Komatsu; Takehiko
Patent Applications and Registrations
Patent applications and USPTO patent grants for Komatsu; Takehiko.The latest application filed is for "selective etching of low-k dielectrics".
- Komatsu; Takehiko - Yokohama JP
- Komatsu; Takehiko - Chiba JP
- Komatsu, Takehiko - Ichikawa JP
- Komatsu; Takehiko - Santa Clara CA
| Patent | Date |
|---|---|
| Selective etching of low-k dielectrics Grant 6,897,154 - Leung , et al. May 24, 2 | 2005-05-24 |
| Selective etching of low-k dielectrics App 20030235993 - Leung, Terry ; et al. | 2003-12-25 |
| Magnetically enhanced plasma oxide etch using hexafluorobutadiene Grant 6,613,689 - Liu , et al. September 2, 2 | 2003-09-02 |
| Magnetically enhanced plasma oxide etch using hexafluorobutadiene App 20020173162 - Liu, Jingbao ; et al. | 2002-11-21 |
| Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas Grant 6,451,703 - Liu , et al. September 17, 2 | 2002-09-17 |
| Etch method using a dielectric etch chamber with expanded process window Grant 6,403,491 - Liu , et al. June 11, 2 | 2002-06-11 |
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