	2018-06-05
Plasma Processing Apparatus App 20180114677 - KOMATSU; Tomohito ; et al.	2018-04-26
Plasma Processing Apparatus And Gas Introduction Mechanism App 20170309452 - FUJINO; Yutaka ; et al.	2017-10-26
Antenna for plasma generation, plasma processing apparatus and plasma processing method Grant 9,552,966 - Komatsu , et al. January 24, 2	2017-01-24
Microwave radiation antenna, microwave plasma source and plasma processing apparatus Grant 9,548,187 - Ikeda , et al. January 17, 2	2017-01-17
Plasma processing apparatus and plasma generation antenna Grant 9,543,123 - Ikeda , et al. January 10, 2	2017-01-10
Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus Grant 9,520,272 - Ikeda , et al. December 13, 2	2016-12-13
Microwave Plasma Source And Plasma Processing Apparatus App 20160358757 - IKEDA; Taro ; et al.	2016-12-08
Plasma Processing Device App 20160222516 - IKEDA; Taro ; et al.	2016-08-04
Impedance Matching Slug, Impedance Matching Device, Electromagnetic Wave Transmission Device, Electromagnetic Wave Radiation Device, And Plasma Processing Apparatus App 20150348758 - MIYASHITA; Hiroyuki ; et al.	2015-12-03
Microwave Plasma Source And Plasma Processing Apparatus App 20150170881 - KOMATSU; Tomohito ; et al.	2015-06-18
Microwave Emission Mechanism, Microwave Plasma Source And Surface Wave Plasma Processing Apparatus App 20140361684 - Ikeda; Taro ; et al.	2014-12-11
Antenna For Plasma Generation, Plasma Processing Apparatus And Plasma Processing Method App 20140339981 - Komatsu; Tomohito ; et al.	2014-11-20
Microwave Radiation Antenna, Microwave Plasma Source And Plasma Processing Apparatus App 20140158302 - IKEDA; Taro ; et al.	2014-06-12
Mounting table structure, and processing apparatus Grant 8,334,481 - Komatsu , et al. December 18, 2	2012-12-18
Plasma Processing Apparatus And Plasma Generation Antenna App 20120247675 - IKEDA; Taro ; et al.	2012-10-04
Mounting table structure and heat treatment apparatus Grant 8,203,104 - Komatsu June 19, 2	2012-06-19
Heat Treatment Apparatus App 20120145697 - Komatsu; Tomohito ; et al.	2012-06-14
Mounting Table Structure And Processing Apparatus App 20120031889 - Komatsu; Tomohito	2012-02-09
Substrate stage mechanism and substrate processing apparatus Grant 8,055,125 - Komatsu November 8, 2	2011-11-08
Loading Table Structure And Processing Device App 20110005686 - TANAKA; Sumi ; et al.	2011-01-13
Vaporizer, Material Gas Supply System Including Vaporizer And Film Forming Apparatus Using Such System App 20100186673 - TANAKA; Sumi ; et al.	2010-07-29
Mounting Table Structure, And Processing Apparatus App 20090277895 - KOMATSU; Tomohito ; et al.	2009-11-12
Heater for manufacturing semiconductor Grant D601,521 - Komatsu October 6, 2	2009-10-06
Placing Table Structure, Method For Manufacturing Placing Table Structure And Heat Treatment Apparatus App 20090139979 - Komatsu; Tomohito	2009-06-04
Substrate Stage Mechanism And Substrate Processing Apparatus App 20090123140 - Komatsu; Tomohito	2009-05-14
Mounting Table Structure And Heat Treatment Apparatus App 20090095733 - KOMATSU; Tomohito	2009-04-16
Heater for manufacturing semiconductor Grant D589,471 - Komatsu March 31, 2	2009-03-31
Trapping device, processing system, and method removing impurities Grant 7,488,374 - Komatsu February 10, 2	2009-02-10
Substrate-placing mechanism having substrate-heating function Grant 7,299,566 - Komatsu November 27, 2	2007-11-27
Substrate-placing mechanism having substrate-heating function App 20060207120 - Komatsu; Tomohito	2006-09-21
Vacuum processing apparatus App 20060160359 - Kasai; Shigeru ; et al.	2006-07-20
Trapping device, processing system, and method removing impurities App 20060144234 - Komatsu; Tomohito	2006-07-06

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